Industry
Vacuum pumps for the chemical industry
In the chemical industry, vacuum is at work from raw material transport to distillation (Busch): it lowers boiling points and process temperatures, protects products, removes impurities and excludes oxygen (Edwards). Elmo Rietschle names vacuum and compression for continuous and batch processes, Atlas Copco names low pressure for reactions and processes. Below you can see which series the manufacturers themselves name for these tasks – 751 models from 5 manufacturers.
Compare 751 modelsSee the applications
- 751Models
- 69Series
- 5Manufacturers
- 8Applications

In short
Chemicals: vacuum pumps – the key facts
- DistillationIn its product finder, Busch places solvent recovery at pressures above 1 hPa and vacuum distillation below 1 hPa; as an example, Busch names a system for 8 mbar made up of two PANDA WV booster stages and a DOLPHIN LB. For crude oil distillation Busch names 10 to 50 hPa.
- Lower temperatureAs benefits of vacuum in the chemical industry, Edwards names lower energy use, a lower process temperature, gentler treatment of products and the exclusion of oxygen. For drying under vacuum Busch names a reduction from weeks to a few days.
- Pump typesFor the chemical industry Edwards names dry-running pumps, liquid ring and rotary vane pumps, Roots pumps, ejectors and oil vapour boosters. Elmo Rietschle names its V, G, L, S and C series, Pfeiffer Vacuum names ACP, DuoVane, HiLobe, HiScroll and SmartVane.
- Flammable substancesFor the petrochemical industry Edwards names contamination-free pumping of flammable substances with GXS, EDS and EH, and ATEX versions such as nES Ex. Busch names the DOLPHIN for petroleum refining, also in an ATEX version, Atlas Copco names the GHS VSD+ in the Humid version.
Applications
Chemicals: what vacuum pumps are used for
For each application: what the vacuum does and which series the manufacturers name for it. The information comes from the manufacturers’ own pages.
Distillation, evaporation and solvent recovery
Vacuum lowers the boiling point, so substances boil at a lower temperature and are separated gently (Busch, Edwards). In its product finder, Busch places solvent recovery above 1 hPa and vacuum distillation below 1 hPa; for crude oil distillation Busch names 10 to 50 hPa, in which the residue is separated without cracking. For short-path distillation Edwards names oil vapour boosters for low operating pressures.
- BuschDOLPHIN, COBRA Industry, R5, HUCKEPACK, PANDA/PUMA, MINK also names APOVAC
- EdwardsLR1A, LR1C, LR1D, EH also names E2M Ex, XDS and GV
- Elmo Rietschlenames continuous and batch distillation, thin-film evaporation and solvent recovery without a series
- Pfeiffer Vacuumnames distillation and solvent recovery without a series
Vacuum drying
Under vacuum, moisture evaporates at a low temperature (Atlas Copco, Busch); Busch names a reduction from weeks to a few days and, for slurry drying, the gentle removal of moisture and solvents with R5 RA and COBRA NC/NX. Elmo Rietschle cites short evacuation times of the S-VSI 300 with up to 380 m³/h and 0.1 mbar (abs.) as an example for drying processes and names versions with high water vapour tolerance.
Degassing of liquids and polymers
As the pressure is reduced, dissolved gas escapes from liquids and pastes (Busch). Atlas Copco names the degassing of polymers and degassing in synthesis, Edwards names the degassing and curing of oil and epoxy with XDS.
Vacuum filtration
The pressure difference drives the liquid through the filter and separates solids in synthesis and formulation (Atlas Copco). For filtration and degassing Busch names typical pressures above 1 hPa, Edwards names filtration and dewatering with EDS and liquid ring pumps.
Reactions, polymerisation and crystallisation
Edwards names vacuum for reactions whose yield rises when the equilibrium is shifted, for polymerisation and for bio-based polymers such as PLA, from which residual monomer is removed; Edwards also lists fluorination, hydrogenation, crystallisation and mixing. For the chemical industry Atlas Copco names low pressure for reactions and processes.
Freeze drying
Frozen water sublimates under vacuum; for lyophilisation Busch names pressures below 1 hPa and the protection of heat-sensitive products. For freeze drying in the laboratory Pfeiffer Vacuum names a stable pressure without traces of oil and describes the drying of vaccines at 0.5 to 10⁻² hPa.
- BuschR5, COBRA Industry, PANDA/PUMA, DOLPHIN, MINK also names APOVAC
- Pfeiffer VacuumACP, DuoVane, HiScroll, HiLobe
Pneumatic conveying
Bulk materials and powders are moved by suction air or compressed air in a closed line (Busch). Elmo Rietschle names the transport of dust, granules and powder in the chemical industry with the C, G and V series, Busch names the gentle conveying of powder and granules.
Laboratory vacuum and leak detection
Pfeiffer Vacuum names quiet, clean vacuum for mass spectrometry, freeze drying, glove boxes and filtration, individually or centrally, and states about 45 dB for the HiScroll. For helium leak detection Pfeiffer Vacuum names leak rates of about 10⁻⁷ to 10⁻⁹ mbar·l/s.
Sub-sectors
Chemicals in detail
Separate pages for the areas the manufacturers treat on their own.
Petrochemicals
Vacuum pumps for petrochemicals: pumping flammable substances contamination-free in aromatics extraction, BTX, styrene and MMA. Edwards and Atlas Copco series.
Manufacturers and series
Chemicals: 5 manufacturers, 69 series
Listed are the series the manufacturer itself names for this industry. “Show only …” sets the filter of the product overview.
Atlas Copco
178 models · 0.75–36,600 m³/h
Busch
305 models · 3–16,160 m³/h
Edwards
94 models · 0.75–8,100 m³/h
Elmo Rietschle
132 models · 10–5,740 m³/h
- V-VGD2
- V-VTN3
- V-VCB2
- V-VCA/VCE2
- G-BH1001
- V-VCS13
- V-VCX7
- V-KTR4
- C-KLR2
- C-VLR7
- V-VTR2
- C-VLU4
- S-VSI1
- S-SVT11
- G-BH125
- G-BH29
- G-BH715
- G-BH91
- L-BL27
- L-BV24
- L-BV31
- L-BV55
- L-BV74
Pfeiffer Vacuum
42 models · 1.25–13,540 m³/h
Product overview
Chemicals: all 751 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Atlas Copco AWC series 9 models
Atlas Copco AWD series 14 models
Atlas Copco AWL series 11 models
Atlas Copco AWS series 22 models
Atlas Copco DBD series 6 models
Atlas Copco DBDt series 17 models
Atlas Copco DBS series 29 models
Atlas Copco DBSt series 12 models
Atlas Copco DRB series 4 models
Atlas Copco DWS VSD+ series 6 models
Atlas Copco GHS VSD+ series 21 models
Atlas Copco GLS series 2 models
Atlas Copco GVD series 13 models
Atlas Copco GVS VSD+ series 4 models
Atlas Copco LRP VSD+ series 3 models
Atlas Copco ZRS series 5 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Busch DOLPHIN series 70 models
Busch HUCKEPACK series 4 models
Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Busch SAMOS series 31 models
Busch SECO series 10 models
Busch TYR series 16 models
Edwards E2M series 9 models
Edwards E2S series 3 models
Edwards EDS series 3 models
Edwards EH series 5 models
Edwards EOSi series 10 models
Edwards EXS series 11 models
Edwards GV series 2 models
Edwards GXS series 10 models
Edwards IDX series 1 model
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
Edwards nES Ex series 5 models
Edwards XDS series 2 models
Elmo Rietschle C-KLR series 2 models
Elmo Rietschle C-VLR series 7 models
Elmo Rietschle C-VLU series 4 models
Elmo Rietschle G-BH1 series 25 models
Elmo Rietschle G-BH2 series 9 models
Elmo Rietschle G-BH7 series 15 models
Elmo Rietschle G-BH9 series 1 model
Elmo Rietschle G-BH100 series 1 model
Elmo Rietschle L-BL2 series 7 models
Elmo Rietschle L-BV2 series 4 models
Elmo Rietschle L-BV3 series 1 model
Elmo Rietschle L-BV5 series 5 models
Elmo Rietschle L-BV7 series 4 models
Elmo Rietschle S-SVT series 11 models
Elmo Rietschle S-VSI series 1 model
Elmo Rietschle V-KTR series 4 models
Elmo Rietschle V-VCA/VCE series 2 models
Elmo Rietschle V-VCB series 2 models
Elmo Rietschle V-VCS series 13 models
Elmo Rietschle V-VCX series 7 models
Elmo Rietschle V-VGD series 2 models
Elmo Rietschle V-VTN series 3 models
Elmo Rietschle V-VTR series 2 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Pfeiffer Vacuum SmartVane series 2 models
No model matches these filters.
Atlas Copco AWC series 9 models
Atlas Copco AWD series 14 models
Atlas Copco AWL series 11 models
Atlas Copco AWS series 22 models
Atlas Copco DBD series 6 models
Atlas Copco DBDt series 17 models
Atlas Copco DBS series 29 models
Atlas Copco DBSt series 12 models
Atlas Copco DRB series 4 models
Atlas Copco DWS VSD+ series 6 models
Atlas Copco GHS VSD+ series 21 models
Atlas Copco GLS series 2 models
Atlas Copco GVD series 13 models
Atlas Copco GVS VSD+ series 4 models
Atlas Copco LRP VSD+ series 3 models
Atlas Copco ZRS series 5 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Busch DOLPHIN series 70 models
Busch HUCKEPACK series 4 models
Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Busch SAMOS series 31 models
Busch SECO series 10 models
Busch TYR series 16 models
Edwards E2M series 9 models
Edwards E2S series 3 models
Edwards EDS series 3 models
Edwards EH series 5 models
Edwards EOSi series 10 models
Edwards EXS series 11 models
Edwards GV series 2 models
Edwards GXS series 10 models
Edwards IDX series 1 model
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
Edwards nES Ex series 5 models
Edwards XDS series 2 models
Elmo Rietschle C-KLR series 2 models
Elmo Rietschle C-VLR series 7 models
Elmo Rietschle C-VLU series 4 models
Elmo Rietschle G-BH1 series 25 models
Elmo Rietschle G-BH2 series 9 models
Elmo Rietschle G-BH7 series 15 models
Elmo Rietschle G-BH9 series 1 model
Elmo Rietschle G-BH100 series 1 model
Elmo Rietschle L-BL2 series 7 models
Elmo Rietschle L-BV2 series 4 models
Elmo Rietschle L-BV3 series 1 model
Elmo Rietschle L-BV5 series 5 models
Elmo Rietschle L-BV7 series 4 models
Elmo Rietschle S-SVT series 11 models
Elmo Rietschle S-VSI series 1 model
Elmo Rietschle V-KTR series 4 models
Elmo Rietschle V-VCA/VCE series 2 models
Elmo Rietschle V-VCB series 2 models
Elmo Rietschle V-VCS series 13 models
Elmo Rietschle V-VCX series 7 models
Elmo Rietschle V-VGD series 2 models
Elmo Rietschle V-VTN series 3 models
Elmo Rietschle V-VTR series 2 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Pfeiffer Vacuum SmartVane series 2 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Selection
Chemicals: choosing a vacuum pump
What the manufacturers highlight for use in this industry.
Solvents and vapours
In drying and distillation, solvents and water vapour also enter the pump. For slurry drying Busch names R5 RA and COBRA NC/NX, Elmo Rietschle names versions with high water vapour tolerance, Atlas Copco names the GHS VSD+ in the Humid version.
Pressure range
In its product finder, Busch draws the line at 1 hPa: solvent recovery and filtration above it, vacuum distillation and freeze drying below it. For freeze drying Pfeiffer Vacuum names 0.5 to 10⁻² hPa, for short-path distillation Edwards names oil vapour boosters at low operating pressure.
Explosion protection
For the chemical industry Edwards names ATEX versions and, for flammable substances in the petrochemical industry, contamination-free pumping with GXS, EDS and EH; Edwards lists the nES Ex for speciality and fine chemicals. Busch names the DOLPHIN for petroleum refining, also as an ATEX version.
Continuous or batch
Elmo Rietschle names vacuum and compression for continuous and batch processes, Busch names vacuum from raw material transport to distillation. For tray, freeze and rotary drying Atlas Copco names lowering the boiling point for the gentle drying of active ingredients.
Frequently asked questions
Chemicals: frequently asked questions about vacuum pumps
Which vacuum pump is suitable for vacuum distillation?
Busch names DOLPHIN, COBRA, R5, HUCKEPACK and PANDA and, as an example system, two PANDA WV booster stages with a DOLPHIN LB for 8 mbar. Edwards names the LR liquid ring pumps and the EH series, and oil vapour boosters for short-path distillation. Pfeiffer Vacuum and Elmo Rietschle name distillation without a series.
How much vacuum does solvent recovery need?
In its product finder, Busch places solvent recovery at pressures above 1 hPa and vacuum distillation below 1 hPa. For crude oil distillation Busch names 10 to 50 hPa, so that the residue is separated without cracking.
Which vacuum pump for drying in the chemical industry?
Busch names COBRA, DOLPHIN, R5, MINK, PANDA and PUMA, Pfeiffer Vacuum names ACP, DuoVane, HiScroll and HiLobe, Elmo Rietschle names the S-VSI screw vacuum pumps and versions with high water vapour tolerance. Atlas Copco names DWS VSD+ and AWS, Edwards names screw, claw and liquid ring pumps.
Why does vacuum lower the process temperature?
Under vacuum, liquids boil at a lower temperature. As a result, Edwards names lower energy use, gentler treatment of products and the exclusion of oxygen, Busch names gentle separation in distillation and drying in days instead of weeks.
Which vacuum pump for flammable substances and ATEX areas?
For the petrochemical industry Edwards names contamination-free pumping of flammable substances with GXS, EDS and EH as well as ATEX versions such as the nES Ex. Busch names the DOLPHIN for petroleum refining, also in an ATEX version.
Which vacuum pump for freeze drying?
Busch names COBRA, R5, PANDA, DOLPHIN and MINK and pressures below 1 hPa. Pfeiffer Vacuum names ACP, DuoVane, HiScroll and HiLobe and describes the freeze drying of vaccines at 0.5 to 10⁻² hPa with a stable pressure without traces of oil.
Which vacuum pump for vacuum filtration?
Atlas Copco names the AWL and AWS liquid ring pumps, Busch names COBRA, R5, DOLPHIN and MINK at typically above 1 hPa, Edwards names EDS and the LR series for filtration and dewatering.
Which vacuum pump for reactors and polymerisation?
For polymerisation Edwards names the LR liquid ring pumps and EDS, and describes that the yield of reactions rises when the equilibrium is shifted and that residual monomer is removed from PLA. For the chemical industry Atlas Copco names low pressure for reactions with GHS VSD+, GVS VSD+ and DWS VSD+.
Which vacuum pump for the chemical laboratory?
Pfeiffer Vacuum names HiScroll, ACP, DuoVane and SmartVane for quiet, clean vacuum, individually or centrally, and states about 45 dB for the HiScroll. For glove boxes Pfeiffer Vacuum names the HiScroll.
Which vacuum pump for transporting powder and granules?
Busch names MINK, R5, DOLPHIN and COBRA for pneumatic conveying in a closed line, Elmo Rietschle names the C, G and V series for dust, granules and powder in the chemical industry.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the number of machines – we advise you on selection, spare parts and service.







