COBRA BC 1200 APumping speed 1,200 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 8161 F Version as listed in the Busch shop, motor and equipment on request
The Busch COBRA DS 8161 F is a dry screw vacuum pump with a nominal pumping speed of 6000 m³/h and an ultimate pressure of 0.001 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 6,000 m³/h 50 Hz 6,000 m³/h 60 Hz
- Ultimate pressure 1 × 10-3 mbar
- Rated motor power 30 kW 50 Hz 30 kW 60 Hz
| Variant | Part number |
|---|---|
| Version as listed in the Busch shop, motor and equipment on request | 1361800483 |
Busch COBRA DS 8161 F – dry screw vacuum pump
The Busch COBRA DS 8161 F is a dry screw vacuum pump. The nominal pumping speed is 6000 m³/h, the ultimate pressure 0.001 mbar. Nominal motor rating 30 kW.Features
- Powerful: screw design with integrated vacuum booster, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
- Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling, high hydrogen throughput
- Compact: space-saving design with directly mounted canned motor
Versions of the Busch COBRA DS 8161 F
The 1 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 6,000 |
|---|---|
| Pumping speed 60Hz | 6,000 |
| Ultimate pressure | 1 × 10-3 |
| Rated motor power 50Hz | 30 |
| Rated motor power 60Hz | 30 |
| Weight | 1,500 |
| Length | 144.1 |
| Width | 62.7 |
| Height | 110 |
| Inlet connection flange | DN 200 |
| Outlet connection flange | DN 63 |
| Noise level | 75 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Convert units: vacuum and pressure units · Nm³/h to m³/h
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 6000 m³/h |
| Ultimate pressure | 0.001 mbar |
| Rated motor power, backing pump | 15 kW |
| Rated motor power, vacuum booster | 15 kW |
| Rated speed, backing pump | 3600 min⁻¹ |
| Rated speed, vacuum booster | 5400 min⁻¹ |
| Power consumption at ultimate pressure | 12.5 kW |
| Power consumption at idle | 10 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | < 75 dB(A) |
| Water consumption | 15 l/min |
| Nitrogen consumption | 0 – 200 l/min |
| Dimensions (L × W × H) | 1441 × 627 × 1100 mm |
| Weight (approx.) | 1500 kg |
| Gas inlet | DN 200 |
| Gas outlet | DN 63 |
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