Industry

Vacuum pumps for battery manufacturing

In the manufacture of lithium-ion cells, several steps need vacuum: mixing electrode paste without bubbles, drying electrodes, filling electrolyte, extracting formation gases, sealing cells and testing them for leaks – through to recycling. Leybold describes that vacuum makes some cell manufacturing steps possible in the first place and improves purity, quality and safety in others. This page belongs to the energy industry. Below you can see which series the manufacturers themselves name for these tasks – 641 models from 5 manufacturers.

Compare 641 modelsSee the applications

  • 641Models
  • 47Series
  • 5Manufacturers
  • 8Applications
Operating principle of an oil-lubricated rotary vane vacuum pump – the technology with the most models on this page. To the technology page

In short

Battery manufacturing: vacuum pumps – the key facts

  • Pumping speedFor the production of lithium batteries, Busch names R5 RA with 20–840 m³/h and an ultimate pressure of 0.1 hPa (0.5 hPa with, 0.1 hPa without gas ballast), as well as COBRA NC/NX and MINK MM/MV.
  • Electrode dryingFor the vacuum drying of the electrode coils, Leybold names 12–30 hours per batch; moisture and the solvent NMP are removed.
  • Electrolyte fillingLeybold describes repeated evacuation and partial filling for complete wetting at a minimum of about 0.01 mbar and names DRYVAC for it.
  • Explosion protectionFor lithium-ion batteries, Edwards names GXS, EDS, EXS, nES and nXDS as well as the ATEX version nES Ex – for bubble-free mixing, drying and sealing.

Applications

Battery manufacturing: what vacuum pumps are used for

For each application: what the vacuum does and which series the manufacturers name for it. The information comes from the manufacturers’ own pages.

Mixing electrode paste (slurry)

Anode and cathode paste is mixed and degassed under vacuum so that no air bubbles remain – this is how Atlas Copco and Leybold describe it. For slurry mixing, Busch names R5 RA and COBRA NC/NX, and in the product finder also MINK; Leybold names TRIVAC, SOGEVAC, VARODRY and CLAWVAC, Pfeiffer Vacuum HiScroll and HiLobe. Edwards names bubble-free mixing with GXS, EDS, EXS, nES and nXDS.

More on Mixing electrode paste (slurry) →

Drying electrodes

When the electrodes are dried, solvents and moisture are drawn off, in batches or continuously (Atlas Copco). For the vacuum drying of the electrode coils, Leybold names 12–30 hours per batch – moisture and NMP are removed – and the series VARODRY, LEYVAC, DRYVAC and RUVAC. For gentle slurry drying, Busch names R5 RA and COBRA NC/NX, Pfeiffer Vacuum HiLobe, ACP, DuoVane and HiScroll.

More on Drying electrodes →

Filling electrolyte

The cell is evacuated and then filled under vacuum (Busch). Leybold describes repeated evacuation and partial filling for complete wetting at a minimum of about 0.01 mbar and names DRYVAC. Busch names R5 RA, COBRA NC/NX and MINK MM/MV, Pfeiffer Vacuum ACP and HiScroll; Atlas Copco describes filling and degassing as one step that fills the cells and removes trapped gases.

More on Filling electrolyte →

Degassing after formation

According to Leybold, after formation the cell is pierced in the vacuum chamber and the gas is pumped off; Leybold names DRYVAC. Busch describes the removal of air bubbles from the electrolyte with R5 RA and COBRA NC/NX. Pfeiffer Vacuum names the extraction of formation gases, and HiLobe for degassing.

More on Degassing after formation →

Sealing cells and deep-drawing pouch film

Atlas Copco describes sealing under vacuum without residual air and residual moisture, and Edwards names sealing with GXS, EDS, EXS, nES and nXDS. According to Leybold, the pouch film is formed in a vacuum; Leybold names VARODRY, SOGEVAC and CLAWVAC for this.

More on Sealing cells and deep-drawing pouch film →

Leak testing and end-of-line test

Leybold describes the helium leak test of the finished cell and names PHOENIX, SCROLLVAC, VARODRY and TRIVAC. For leak detection and end-of-line testing, Busch names COBRA, PANDA and R5, and in the product finder also MINK. Pfeiffer Vacuum names A 100/200 L, ACP, DuoVane, HiLobe and HiScroll.

More on Leak testing and end-of-line test →

Battery recycling

Busch describes the recycling of lithium batteries as shredding, drying and distilling under vacuum: the air is extracted from the shredder and replaced by nitrogen, and the electrolyte is evaporated by heat and vacuum and separated by vacuum distillation. Busch names a recycling rate of over 90% and the series R5, HUCKEPACK, COBRA, DOLPHIN, MINK, PANDA and PUMA. For recycling, Pfeiffer Vacuum names ACP and HiLobe.

More on Battery recycling →

Impregnation, stacking and handling

Busch describes impregnation, which ensures contact between electrode and electrolyte, with R5 RA and COBRA NC/NX. In stacking, according to Leybold, vacuum grippers position anode, separator and cathode; Leybold names the central system VACUBE for this, and SOGEVAC, NOVADRY NDi and CLAWVAC CPi for vacuum lifters.

More on Impregnation, stacking and handling →

Manufacturers and series

Battery manufacturing: 5 manufacturers, 47 series

Listed are the series the manufacturer itself names for this industry. “Show only …” sets the filter of the product overview.

Product overview

Battery manufacturing: all 641 models compared

Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.

Atlas Copco AWC series 9 models

AWC 30Pumping speed 27 m³/h 50 Hz32 m³/h 60 HzUltimate pressure 33 mbarRated motor power 1.1 kW 50 Hz1.5 kW 60 HzVariants 6
AWC 50Pumping speed 52 m³/h 50 Hz62 m³/h 60 HzUltimate pressure 33 mbarRated motor power 1.5 kW 50 Hz2.4 kW 60 HzVariants 6
AWC 80Pumping speed 80 m³/h 50 Hz96 m³/h 60 HzUltimate pressure 33 mbarRated motor power 3 kW 50 Hz4 kW 60 HzVariants 6
AWC 110Pumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 33 mbarRated motor power 3.85 – 4 kW 50 Hz6.3 kW 60 HzVariants 9
AWC 160Pumping speed 165 m³/h 50 Hz185 m³/h 60 HzUltimate pressure 33 mbarRated motor power 4 kW 50 Hz5.5 – 6.3 kW 60 HzVariants 15
AWC 220Pumping speed 230 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 33 mbarRated motor power 5.5 kW 50 Hz7.5 – 8.2 kW 60 HzVariants 15
AWC 290Pumping speed 280 m³/h 50 Hz310 m³/h 60 HzUltimate pressure 33 mbarRated motor power 7.5 kW 50 Hz11 – 12.6 kW 60 HzVariants 15
AWC 390Pumping speed 400 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 33 mbarRated motor power 11 kW 50 Hz15 – 16.5 kW 60 HzVariants 15
AWC 500Pumping speed 500 m³/h 50 Hz535 m³/h 60 HzUltimate pressure 33 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 15

Atlas Copco AWS series 22 models

AWS 180Pumping speed 168 m³/h 50 Hz202 m³/h 60 HzUltimate pressure 33 mbarRated motor power 5.5 kW 50 Hz7.5 kW 60 HzVariants 6
AWS 280Pumping speed 246 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 33 mbarRated motor power 7.5 kW 50 Hz11 kW 60 HzVariants 6
AWS 360Pumping speed 340 m³/h 50 Hz412 m³/h 60 HzUltimate pressure 33 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 6
AWS 450Pumping speed 450 m³/h 50 Hz535 m³/h 60 HzUltimate pressure 33 mbarRated motor power 15 kW 50 Hz22 kW 60 HzVariants 8
AWS 600Pumping speed 600 m³/h 50 Hz700 m³/h 60 HzUltimate pressure 33 mbarRated motor power 18.5 kW 50 Hz30 kW 60 HzVariants 8
AWS 800Pumping speed 750 m³/h 50 Hz888 m³/h 60 HzUltimate pressure 33 mbarRated motor power 22 kW 50 Hz30 kW 60 HzVariants 8
AWS 1100Pumping speed 1,080 m³/h 50 Hz1,320 m³/h 60 HzUltimate pressure 33 mbarRated motor power 37 kW 50 Hz45 kW 60 HzVariants 8
AWS 1300Pumping speed 1,230 m³/h 50 Hz1,452 m³/h 60 HzUltimate pressure 33 mbarRated motor power 37 kW 50 Hz55 kW 60 HzVariants 8
AWS 1600Pumping speed 1,700 m³/h 50 Hz2,000 m³/h 60 HzUltimate pressure 33 mbarRated motor power 45 kW 50 Hz75 kW 60 HzVariants 8
AWS 2500Pumping speed 2,450 m³/h 50 Hz2,780 m³/h 60 HzUltimate pressure 33 mbarRated motor power 75 kW 50 Hz90 kW 60 HzVariants 8
AWS 3300Pumping speed 3,200 m³/h 50 Hz3,840 m³/h 60 HzUltimate pressure 33 mbarRated motor power 75 kW 50 Hz110 kW 60 HzVariants 8
AWS 3800Pumping speed 3,750 m³/h 50 Hz4,520 m³/h 60 HzUltimate pressure 33 mbarRated motor power 90 kW 50 Hz132 kW 60 HzVariants 8
AWS 5500Pumping speed 5,300 m³/h 50 Hz5,850 m³/h 60 HzUltimate pressure 33 mbarRated motor power 160 kW 50 Hz185 kW 60 HzVariants 8
AWS 6500Pumping speed 6,510 m³/h 50 HzUltimate pressure 33 mbarRated motor power 169 kW 50 HzVariants 8
AWS 8000Pumping speed 8,100 m³/h 50 HzUltimate pressure 33 mbarRated motor power 200 kW 50 HzVariants 8

Atlas Copco DBD series 6 models

Atlas Copco DBDt series 17 models

Atlas Copco DBS series 29 models

Atlas Copco DBSt series 12 models

Atlas Copco DRB series 4 models

Atlas Copco DWS series 3 models

Atlas Copco DWS VSD+ series 6 models

Atlas Copco DZS VSD+ series 5 models

Atlas Copco GHS VSD+ series 21 models

Atlas Copco GVD series 13 models

Atlas Copco GVS VSD+ series 4 models

Atlas Copco LRP VSD+ series 3 models

Atlas Copco ZRS series 5 models

Busch COBRA Industry series 36 models

Busch COBRA Semicon series 22 models

Busch DOLPHIN series 70 models

Busch HUCKEPACK series 4 models

Busch MINK series 32 models

Busch PANDA/PUMA series 26 models

Busch R5 series 58 models

Busch SAMOS series 31 models

Busch SECO series 10 models

Busch TYR series 16 models

Edwards EDS series 3 models

Edwards EXS series 11 models

Edwards GXS series 10 models

Edwards nES Ex series 5 models

Edwards nES series 8 models

Edwards nXDS series 4 models

Leybold CLAWVAC series 5 models

Leybold DRYVAC series 9 models

Leybold ECODRY series 5 models

Leybold NOVADRY series 4 models

Leybold RUVAC WA/WAU series 8 models

Leybold RUVAC WH/WHU series 7 models

Leybold RUVAC WS/WSU series 8 models

Leybold SCREWLINE series 2 models

Leybold SCROLLVAC series 5 models

Leybold SOGEVAC series 23 models

Leybold TRIVAC series 20 models

Pfeiffer Vacuum A 100/200 L series 3 models

Pfeiffer Vacuum ACP series 4 models

Pfeiffer Vacuum DuoVane series 12 models

Pfeiffer Vacuum HiLobe series 17 models

Pfeiffer Vacuum HiScroll series 4 models

Model comparison

Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.

Selection

Battery manufacturing: choosing a vacuum pump

What the manufacturers highlight for use in this industry.

Solvents and moisture

In drying, Leybold names NMP and moisture from the electrode coils, Busch moisture and solvents that are removed gently. The pump has to handle these vapours over 12–30 hours per batch (Leybold).

Ultimate pressure per step

Busch names an ultimate pressure of 0.1 hPa for R5 RA, Leybold a minimum of about 0.01 mbar for electrolyte filling. The pressure required depends on the manufacturing step – ask about the process pressure before you choose a series.

Explosion protection and inerting

For lithium-ion batteries, Edwards names the ATEX version nES Ex. In recycling, Busch describes how the air is extracted from the shredder and replaced by nitrogen.

Gas ballast

For R5 RA, Busch gives an ultimate pressure of 0.5 hPa with and 0.1 hPa without gas ballast. Gas ballast helps the pump to handle vapours without condensation – with moisture and solvents, a point to consider in the selection.

Frequently asked questions

Battery manufacturing: frequently asked questions about vacuum pumps

Which vacuum pump for battery manufacturing?

For the production of lithium batteries, Busch names R5 RA (20–840 m³/h, ultimate pressure 0.1 hPa), COBRA NC/NX and MINK MM/MV. Leybold names TRIVAC, SOGEVAC, VARODRY, CLAWVAC, VACUBE, LEYVAC, DRYVAC, RUVAC, PHOENIX and SCROLLVAC. Atlas Copco names GHS VSD+, DWS VSD+, GVS VSD+ and DWS 200–500, Edwards GXS, EDS, EXS, nES, nES Ex and nXDS, Pfeiffer Vacuum A 100/200 L, ACP, DuoVane, HiLobe and HiScroll. Which series fits depends on the manufacturing step.

What does lithium-ion cell manufacturing need vacuum for?

Pfeiffer Vacuum lists: bubble-free mixing, drying electrodes, filling electrolyte, extracting formation gases, end-of-line and leak testing, recycling. Atlas Copco describes a controlled environment low in air and gas in several manufacturing steps. Leybold describes that vacuum makes some cell manufacturing steps possible in the first place and improves purity, quality and safety in others.

How is electrode slurry mixed under vacuum?

The electrode paste is mixed and degassed under vacuum so that no air bubbles remain in the anode and cathode paste (Atlas Copco, Leybold). Busch names R5 RA and COBRA NC/NX for this, Leybold TRIVAC, SOGEVAC, VARODRY and CLAWVAC, Pfeiffer Vacuum HiScroll and HiLobe, Edwards GXS, EDS, EXS, nES and nXDS.

How long does the vacuum drying of electrodes take?

For the vacuum drying of the electrode coils, Leybold names 12–30 hours per batch; moisture and the solvent NMP are removed in the process. Leybold names VARODRY, LEYVAC, DRYVAC and RUVAC for this. Atlas Copco describes drawing off solvent and moisture in batches or continuously.

How much vacuum does electrolyte filling need?

Leybold names a minimum of about 0.01 mbar and describes repeated evacuation and partial filling until the cell is completely wetted; DRYVAC is named. Busch describes that the cell is evacuated and then filled under vacuum, with R5 RA, COBRA NC/NX and MINK MM/MV. For electrolyte filling, Pfeiffer Vacuum names ACP and HiScroll.

How is a battery cell degassed after formation?

Leybold describes that the cell is pierced in the vacuum chamber and the gas is pumped off; DRYVAC is named. Busch names the removal of air bubbles from the electrolyte with R5 RA and COBRA NC/NX, Pfeiffer Vacuum the extraction of formation gases with HiLobe.

How are battery cells tested for leaks?

With a helium leak test of the finished cell, as Leybold describes it; PHOENIX, SCROLLVAC, VARODRY and TRIVAC are named. For helium leak testing in general, Leybold gives TRIVAC with 4–90 m³/h, SCROLLVAC with 3–18 m³/h, ECODRY with 25–65 m³/h and VARODRY with 65–200 m³/h. For leak detection and end-of-line testing, Busch names COBRA, PANDA and R5, Pfeiffer Vacuum A 100/200 L, ACP, DuoVane, HiLobe and HiScroll.

Which vacuum pump for battery recycling?

Busch describes shredding, drying and distilling under vacuum and names R5, HUCKEPACK, COBRA, DOLPHIN, MINK, PANDA and PUMA; Busch gives the recycling rate as over 90%. During shredding, the air is extracted and replaced by nitrogen; the electrolyte is evaporated by heat and vacuum and separated by vacuum distillation. For recycling, Pfeiffer Vacuum names ACP and HiLobe.

Do I need ATEX vacuum pumps in battery manufacturing?

For lithium-ion batteries, Edwards explicitly names the ATEX version nES Ex alongside GXS, EDS, EXS, nES and nXDS. In recycling, Busch describes that the shredder is inerted with nitrogen. Whether an ATEX version is needed depends on the solvents and gases in the step concerned – tell us about the process.

With or without gas ballast in battery manufacturing?

For R5 RA, Busch gives the ultimate pressure as 0.5 hPa with gas ballast and 0.1 hPa without gas ballast. With gas ballast, the pump handles vapours better; without it, the pump reaches the lower ultimate pressure. In steps with moisture or solvents – drying, filling – this is the trade-off.

Does Ehrler & Beck also supply spare parts and service?

Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.

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