COBRA DS 2000 G Version as listed in the Busch shop, motor and equipment on request

The Busch COBRA DS 2000 G is a dry screw vacuum pump with a nominal pumping speed of 1365 m³/h (50 Hz) or 1640 m³/h (60 Hz) and an ultimate pressure of 0.003 mbar. Ehrler & Beck advises on selection and service.

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Pumping speed 1,365 m³/h 50 Hz 1,640 m³/h 60 Hz
Ultimate pressure 3 × 10^-3 mbar
Rated motor power 11 kW 50 Hz 13.2 kW 60 Hz

Available variants
Variant	Part number
Version as listed in the Busch shop, motor and equipment on request (selected)	1361800264
Version as listed in the Busch shop, motor and equipment on request	1361800265

Busch COBRA DS 2000 G – dry screw vacuum pump

The Busch COBRA DS 2000 G is a dry screw vacuum pump. The nominal pumping speed is 1365 m³/h (50 Hz) or 1640 m³/h (60 Hz), the ultimate pressure 0.003 mbar. Nominal motor rating 11 kW (50 Hz) or 13.2 kW (60 Hz).

Features

Powerful: screw design with integrated vacuum booster, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling, high hydrogen throughput
Compact: space-saving design with directly mounted canned motor; backing pump and vacuum booster on a common base frame

Typical applications

Busch lists: Displays (physical vapour deposition (PVD)); Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, polysilicon etching, PECVD and others); Solar (cell production, crystal pulling).

Versions of the Busch COBRA DS 2000 G

The 2 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.

Advice and service

Ehrler & Beck advises on selection, accessories and service.

Pumping speed 50Hz	1,365
Pumping speed 60Hz	1,640
Ultimate pressure	3 × 10^-3
Rated motor power 50Hz	11
Rated motor power 60Hz	13.2
Weight	668
Length	106.3
Width	46.5
Height	106.9
Inlet connection flange	DN 160
Outlet connection flange	DN 40
Noise level	68 dB(A)
Cooling method	Water cooling
Oil type	Oil-free

Additional technical data

Technical data	Value
Nominal pumping speed	1365 m³/h (50 Hz) / 1640 m³/h (60 Hz)
Ultimate pressure	0.003 mbar
Rated motor power, backing pump	5.5 kW (50 Hz) / 6.6 kW (60 Hz)
Rated motor power, vacuum booster	5.5 kW (50 Hz) / 6.6 kW (60 Hz)
Rated speed, backing pump	3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz)
Rated speed, vacuum booster	3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz)
Power consumption at ultimate pressure	5.6 kW (50 Hz) / 6.8 kW (60 Hz)
Power consumption at idle	5.6 kW (50 Hz) / 6.8 kW (60 Hz)
Sound pressure level (ISO 2151, KpA = 3 dB)	< 68 dB(A)
Water consumption	5.0 l/min
Nitrogen consumption	0 – 75 l/min
Dimensions (L × W × H)	1063 × 465 × 1069 mm
Weight (approx.)	668 kg
Gas inlet	DN 160
Gas outlet	DN 40