COBRA BC 1200 APumping speed 1,200 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 3181 C
The Busch COBRA DS 3181 C is a dry screw vacuum pump with a nominal pumping speed of 3500 m³/h and an ultimate pressure of 0.001 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 3,500 m³/h 50 Hz 3,500 m³/h 60 Hz
- Ultimate pressure 1 × 10-3 mbar
- Rated motor power 33.5 kW 50 Hz 33.5 kW 60 Hz
Busch COBRA DS 3181 C – dry screw vacuum pump
The Busch COBRA DS 3181 C is a dry screw vacuum pump. The nominal pumping speed is 3500 m³/h, the ultimate pressure 0.001 mbar. Nominal motor rating 33.5 kW.Features
- Powerful: screw design with integrated vacuum booster, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
- Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling
- Compact: space-saving design with directly mounted canned motor; backing pump and vacuum booster on a common base frame
Typical applications
Busch lists: Displays (load lock chambers); Semiconductors (ALD); Solar (cell production).Accessories and versions
- Optional powder process version available
Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 3,500 |
|---|---|
| Pumping speed 60Hz | 3,500 |
| Ultimate pressure | 1 × 10-3 |
| Rated motor power 50Hz | 33.5 |
| Rated motor power 60Hz | 33.5 |
| Weight | 1,500 |
| Length | 165.4 |
| Width | 72.2 |
| Height | 145.2 |
| Inlet connection flange | DN 160 |
| Outlet connection flange | DN 63 |
| Noise level | 75 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Convert units: vacuum and pressure units · Nm³/h to m³/h
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 3500 m³/h |
| Ultimate pressure | 0.001 mbar |
| Rated motor power, backing pump | 18.5 kW |
| Rated motor power, vacuum booster | 15.0 kW |
| Rated speed, backing pump | 4220 min⁻¹ |
| Rated speed, vacuum booster | 5400 min⁻¹ |
| Power consumption at ultimate pressure | 12.4 kW |
| Power consumption at idle | 10.3 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | < 75 dB(A) |
| Water consumption | min. 10 l/min |
| Nitrogen consumption | 0 – 200 l/min |
| Dimensions (L × W × H) | 1654 × 722 × 1452 mm |
| Weight (approx.) | 1500 kg |
| Gas inlet | DN 160 |
| Gas outlet | DN 63 |
| Product name | Part number |
|---|---|
| Cooling liquid CLA 25 (ready to use), 5 l pack | 2000 241 757 |
| Cooling liquid CLA 25 (ready to use), 25 l pack | 2000 241 738 |
| Busch oil YLC 250 B (ISO VG 250, synthetic), 0.5 l pack | 0831 131 400 |
| Busch oil YLC 250 B (ISO VG 250, synthetic), 1 l pack | 0831 108 878 |
| Busch oil YLC 250 B (ISO VG 250, synthetic), 5 l pack | 0831 108 879 |
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