Application

Vacuum pumps for crystal growing

In crystal growing a single large crystal grows, in the case of silicon from the melt ā€“ silicon and silicon carbide are grown for wafers, and according to Edwards also III-V semiconductors and diamond. For this the growing furnace is evacuated: according to Busch, the vacuum keeps the process chamber free of contamination, and according to Atlas Copco it creates a low-gas environment for pure silicon. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it ā€“ 178 models from 4 manufacturers.

Compare 178 modelsHow it works

  • 178Models
  • 13Series
  • 4Manufacturers
  • 3Industries
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Touch the points: each part of the system explains itself.

In short

Crystal growing: the key facts

  • PurityAtlas Copco names a low-gas environment for pure silicon; according to Busch, the vacuum keeps the process chamber free of contamination.
  • MaterialsLeybold names silicon and SiC crystals for wafers, Edwards Si, III-V, SiC and diamond.
  • Dry pumpsFor crystal growing and casting Atlas Copco names dust- and corrosion-resistant dry vacuum pumps, and for silicon crystal pulling the DWS VSD+.
  • DesignThe design depends on the furnace and the process; we determine the right pump together with you, based on furnace volume, heating-up time and gas flow.
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  • Air and gas (vacuum)
  • Exhaust

Operating principle

How it works: Crystal growing

The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.

  1. EvacuationThe furnace with crucible and raw material is evacuated; the vacuum removes the air and, according to Busch, keeps the chamber free of contamination.
  2. MeltingThe heater melts the silicon in the crucible ā€“ according to Atlas Copco in a low-gas environment for pure silicon.
  3. GrowingThe crystal grows from the melt and is pulled; the pump maintains the vacuum throughout growth. According to Leybold, this is how Si and SiC crystals for wafers are produced.

Vacuum and sizing

Crystal growing: how much vacuum is needed

What the manufacturers say about pressure, pumping speed and sizing.

Which vacuum

Leybold says that Si and SiC crystals for wafers are pulled and grown under vacuum, Atlas Copco names a low-gas environment for pure silicon, Busch a process chamber that the vacuum keeps free of contamination.

Which pumping speed

The design depends on the furnace volume, the heating-up time and the gas flow during growth.

What determines the design

Atlas Copco names dust- and corrosion-resistant dry vacuum pumps ā€“ dust from the furnace and purity of the melt are the requirements. Alongside the dry DRYVAC and SCREWLINE SP, Leybold also names the oil-lubricated TRIVAC B, Edwards GXS, EXS and EDS, Busch COBRA and PANDA/PUMA.

Technology

Crystal growing: the vacuum pumps the manufacturers name

Listed are the series the manufacturer itself names for this application. ā€œShow only ā€¦ā€ sets the filter of the product overview.

Product overview

Crystal growing: all 178 models compared

Use the filters on the left to narrow the selection ā€“ by manufacturer, technology and the modelsā€™ key figures, for 50 or 60 Hz.

Atlas Copco DWS VSD+ series 6 models

DWS 160 VSD+Pumping speed 160 mĀ³/h 50 Hz160 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1
DWS 250 VSD+Pumping speed 250 mĀ³/h 50 Hz250 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1
DWS 450 VSD+Pumping speed 450 mĀ³/h 50 Hz450 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3
DWS 750 VSD+Pumping speed 740 mĀ³/h 50 Hz740 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3
DWS 160/1750 VSD+Pumping speed 1,200 mĀ³/h 50 Hz1,200 mĀ³/h 60 HzUltimate pressure 1 Ɨ 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 1
DWS 250/2600 VSD+Pumping speed 1,900 mĀ³/h 50 Hz1,900 mĀ³/h 60 HzUltimate pressure 1 Ɨ 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 1

Busch COBRA Industry series 36 models

COBRA NS 0070 CPumping speed 70 mĀ³/h 50 Hz85 mĀ³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants
COBRA NC 0100 BPumping speed 110 mĀ³/h 50 Hz130 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 mĀ³/h 50 Hz130 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants
COBRA NS 0160 CPumping speed 135 mĀ³/h 50 Hz170 mĀ³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants
COBRA NC 0200 BPumping speed 220 mĀ³/h 50 Hz265 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 mĀ³/h 50 Hz265 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants
COBRA NC 0300 BPumping speed 320 mĀ³/h 50 Hz385 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 APumping speed 350 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0300 B ECOTORQUEPumping speed 385 mĀ³/h 50 Hz385 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0400 B ECOTORQUEPumping speed 420 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 A ECOTORQUEPumping speed 420 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants
COBRA NC 0500 BPumping speed 490 mĀ³/h 50 Hz490 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants
COBRA NC 0630 C VRPumping speed 580 mĀ³/h 50 Hz680 mĀ³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants
COBRA NC 0600 CPumping speed 600 mĀ³/h 50 Hz600 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NS 0600 CPumping speed 600 mĀ³/h 50 Hz600 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 0630 CPumping speed 630 mĀ³/h 50 Hz630 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants
COBRA NC 0630 C ECOTORQUEPumping speed 630 mĀ³/h 50 Hz630 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants

Busch COBRA Semicon series 22 models

Busch PANDA/PUMA series 26 models

Edwards EDS series 3 models

Edwards EXS series 11 models

Edwards GXS series 10 models

Edwards LR1A series 12 models

Edwards LR1C series 9 models

Edwards LR1D series 12 models

Leybold DRYVAC series 9 models

Leybold SCREWLINE series 2 models

Leybold TRIVAC series 20 models

Model comparison

Models a manufacturer no longer carries in its current range are listed in its ā€œOutdated modelsā€ section.

Industries

Crystal growing: where the manufacturers name it

The manufacturers list these uses on their own pages.

Solar and photovoltaics

Atlas Copco, Busch and Leybold name crystal growing for solar and photovoltaics: Atlas Copco crystal growing and casting with dust- and corrosion-resistant dry pumps and silicon crystal pulling with DWS VSD+, Busch the growing of silicon crystals with COBRA and PANDA, Leybold the pulling and growing of Si and SiC crystals for wafers with DRYVAC, SCREWLINE SP and TRIVAC B.

Industry page: Solar and photovoltaics ā†’

Mechanical engineering and manufacturing

Among its industrial solutions Edwards names the crystal growing of Si, III-V, SiC and diamond with GXS, EXS and EDS.

Industry page: Mechanical engineering and manufacturing ā†’

Chemicals

On its chemical process engineering page Edwards lists crystallisation with the LR1A, LR1C and LR1D liquid ring vacuum pumps ā€“ without a description; what is meant there is the crystallisation of a substance from solution, not the growing of a single crystal.

Industry page: Chemicals ā†’

Frequently asked questions

Crystal growing: frequently asked questions

Why is silicon for wafers pulled under vacuum?

According to Atlas Copco, pure silicon needs a low-gas environment; according to Busch, the vacuum keeps the process chamber free of contamination. Leybold names the pulling and growing of Si and SiC crystals for wafers under vacuum. With no air and no foreign gases in the furnace, no contamination gets into the melt and the growing crystal.

How much vacuum does crystal growing need?

Atlas Copco speaks of a low-gas environment, Leybold of crystals under vacuum; the design depends on the furnace and the process.

Which vacuum pump for silicon crystal pulling?

Atlas Copco names the DWS VSD+ and, in general, dust- and corrosion-resistant dry vacuum pumps; Busch COBRA and PANDA, and on its product page COBRA Industry, COBRA Semicon and PANDA/PUMA; Leybold DRYVAC, SCREWLINE SP and TRIVAC B (plus POWER BOOST and VARODRY); Edwards GXS, EXS and EDS.

Oil-free or oil-lubricated for crystal growing?

Atlas Copco explicitly names dry vacuum pumps that are dust- and corrosion-resistant. Edwards with GXS, EXS and EDS and Busch with COBRA and PANDA/PUMA also name dry pumps. Alongside the dry DRYVAC and SCREWLINE SP, Leybold also lists the oil-lubricated rotary vane vacuum pump TRIVAC B ā€“ so both are named.

Which vacuum pump for SiC crystal growing?

Leybold names Si and SiC crystals for wafers with DRYVAC, SCREWLINE SP and TRIVAC B; Edwards names the crystal growing of Si, III-V, SiC and diamond with GXS, EXS and EDS.

Why dust- and corrosion-resistant vacuum pumps for crystal furnaces?

For crystal growing and casting Atlas Copco names dust- and corrosion-resistant dry vacuum pumps. Dust and vapours get from the hot furnace into the suction line; a separator or filter upstream of the pump retains the dust, and the pump itself has to tolerate the rest.

Which vacuum pump for silicon crystal casting?

Atlas Copco names crystal growing and casting together and, for these, dust- and corrosion-resistant dry vacuum pumps as well as a low-gas environment for pure silicon; for silicon crystal pulling Atlas Copco names the DWS VSD+.

Which vacuum pump for crystallisation in chemistry?

Edwards lists crystallisation on its chemical process engineering page with the LR1A, LR1C and LR1D liquid ring vacuum pumps, without describing it. What is meant there is the crystallisation of a substance out of a solution under vacuum ā€“ a different process from growing single crystals for wafers.

What to do if dust from the furnace gets into the vacuum pump?

A separator or filter between furnace and pump retains dust. For crystal growing Atlas Copco names dust- and corrosion-resistant dry vacuum pumps, and according to Busch the vacuum keeps the process chamber free of contamination.

A single pump or a central vacuum system?

A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group ā€“ more under Central Vacuum.

Does Ehrler & Beck also supply spare parts and service?

Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.

Which pump suits your process?

Tell us the application, the medium and the volume ā€“ we advise you on selection, spare parts and service.

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