COBRA DS 0080 GPumping speed 70 m³/hUltimate pressure 0.03 mbar
COBRA BC 0601 G Version as listed in the Busch shop, motor and equipment on request
The Busch COBRA BC 0601 G is a dry screw vacuum pump with a nominal pumping speed of 550 m³/h (50 Hz) or 640 m³/h (60 Hz) and an ultimate pressure of 0.003 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 550 m³/h 50 Hz 640 m³/h 60 Hz
- Ultimate pressure 3 × 10-3 mbar
- Rated motor power 3 kW 50 Hz 3.3 kW 60 Hz
| Variant | Part number |
|---|---|
| Version as listed in the Busch shop, motor and equipment on request (selected) | 1361800493 |
Busch COBRA BC 0601 G – dry screw vacuum pump
The Busch COBRA BC 0601 G is a dry screw vacuum pump. The nominal pumping speed is 550 m³/h (50 Hz) or 640 m³/h (60 Hz), the ultimate pressure 0.003 mbar. Nominal motor rating 3 kW (50 Hz) or 3.3 kW (60 Hz).Features
- Powerful: bell-shaped screw design with patented self-balancing screws and integrated vacuum booster; for cold atomic layer deposition, load lock and transfer chambers, metrology, lithography, PVD, rapid thermal annealing (RTA) and etching processes (oxide, silicon, metal)
- Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, direct water cooling
- Compact: space-saving design with directly mounted canned motor; backing pump and vacuum booster on a common base frame
Typical applications
Busch lists: Semiconductors (stripping/ashing, PVD, polysilicon etching and others).Versions of the Busch COBRA BC 0601 G
The 1 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 550 |
|---|---|
| Pumping speed 60Hz | 640 |
| Ultimate pressure | 3 × 10-3 |
| Rated motor power 50Hz | 3 |
| Rated motor power 60Hz | 3.3 |
| Weight | 320 |
| Length | 90.5 |
| Width | 35.4 |
| Height | 66 |
| Inlet connection flange | DN 63 ISO-K |
| Outlet connection flange | DN 40 ISO-KF |
| Noise level | 60 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 550 m³/h (50 Hz) / 640 m³/h (60 Hz) |
| Ultimate pressure | 0.003 mbar |
| Rated motor power, backing pump | 1.5 kW |
| Rated motor power, vacuum booster | 1.5 kW (50 Hz) / 1.8 kW (60 Hz) |
| Rated speed, backing pump | 3000 min⁻¹ |
| Rated speed, vacuum booster | 3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz) |
| Power consumption at ultimate pressure | 1.25 kW |
| Power consumption at idle | 1.35 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | 60 dB(A) |
| Water consumption | min. 3.0 – 4.0 l/min |
| Nitrogen consumption | 0 – 70 l/min |
| Dimensions (L × W × H) | 905 × 354 × 660 mm |
| Weight (approx.) | 320 kg |
| Gas inlet | DN 63 ISO-K |
| Gas outlet | DN 40 ISO-KF |
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