COBRA DS 1000 G Version as listed in the Busch shop, motor and equipment on request

The Busch COBRA DS 1000 G is a dry screw vacuum pump with a nominal pumping speed of 775 m³/h (50 Hz) or 960 m³/h (60 Hz) and an ultimate pressure of 0.003 mbar. Ehrler & Beck advises on selection and service.

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Pumping speed 775 m³/h 50 Hz 960 m³/h 60 Hz
Ultimate pressure 3 × 10^-3 mbar
Rated motor power 8 kW 50 Hz 8.8 kW 60 Hz

Available variants
Variant	Part number
Version as listed in the Busch shop, motor and equipment on request (selected)	1361800261
Version as listed in the Busch shop, motor and equipment on request	1361800847

Busch COBRA DS 1000 G – dry screw vacuum pump

The Busch COBRA DS 1000 G is a dry screw vacuum pump. The nominal pumping speed is 775 m³/h (50 Hz) or 960 m³/h (60 Hz), the ultimate pressure 0.003 mbar. Nominal motor rating 8 kW (50 Hz) or 8.8 kW (60 Hz).

Features

Powerful: screw design with integrated vacuum booster, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling, high hydrogen throughput
Compact: space-saving design with directly mounted canned motor; backing pump and vacuum booster on a common base frame

Typical applications

Busch lists: Displays (physical vapour deposition (PVD)); Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, polysilicon etching, PECVD and others); Solar (cell production, crystal pulling).

Versions of the Busch COBRA DS 1000 G

The 2 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.

Advice and service

Ehrler & Beck advises on selection, accessories and service.

Pumping speed 50Hz	775
Pumping speed 60Hz	960
Ultimate pressure	3 × 10^-3
Rated motor power 50Hz	8
Rated motor power 60Hz	8.8
Weight	576
Length	103.4
Width	42.5
Height	101.7
Inlet connection flange	DN 100
Outlet connection flange	DN 40
Noise level	62 dB(A)
Cooling method	Water cooling
Oil type	Oil-free

Additional technical data

Technical data	Value
Nominal pumping speed	775 m³/h (50 Hz) / 960 m³/h (60 Hz)
Ultimate pressure	0.003 mbar
Rated motor power, backing pump	4.0 kW (50 Hz) / 4.4 kW (60 Hz)
Rated motor power, vacuum booster	4.0 kW (50 Hz) / 4.4 kW (60 Hz)
Rated speed, backing pump	3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz)
Rated speed, vacuum booster	3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz)
Power consumption at ultimate pressure	3.3 kW (50 Hz) / 4.0 kW (60 Hz)
Power consumption at idle	3.3 kW (50 Hz) / 4.0 kW (60 Hz)
Sound pressure level (ISO 2151, KpA = 3 dB)	< 62 dB(A)
Water consumption	5.0 l/min
Nitrogen consumption	0 – 75 l/min
Dimensions (L × W × H)	1034 × 425 × 1017 mm
Weight (approx.)	576 kg
Gas inlet	DN 100
Gas outlet	DN 40