Industry
Vacuum pumps for coating and thin film
Thin films are produced in a vacuum: in PVD sputtering and evaporation, in CVD, PECVD and ALD and in plasma treatment, the chamber is first evacuated and then held at process pressure – according to Leybold at 10⁻² to 10⁻³ mbar for optical coatings and down to 10⁻⁶ mbar for wear protection and decorative coatings. In glass and display systems the backing pumps also cycle the load locks. Below you can see which series the manufacturers themselves name for these tasks – 368 models from 4 manufacturers.
Compare 368 modelsSee the applications
- 368Models
- 29Series
- 4Manufacturers
- 7Applications
In short
Coating and thin film: vacuum pumps – the key facts
- Process pressureFor optical coatings Leybold names 10⁻² to 10⁻³ mbar and for wear protection and decorative coatings 10⁻² to 10⁻⁶ mbar; Edwards names CVD and ALD from 10⁻³ mbar, Pfeiffer Vacuum ALD at 10⁻¹ to 5 mbar.
- Load lock cycleIn architectural and automotive glass coating, according to Leybold, the backing pumps cycle the load locks at 2–3 cycles per minute from 1,000 to 1 mbar; for glass coating Edwards names fast pump-down cycles with EDS and EXS.
- Pumping speedFor coating, Leybold names RUVAC Roots pumps with 250–7,000 m³/h and SOGEVAC rotary vane pumps with 16–750 m³/h; Pfeiffer Vacuum names 1,800–4,500 m³/h for ALD systems.
- Clean vacuumPfeiffer Vacuum names clean vacuum for PVD, CVD/PECVD and ALD in batch and inline systems, Busch names coating in a clean vacuum chamber, Edwards names the vapour that reaches the substrate in pure form – in CVD and ALD the by-products are corrosive or powdery, according to Pfeiffer Vacuum.
Applications
Coating and thin film: what vacuum pumps are used for
For each application: what the vacuum does and which series the manufacturers name for it. The information comes from the manufacturers’ own pages.
PVD: wear protection and decorative coatings
In PVD, materials are evaporated or sputtered and condense on the workpiece in high vacuum. Leybold names hard and decorative thin films on tools, metal and plastic parts at 10⁻² to 10⁻⁶ mbar with DRYVAC, SOGEVAC and RUVAC as backing pumps (also VARODRY, SCREWLINE and POWER BOOST); Pfeiffer Vacuum names hard coatings such as TiN and DLC on tools for stamping and die casting, as well as PVD colour coatings such as TiN and ZrN, with ACP, DuoVane, HiLobe and HiScroll; Busch names wear protection and decorative coating with R5, MINK, COBRA and PANDA/PUMA. Edwards describes PVD as evaporation and condensation in high vacuum with a backing pump plus a turbo or cryopump. Leybold and Busch name protective coatings on bipolar plates for fuel cells and electrolysers as a further example.
- LeyboldSOGEVAC, DRYVAC, RUVAC WA/WAU, RUVAC WS/WSU, RUVAC WH/WHU, SCREWLINE also names VARODRY and POWER BOOST
- Pfeiffer VacuumACP, DuoVane, HiLobe, HiScroll, A4, TORRI
- BuschR5, MINK, COBRA Industry, PANDA/PUMA
- EdwardsGXS, EDS, EXS, nES, E2M, EH names a backing pump plus a turbo or cryopump for PVD; the series come from its page on thin-film coating
Optical coating
According to Leybold, anti-reflective and scratch-resistant multilayer coatings are produced by PVD or evaporation in batch systems at 10⁻² to 10⁻³ mbar; Leybold names TRIVAC, SOGEVAC, DRYVAC, RUVAC and SCREWLINE as well as VARODRY. Pfeiffer Vacuum names anti-reflective, mirror and filter coatings with ACP, DuoVane, HiLobe and HiScroll, Busch names optical coating with R5, MINK, COBRA and PANDA/PUMA. Edwards names touch, anti-reflective and scratch-protection coatings on mobile devices with dry screw pumps and boosters.
- LeyboldTRIVAC, SOGEVAC, DRYVAC, RUVAC WA/WAU, RUVAC WS/WSU, RUVAC WH/WHU, SCREWLINE also names VARODRY
- Pfeiffer VacuumACP, DuoVane, HiLobe, HiScroll
- BuschR5, MINK, COBRA Industry, PANDA/PUMA
- Edwardsnames dry screw pumps and boosters for coating mobile devices, without a series
Glass coating: architectural, automotive and low-E glass
According to Leybold, multilayer coatings are sputtered onto architectural and automotive glass by PVD; the backing pumps cycle the load locks at 2–3 cycles per minute from 1,000 to 1 mbar, and the process runs at 10⁻² to 10⁻³ mbar. According to Leybold, a low-E coating reflects solar energy while remaining fully transparent. Pfeiffer Vacuum names low-E, solar control and AR coatings inline with ACP and HiLobe, Edwards names fast pump-down cycles with EDS and EXS, Busch names glass coating with R5, COBRA and PANDA/PUMA.
- LeyboldSOGEVAC, DRYVAC, RUVAC WA/WAU, RUVAC WS/WSU, RUVAC WH/WHU, SCREWLINE also names POWER BOOST
- Pfeiffer VacuumACP, HiLobe
- EdwardsEDS, EXS
- BuschR5, COBRA Industry, PANDA/PUMA
CVD, PECVD and ALD
In CVD, gases react at the substrate; in ALD, they do so layer by layer. Edwards names CVD and ALD from 10⁻³ mbar with EXS; Pfeiffer Vacuum names PECVD/SACVD, ALD, LPCVD/diffusion and MBE with A4 and A4H, and ALD at 10⁻¹ to 5 mbar with 1,800–4,500 m³/h – according to Pfeiffer Vacuum, the by-products are corrosive or powdery. Busch names CVD/PECVD, for example anti-reflective coatings on solar cells, with COBRA DS; Leybold names CVD for HJT solar cells in inline systems with short cycle times with DRYVAC and RUVAC and, for MBE and ALD, purity during layer formation.
- EdwardsEXS
- Pfeiffer VacuumA4
- BuschCOBRA Semicon
- LeyboldDRYVAC, RUVAC WA/WAU, RUVAC WS/WSU, RUVAC WH/WHU also names POWERBOOST
Roll-to-roll, web and display coating
According to Leybold, flexible webs are coated by PVD, PECVD or evaporation at 10⁻¹ to 10⁻³ mbar; for displays (LCD, OLED) Leybold names load locks with very short pump-down cycles. As pumps for this, Leybold names turbo, cryo, oil-sealed, diffusion and dry industrial pumps as well as Roots pumps, without specifying a series. Edwards names web coating and plasma spraying for EXS.
- Leyboldnames pump types, no series
- EdwardsEXS
Plasma treatment and parylene
According to Leybold, process gases turn into plasma in the vacuum, which coats, cleans, activates or etches; Leybold names PFPE versions of TRIVAC B and RUVAC, VARODRY HD O2, DURADRY and DRYVAC. Edwards names plasma ignition for surface activation and cleaning with a screw pump plus a Roots pump, E2S, E2M FX and nXRi. According to Leybold, parylene is applied in a vacuum by pyrolysis as a pore-free film; for this Leybold names NOVADRY, NOVADRY NDi, SCREWLINE SP and Roots pumps.
- LeyboldTRIVAC, DURADRY, DRYVAC, RUVAC WA/WAU, RUVAC WS/WSU, RUVAC WH/WHU, NOVADRY, SCREWLINE also names VARODRY HD O2
- EdwardsE2S, E2M, nXRi
- Pfeiffer Vacuumlists PECVD without a series
Laboratory and experimental coating
For fast R&D trials with evaporation, sputtering and ALD, Pfeiffer Vacuum names A4, ACP, DuoVane, HiScroll and TORRI. For experimental coatings Edwards names rotary vane pumps and reproducible conditions; Busch names coating in analytics and R&D with R5, COBRA and PANDA/PUMA.
- Pfeiffer VacuumA4, ACP, DuoVane, HiScroll, TORRI
- Edwardsnames rotary vane pumps without a series
- BuschR5, COBRA Industry, PANDA/PUMA
Manufacturers and series
Coating and thin film: 4 manufacturers, 29 series
Listed are the series the manufacturer itself names for this industry. “Show only …” sets the filter of the product overview.
Busch
174 models · 3–12,000 m³/h
Edwards
54 models · 0.75–5,760 m³/h
Leybold
84 models · 2.7–4,700 m³/h
Pfeiffer Vacuum
56 models · 1.25–13,540 m³/h
Product overview
Coating and thin film: all 368 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants 
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants 
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants 
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 
COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants 
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants 
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants 
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants 
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants Busch COBRA Semicon series 22 models
COBRA DS 0080 GPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 2
COBRA BA 0100 CPumping speed 85 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 3
COBRA BC 0101 GPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
COBRA DS 0160 GPumping speed 140 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
COBRA DS 0700 GPumping speed 500 m³/h 50 Hz610 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 0601 GPumping speed 550 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 3 kW 50 Hz3.3 kW 60 HzVariants 1
COBRA DS 0600 EPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2
COBRA DS 1000 GPumping speed 775 m³/h 50 Hz960 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 1001 GPumping speed 870 m³/h 50 Hz870 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
COBRA BC 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 1
COBRA DS 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.4 kW 60 HzVariants 2
COBRA DS 2000 GPumping speed 1,365 m³/h 50 Hz1,640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 2
COBRA DS 1800 APumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8.4 kW 50 Hz8.4 kW 60 HzVariants 1
COBRA DS 1800 A XPumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 10.6 kW 50 Hz10.6 kW 60 HzVariants 1
COBRA DS 3010 GPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3161 CPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3181 CPumping speed 3,500 m³/h 50 Hz3,500 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 33.5 kW 50 Hz33.5 kW 60 HzVariants 
COBRA DS 5161 BPumping speed 4,300 m³/h 50 Hz4,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 
COBRA DS 8161 FPumping speed 6,000 m³/h 50 Hz6,000 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 9161 BPumping speed 6,220 m³/h 50 Hz6,220 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 35 kW 50 Hz35 kW 60 HzVariants 
COBRA DS 8162 FPumping speed 7,200 m³/h 50 Hz7,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 50 kW 50 Hz50 kW 60 HzVariants 
COBRA DS 8163 BPumping speed 7,385 m³/h 50 Hz7,385 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 65 kW 50 Hz65 kW 60 HzVariants Busch MINK series 32 models
MINK MB 0018 APumping speed 18 m³/h 50 Hz18 m³/h 60 HzUltimate pressure 600 mbarRated motor power 0.5 kW 50 Hz0.5 kW 60 HzVariants 2
MINK MV 0040 E ECOTORQUEPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MI 2124 BVPumping speed 50 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 20 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 
MINK MV 0060 E ECOTORQUEPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MM 0084 APumping speed 62 m³/h 50 Hz75 m³/h 60 HzUltimate pressure 60 mbarRated motor power 1.5 kW 50 Hz1.7 kW 60 HzVariants MINK MM 1104 BVPumping speed 62 m³/h 50 Hz75 m³/h 60 HzUltimate pressure 60 mbarRated motor power 1.5 kW 50 Hz1.7 kW 60 HzVariants 10
MINK MM 1104 CVMPumping speed 62 m³/h 50 HzUltimate pressure 400 mbarRated motor power 1.3 kW 50 HzVariants 
MINK MM 0104 APumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 60 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 
MINK MM 1144 BVPumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 60 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 9
MINK MV 0080 E ECOTORQUEPumping speed 80 m³/h 50 Hz80 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MM 0142 APumping speed 110 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 40 mbarRated motor power 3 kW 50 Hz3.4 kW 60 HzVariants 
MINK MM 1102 BVPumping speed 110 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 60 mbarRated motor power 3 kW 50 Hz3.4 kW 60 HzVariants 6
MINK MM 1102 CVMPumping speed 110 m³/h 50 HzUltimate pressure 400 mbarRated motor power 2.2 kW 50 HzVariants 
MINK MI 2122 BVPumping speed 120 m³/h 50 Hz145 m³/h 60 HzUltimate pressure 20 mbarRated motor power 5.1 kW 50 Hz6.8 kW 60 HzVariants 
MINK MM 0182 APumping speed 140 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 40 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 
MINK MM 1142 BVPumping speed 140 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 60 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 13
MINK MM 1324 AVPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 60 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2
MINK MM 1202 AVPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 11
MINK MM 1252 AVPumping speed 245 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 100 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 8MINK MW 0332 BPumping speed 280 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.8 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
MINK MV 0312 BPumping speed 290 m³/h 50 Hz345 m³/h 60 HzUltimate pressure 150 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 4
MINK MM 1322 AVPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 150 mbarRated motor power 6 kW 50 Hz8 kW 60 HzVariants 10
MINK MV 0310 BPumping speed 345 m³/h 50 Hz345 m³/h 60 HzUltimate pressure 150 mbarRated motor power 6 kW 50 Hz6 kW 60 HzVariants MINK MV 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 100 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 
MINK MM 1402 AVPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 3
MINK MV 0502 BPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 2
MINK MV 0500 BPumping speed 470 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
MINK MM 1502 AVPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 5
MINK MV 0602 BPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 3
MINK MV 0600 BPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
MINK MV 1202 BPumping speed 950 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 200 mbarRated motor power 18.5 kW 50 Hz22 kW 60 HzVariants 3MINK MV 1200 B ECOTORQUEPumping speed 1,150 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 200 mbarRated motor power 25 kW 50 Hz25 kW 60 HzVariants Busch PANDA/PUMA series 26 models
PANDA WV 0250 CPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure Rated motor power 1 kW 50 Hz1.2 kW 60 HzVariants PANDA WZ 0250 BPumping speed 263 m³/h 50 Hz315 m³/h 60 HzUltimate pressure Rated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants PANDA WV 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants 4PUMA WY 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0500 D2Pumping speed 520 m³/h 50 Hz620 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants PANDA WZ 0500 BPumping speed 525 m³/h 50 Hz630 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0700 DPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PUMA WY 0700 CPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1000 D2Pumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PANDA WV 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 5PANDA WZ 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WY 1250 CPumping speed 1,250 m³/h 50 Hz1,500 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1250 D2Pumping speed 1,295 m³/h 50 Hz1,555 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants PANDA WV 1800 APumping speed 1,600 m³/h 50 Hz1,920 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 5PUMA WY 2000 CPumping speed 2,010 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PUMA WP 2000 D2Pumping speed 2,020 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants PANDA WV 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants 5PANDA WZ 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PANDA WV 2200 APumping speed 2,155 m³/h 50 Hz2,585 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants PUMA WY 3600 APumping speed 3,600 m³/h 50 Hz3,600 m³/h 60 HzUltimate pressure Rated motor power 15 kW 50 Hz15 kW 60 HzVariants PANDA WV 4500 BPumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 4PUMA WP 4500 B2Pumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants PUMA WP 5400 APumping speed 6,480 m³/h 50 Hz6,480 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WP 8100 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants PUMA WY 8000 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WG 9600Pumping speed 12,000 m³/h 50 Hz12,000 m³/h 60 HzUltimate pressure 130 mbarRated motor power Variants Busch R5 series 58 models
R5 PB 0003 DPumping speed 3 m³/h 50 Hz3.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants R5 PB 0004 CPumping speed 4 m³/h 50 Hz4.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants R5 PB 0008 CPumping speed 8 m³/h 50 Hz9.6 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.35 kW 50 Hz0.45 kW 60 HzVariants 
R5 KB 0010 EPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants 1R5 KD 0012 APumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants R5 RA 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1R5 RC 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1R5 KB 0016 EPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants 1R5 KD 0020 APumping speed 16 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants R5 RA 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1R5 RC 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1R5 KB 0020 DPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 1
R5 RB 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 2R5 RC 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants R5 KD 0025 APumping speed 22 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants R5 KB 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 1
R5 RA 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1 kW 50 Hz1.2 kW 60 HzVariants 3R5 KB 0040 DPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1R5 RA 0040 FPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.4 kW 50 Hz1.7 kW 60 HzVariants 3R5 RE 0040 CPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz2.2 kW 60 HzVariants R5 RA 0063 FPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 3R5 RE 0063 CPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3 kW 60 HzVariants R5 RA 0100 FPumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.7 kW 50 Hz3.4 kW 60 HzVariants 3R5 RA 0155 APumping speed 150 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants R5 RA 0165 DPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3R5 RA 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.8 kW 60 HzVariants 
R5 RD 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2R5 RA 0165 D ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0200 A ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0205 DPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3R5 RA 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants R5 RD 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 1R5 RA 0205 D ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0240 A ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0255 DPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants 3R5 RD 0300 APumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 1R5 RA 0255 D ECOTORQUEPumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0305 DPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 8.3 kW 50 Hz10 kW 60 HzVariants 3R5 RA 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants R5 RD 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 2R5 RA 0305 D ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0400 CPumping speed 410 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 3R5 RA 0520 APumping speed 430 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz12.5 kW 60 HzVariants 1R5 RA 0400 C ECOTORQUEPumping speed 480 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0502 CPumping speed 510 m³/h 50 Hz590 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 1R5 RA 0520 A ECOTORQUEPumping speed 520 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0502 C ECOTORQUEPumping speed 580 m³/h 50 Hz580 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0600 A ECOTORQUEPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 0630 CPumping speed 630 m³/h 50 Hz760 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 2R5 RA 0630 C ECOTORQUEPumping speed 745 m³/h 50 Hz745 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0840 A ECOTORQUEPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 0840 B PLUSPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 1000 BPumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 22 kW 50 Hz30 kW 60 HzVariants 1R5 RA 1000 A PLUSPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants R5 RA 1000 B ECOTORQUEPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power Variants R5 RA 1600 BPumping speed 1,600 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz37 kW 60 HzVariants 1R5 RA 1600 A PLUSPumping speed 1,800 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants Edwards E2M series 9 models
Edwards E2M0.7Pumping speed 0.75 m³/h 50 Hz0.95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.09 kW 50 Hz0.09 kW 60 HzVariants 2
Edwards E2M1.5Pumping speed 1.6 m³/h 50 Hz2 m³/h 60 HzUltimate pressure 1.5 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 4Edwards E2M2.5Pumping speed 2.5 m³/h 50 Hz3 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 2
Edwards E2M18Pumping speed 17 m³/h 50 Hz20.4 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 0.9 kW 60 HzVariants 8
Edwards E2M28Pumping speed 27.5 m³/h 50 Hz33 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 7
Edwards E2M40Pumping speed 37 m³/h 50 Hz44 m³/h 60 HzUltimate pressure 4.5 × 10-3 – 0.01 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.5 kW 60 HzVariants 9
Edwards E2M80Pumping speed 74 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 3 × 10-3 – 0.01 mbarRated motor power 2.2 – 3 kW 50 Hz3 kW 60 HzVariants 9
Edwards E2M175Pumping speed 160 m³/h 50 Hz196 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 5
Edwards E2M275Pumping speed 255 m³/h 50 Hz306 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 5Edwards E2S series 3 models
Edwards E2S45Pumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 2Edwards E2S65Pumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 2Edwards E2S85Pumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 2Edwards EDS series 3 models
Edwards EDS200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 10Edwards EDS300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10Edwards EDS480Pumping speed 460 m³/h 50 Hz460 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5Edwards EH series 5 models
Edwards EH250Pumping speed 310 m³/h 50 Hz375 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 8
Edwards EH500Pumping speed 505 m³/h 50 Hz605 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 8
Edwards EH1200Pumping speed 1,195 m³/h 50 Hz1,435 m³/h 60 HzUltimate pressure Rated motor power 3 kW 50 Hz3 kW 60 HzVariants 8
Edwards EH2600Pumping speed 2,590 m³/h 50 Hz3,110 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants 8
Edwards EH4200Pumping speed 4,140 m³/h 50 Hz4,985 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants 8Edwards EXS series 11 models
Edwards EXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2Edwards EXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2Edwards EXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3Edwards EXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3Edwards EXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 2Edwards EXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2Edwards EXS450/2600Pumping speed 2,130 m³/h 50 Hz2,130 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 2Edwards EXS750/2600Pumping speed 2,280 m³/h 50 Hz2,280 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards EXS450/4200Pumping speed 3,180 m³/h 50 Hz3,180 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 2Edwards EXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards EXS750/8000Pumping speed 5,760 m³/h 50 Hz5,760 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards GXS series 10 models
Edwards GXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 12Edwards GXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10Edwards GXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 8Edwards GXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 12Edwards GXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 11Edwards GXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 10Edwards GXS450/2600Pumping speed 2,200 m³/h 50 Hz2,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9Edwards GXS750/2600Pumping speed 2,300 m³/h 50 Hz2,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 8Edwards GXS450/4200Pumping speed 3,026 m³/h 50 Hz3,026 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9Edwards GXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 10Edwards nES series 8 models
Edwards nES40Pumping speed 38.5 m³/h 50 Hz47 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.3 kW 50 Hz1.3 kW 60 HzVariants 3Edwards nES65Pumping speed 54 m³/h 50 Hz64 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.8 kW 50 Hz1.8 kW 60 HzVariants 3Edwards nES100Pumping speed 87.5 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 3 kW 50 Hz3.6 kW 60 HzVariants 4Edwards nES220Pumping speed 179 m³/h 50 Hz214 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 4.4 kW 50 Hz5.5 kW 60 HzVariants 2Edwards nES300Pumping speed 240 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3Edwards nES300SPumping speed 284 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 6 kW 50 Hz7.2 kW 60 HzVariants 2Edwards nES630Pumping speed 640 m³/h 50 Hz755 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 5Edwards nES750Pumping speed 755 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 18.5 kW 50 HzVariants 4Edwards nXRi series 5 models
Edwards nXR30iPumping speed 30 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR40iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR60iPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR90iPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR120iPumping speed 120 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Leybold DRYVAC series 9 models
DRYVAC DV 200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 500Pumping speed 380 – 460 m³/h 50 Hz380 – 460 m³/h 60 HzUltimate pressure 0.01 – 0.05 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5
DRYVAC DV 650Pumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 33DRYVAC DV 650 FPPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 8
DRYVAC DV 800Pumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 11DRYVAC DV 800 FP-rPumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 4
DRYVAC DV 1200Pumping speed 1,250 m³/h 50 Hz1,250 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 3DRYVAC DV 1600Pumping speed 1,600 m³/h 50 Hz1,600 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 39.2 kW 50 Hz39.2 kW 60 HzVariants 1Leybold DURADRY series 3 models
DURADRY DD 160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2DURADRY DD 250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2DURADRY DD 450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 1Leybold NOVADRY series 4 models
NOVADRY ND 65Pumping speed 63 m³/h 50 Hz63 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3
NOVADRY ND 100Pumping speed 96 m³/h 50 Hz96 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 3NOVADRY ND 160Pumping speed 138 m³/h 50 Hz138 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 3 kW 50 Hz3 kW 60 HzVariants 3NOVADRY ND 200Pumping speed 175 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 3Leybold RUVAC WA/WAU series 8 models
RUVAC WA 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.1 kW 60 HzVariants 3
RUVAC WAU 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.1 kW 60 HzVariants 5
RUVAC WA 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 4
RUVAC WAU 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 6
RUVAC WA 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 3
RUVAC WAU 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 6
RUVAC WA 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 3
RUVAC WAU 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 7Leybold RUVAC WH/WHU series 7 models
RUVAC WH 700Pumping speed 620 m³/h 50 Hz740 m³/h 60 HzUltimate pressure Rated motor power 2.2 – 3.8 kW 50 Hz2.6 – 3.8 kW 60 HzVariants 9
RUVAC WH 2500Pumping speed 2,200 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure Rated motor power 6.2 – 11 kW 50 Hz7.4 – 11 kW 60 HzVariants 24
RUVAC WHU 2500Pumping speed 2,200 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure Rated motor power 6.2 kW 50 Hz7.4 kW 60 HzVariants 10
RUVAC WH 4400Pumping speed 3,300 m³/h 50 Hz3,900 m³/h 60 HzUltimate pressure Rated motor power 11 – 18.5 kW 50 Hz11 – 18.5 kW 60 HzVariants 14
RUVAC WHU 4400Pumping speed 3,300 m³/h 50 Hz3,900 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 7
RUVAC WH 7000Pumping speed 4,700 m³/h 50 Hz5,300 m³/h 60 HzUltimate pressure Rated motor power 11 – 18.5 kW 50 Hz11 – 18.5 kW 60 HzVariants 19
RUVAC WHU 7000Pumping speed 4,700 m³/h 50 Hz5,300 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 3Leybold RUVAC WS/WSU series 8 models
RUVAC WS 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.4 kW 60 HzVariants 2
RUVAC WSU 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.4 kW 60 HzVariants 4
RUVAC WS 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 2
RUVAC WSU 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 5
RUVAC WS 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 3
RUVAC WSU 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 6
RUVAC WS 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 11
RUVAC WSU 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 15Leybold SCREWLINE series 2 models
SCREWLINE SP 630Pumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 6SCREWLINE SP 630 FPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 11Leybold SOGEVAC series 23 models
SOGEVAC SV 10 BPumping speed 9.5 m³/h 50 Hz11.5 m³/h 60 HzUltimate pressure 1.5 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 3
SOGEVAC SV 16 DPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 13SOGEVAC SV 16 DIPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 4
SOGEVAC SV 16 BPumping speed 15 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 7
SOGEVAC SV 25 BPumping speed 22.5 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 12
SOGEVAC SV 25 DPumping speed 22.5 m³/h 50 Hz25.5 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 15
SOGEVAC SV 28 BIPumping speed 23 m³/h 50 Hz27 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 1.1 kW 60 HzVariants 2SOGEVAC SV 40 BI FCPumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3SOGEVAC SV 55 BI²Pumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 4
SOGEVAC SV 40 BPumping speed 38.5 m³/h 50 Hz47 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.1 kW 50 Hz1.5 kW 60 HzVariants 25
SOGEVAC SV 40 BIPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 1.1 – 1.3 kW 50 Hz1.3 – 1.6 kW 60 HzVariants 3SOGEVAC SV 65 BI FCPumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 2SOGEVAC SV 70 BI²Pumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 2
SOGEVAC SV 65 BPumping speed 54 m³/h 50 Hz64 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 22
SOGEVAC SV 100 BPumping speed 87.5 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3.5 kW 60 HzVariants 31SOGEVAC SV 120 BI FCPumping speed 90 – 100 m³/h 50 Hz90 – 100 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
SOGEVAC SV 120 BPumping speed 110 m³/h 50 Hz122 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.4 kW 50 Hz3.2 kW 60 HzVariants 12
SOGEVAC SV 220 BPumping speed 180 m³/h 50 Hz220 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 4.5 kW 50 Hz4.8 kW 60 HzVariants 8
SOGEVAC SV 300 BPumping speed 240 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants 45
SOGEVAC SV 320 BPumping speed 284 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 6
SOGEVAC SV 570 BPumping speed 470 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 11 kW 50 Hz11 – 13.2 kW 60 HzVariants 6
SOGEVAC SV 630 BPumping speed 640 m³/h 50 Hz755 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 34
SOGEVAC SV 750 BPumping speed 755 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 18.5 kW 50 HzVariants 15Leybold TRIVAC series 20 models
TRIVAC D 2,5 EPumping speed 2.7 m³/h 50 Hz3.3 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.28 – 0.29 kW 50 Hz0.3 – 0.31 kW 60 HzVariants 3
TRIVAC D 4 BPumping speed 4.2 m³/h 50 Hz5 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3TRIVAC D 4 TPumping speed 4.3 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.25 – 0.57 kW 50 Hz0.25 – 0.66 kW 60 HzVariants 2TRIVAC D 5 LPumping speed 5.1 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2TRIVAC D 8 TPumping speed 8.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.37 – 0.66 kW 60 HzVariants 2
TRIVAC D 8 BPumping speed 8.5 m³/h 50 Hz10.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3TRIVAC D 12 LPumping speed 12 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2TRIVAC D 16 TPumping speed 16.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.55 – 0.75 kW 60 HzVariants 2
TRIVAC D 16 BPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 6
TRIVAC D 16 BCSPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 25 BPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 4
TRIVAC D 25 BCSPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2TRIVAC D 30 TPumping speed 30.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 40 BPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
TRIVAC D 40 BCSPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2TRIVAC D 40 LPumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 4TRIVAC D 63 LPumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 4
TRIVAC D 65 BPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1
TRIVAC D 65 BCSPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2TRIVAC D 90 LPumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 3Pfeiffer Vacuum A4 series 12 models
A 124 HPumping speed 95 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants A 204 H/XPumping speed 130 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants A 604 HPumping speed 480 m³/h 50 Hz560 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants A 804 H/XPumping speed 600 m³/h 50 Hz700 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants A 1204 HPumping speed 1,050 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants A 1504 H/XPumping speed 1,100 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants A 1804 H/XPumping speed 1,650 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants A 1504 XNPumping speed 1,100 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants A 1804 XNPumping speed 1,600 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants A 3004 H/XPumping speed 3,000 m³/h 60 HzUltimate pressure 4 × 10-3 mbarRated motor power Variants A 3004 XNPumping speed 2,900 m³/h 60 HzUltimate pressure 4 × 10-3 mbarRated motor power Variants A 804 XNPumping speed 600 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants Pfeiffer Vacuum A 100/200 L series 3 models
A 100 LPumping speed 100 m³/h 50 HzUltimate pressure 0.012 mbarRated motor power Variants 8A 100 L ESPumping speed 100 m³/h 50 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants 3A 200 LPumping speed 200 m³/h 50 HzUltimate pressure 0.013 mbarRated motor power Variants 5Pfeiffer Vacuum ACP series 4 models
ACP 15Pumping speed 14 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power Variants 9ACP 28Pumping speed 27 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 14ACP 40Pumping speed 37 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 15ACP 90Pumping speed 88 m³/h 50 HzUltimate pressure 0.03 mbarRated motor power Variants 6Pfeiffer Vacuum DuoVane series 12 models
DuoVane 1.6Pumping speed 1.25 m³/h 50 Hz1.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.075 kW 50 Hz0.09 kW 60 HzVariants 9DuoVane 3Pumping speed 2.5 m³/h 50 Hz2.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.25 kW 50 Hz0.3 kW 60 HzVariants 10DuoVane 6Pumping speed 5.5 m³/h 50 Hz6.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 2DuoVane 12Pumping speed 9.5 m³/h 50 Hz11.8 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5DuoVane 18Pumping speed 14 m³/h 50 Hz16.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 2DuoVane 22Pumping speed 19.5 m³/h 50 Hz22.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 5DuoVane 30Pumping speed 24 m³/h 50 Hz29 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1DuoVane 36Pumping speed 32 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.1 kW 50 Hz1.3 kW 60 HzVariants 11DuoVane 70Pumping speed 62 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 13DuoVane 95Pumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 1DuoVane 135Pumping speed 115 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 4 kW 50 Hz4.5 kW 60 HzVariants 3DuoVane 300Pumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 3Pfeiffer Vacuum HiLobe series 17 models
HiLobe 1002Pumping speed 1,050 m³/h 50 HzUltimate pressure Rated motor power 2 kW 50 HzVariants 1HiLobe 1004Pumping speed 1,050 m³/h 50 HzUltimate pressure Rated motor power 2 kW 50 HzVariants 2HiLobe 1302Pumping speed 1,300 m³/h 50 HzUltimate pressure Rated motor power 2.5 kW 50 HzVariants 2HiLobe 1304Pumping speed 1,300 m³/h 50 HzUltimate pressure Rated motor power 2.5 kW 50 HzVariants 2HiLobe 2104Pumping speed 2,100 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 2HiLobe 2703Pumping speed 2,700 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 1HiLobe 2704Pumping speed 2,700 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 2HiLobe 4504Pumping speed 4,440 m³/h 50 HzUltimate pressure Rated motor power 5.5 kW 50 HzVariants 2HiLobe 4503Pumping speed 4,500 m³/h 50 HzUltimate pressure Rated motor power 5.5 kW 50 HzVariants 1HiLobe 6203Pumping speed 6,200 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants 1HiLobe 6204Pumping speed 6,220 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants 2HiLobe 8103Pumping speed 8,120 m³/h 50 HzUltimate pressure Rated motor power 9 kW 50 HzVariants 1HiLobe 8104Pumping speed 8,120 m³/h 50 HzUltimate pressure Rated motor power 9 kW 50 HzVariants 1HiLobe 11003Pumping speed 10,830 m³/h 50 HzUltimate pressure Rated motor power 12 kW 50 HzVariants 1HiLobe 11004Pumping speed 10,830 m³/h 50 HzUltimate pressure Rated motor power 12 kW 50 HzVariants 1HiLobe 14003Pumping speed 13,540 m³/h 50 HzUltimate pressure Rated motor power 15 kW 50 HzVariants 1HiLobe 14004Pumping speed 13,540 m³/h 50 HzUltimate pressure Rated motor power 15 kW 50 HzVariants 1Pfeiffer Vacuum HiScroll series 4 models
HiScroll 6Pumping speed 6.1 m³/h 50 HzUltimate pressure 0.015 mbarRated motor power Variants 7HiScroll 12Pumping speed 12.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 7HiScroll 18Pumping speed 18.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 11HiScroll 46Pumping speed 43 m³/h 50 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 11Pfeiffer Vacuum TORRI series 4 models
TORRI BD 0100 APumping speed 100 m³/h 50 Hz100 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1TORRI BD 0300 APumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1TORRI BD 0600 APumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1TORRI BD 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants No model matches these filters.
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards E2M series 9 models
Edwards E2S series 3 models
Edwards EDS series 3 models
Edwards EH series 5 models
Edwards EXS series 11 models
Edwards GXS series 10 models
Edwards nES series 8 models
Edwards nXRi series 5 models
Leybold DRYVAC series 9 models
Leybold DURADRY series 3 models
Leybold NOVADRY series 4 models
Leybold RUVAC WA/WAU series 8 models
Leybold RUVAC WH/WHU series 7 models
Leybold RUVAC WS/WSU series 8 models
Leybold SCREWLINE series 2 models
Leybold SOGEVAC series 23 models
Leybold TRIVAC series 20 models
Pfeiffer Vacuum A4 series 12 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Pfeiffer Vacuum TORRI series 4 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Selection
Coating and thin film: choosing a vacuum pump
What the manufacturers highlight for use in this industry.
Process pressure and ultimate pressure
The process determines the pressure: Leybold names 10⁻² to 10⁻³ mbar for optical coatings, 10⁻² to 10⁻⁶ mbar for wear protection and decorative coatings and 10⁻¹ to 10⁻³ mbar for roll-to-roll; Edwards names CVD and ALD from 10⁻³ mbar, Pfeiffer Vacuum ALD at 10⁻¹ to 5 mbar. For high vacuum the backing pump alone is not enough: for PVD Edwards names a backing pump plus a turbo or cryopump, Leybold names TURBOVAC and COOLVAC alongside the backing pumps.
Cycle time of the load locks
Inline systems depend on the load lock cycle: for glass Leybold names 2–3 cycles per minute from 1,000 to 1 mbar, for displays very short pump-down cycles and for solar cells short cycle times; Edwards names fast pump-down cycles in glass coating. The pumping speed must match – Leybold names RUVAC with 250–7,000 m³/h and SOGEVAC with 16–750 m³/h, Pfeiffer Vacuum names 1,800–4,500 m³/h for ALD.
Process gases and by-products
In CVD and ALD the by-products are corrosive or powdery, according to Pfeiffer Vacuum. For plasma treatment Leybold names PFPE versions of TRIVAC B and RUVAC, VARODRY HD O2 and DURADRY; Edwards names a screw pump plus a Roots pump, E2S, E2M FX and nXRi for this. Which gases occur determines the seals, the oil and the version of the pump.
Batch or inline system
Leybold names optical coatings in batch systems, and glass, display and solar coating in inline systems with load locks; Pfeiffer Vacuum names clean vacuum for PVD, CVD/PECVD and ALD in batch and inline systems. Batch systems are brought to process pressure for each batch; inline systems hold the process pressure and pump down the load locks in cycles.
Frequently asked questions
Coating and thin film: frequently asked questions about vacuum pumps
Which vacuum pump is suitable for PVD coating?
For wear protection and decorative coatings by PVD, Leybold names DRYVAC, SOGEVAC and RUVAC (also VARODRY, SCREWLINE, POWER BOOST) at 10⁻² to 10⁻⁶ mbar. Pfeiffer Vacuum names ACP, DuoVane, HiLobe and HiScroll, Busch names R5, MINK, COBRA and PANDA/PUMA. Edwards describes PVD as evaporation and condensation in high vacuum with a backing pump plus a turbo or cryopump.
How much vacuum does a coating system need?
Leybold names 10⁻² to 10⁻³ mbar for optical coatings, 10⁻² to 10⁻⁶ mbar for wear protection and decorative coatings and 10⁻¹ to 10⁻³ mbar for roll-to-roll. Edwards names CVD and ALD from 10⁻³ mbar, Pfeiffer Vacuum ALD at 10⁻¹ to 5 mbar and MBE at about 10⁻¹¹ hPa. The backing pump handles the rough vacuum part; for high vacuum, according to Edwards and Leybold, a turbo or cryopump is added.
Which backing pump for optical coating?
For anti-reflective and scratch-resistant multilayer coatings in batch systems, Leybold names TRIVAC, SOGEVAC, DRYVAC, RUVAC, SCREWLINE and VARODRY at 10⁻² to 10⁻³ mbar. For anti-reflective, mirror and filter coatings, Pfeiffer Vacuum names ACP, DuoVane, HiLobe and HiScroll, Busch names R5, MINK, COBRA and PANDA/PUMA.
Which vacuum pump for glass coating?
For architectural and automotive glass, Leybold names SCREWLINE, POWER BOOST, DRYVAC, SOGEVAC and RUVAC; the backing pumps cycle the load locks at 2–3 cycles per minute from 1,000 to 1 mbar. For low-E, solar control and AR coatings inline, Pfeiffer Vacuum names ACP and HiLobe, Edwards names fast pump-down cycles with EDS and EXS, Busch names R5, COBRA and PANDA/PUMA.
Which vacuum pump for CVD, PECVD and ALD?
Edwards names EXS for CVD and ALD from 10⁻³ mbar. Pfeiffer Vacuum names A4 and A4H for PECVD/SACVD, ALD, LPCVD/diffusion and MBE, and ALD systems with 1,800–4,500 m³/h at 10⁻¹ to 5 mbar, and points out corrosive or powdery by-products. Busch names COBRA DS for CVD/PECVD, Leybold names DRYVAC and RUVAC for CVD on HJT solar cells.
Which vacuum pump for wear-resistant coatings on tools?
Pfeiffer Vacuum names hard coatings such as TiN and DLC on tools, for example for stamping and die casting, with DuoVane, HiLobe and HiScroll (also COMBI). Leybold names hard thin films on tools, metal and plastic parts with DRYVAC, SOGEVAC and RUVAC, Busch names wear-protection coating with R5, COBRA and PANDA/PUMA.
Oil-free or oil-lubricated for vacuum coating?
The manufacturers name both: Busch lists the oil-lubricated R5 rotary vane pumps alongside the dry COBRA, MINK and PANDA/PUMA, Leybold lists SOGEVAC alongside DRYVAC, Edwards lists E2M alongside the dry screw pumps EDS, EXS and GXS. Pfeiffer Vacuum names clean vacuum for PVD, CVD/PECVD and ALD, Edwards names the vapour that must reach the substrate in pure form – the closer the pump is to the process, the more likely the choice is a dry version.
How fast must the load lock of a coating system be evacuated?
For glass coating Leybold names 2–3 cycles per minute from 1,000 to 1 mbar, for displays very short pump-down cycles and for solar cells inline systems with short cycle times. For this Leybold names RUVAC Roots pumps with 250–7,000 m³/h ahead of DRYVAC or SOGEVAC; Edwards names fast pump-down cycles with EDS and EXS.
Which vacuum pump for plasma treatment?
For plasma used for coating, cleaning, activating and etching, Leybold names PFPE versions of TRIVAC B and RUVAC, VARODRY HD O2, DURADRY and DRYVAC. For plasma ignition for surface activation, Edwards names a screw pump plus a Roots pump, E2S, E2M FX and nXRi.
Which vacuum pump for roll-to-roll coating?
For flexible webs coated by PVD, PECVD or evaporation, Leybold names a pressure of 10⁻¹ to 10⁻³ mbar and, as pumps, turbo, cryo, oil-sealed, diffusion and dry industrial pumps as well as Roots pumps, without specifying a series. Edwards names EXS for web coating and plasma spraying.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the number of machines – we advise you on selection, spare parts and service.
