Application
Vacuum pumps for crystal growing
In crystal growing a single large crystal grows, in the case of silicon from the melt – silicon and silicon carbide are grown for wafers, and according to Edwards also III-V semiconductors and diamond. For this the growing furnace is evacuated: according to Busch, the vacuum keeps the process chamber free of contamination, and according to Atlas Copco it creates a low-gas environment for pure silicon. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it – 178 models from 4 manufacturers.
Compare 178 modelsHow it works
- 178Models
- 13Series
- 4Manufacturers
- 3Industries
Touch the points: each part of the system explains itself.
In short
Crystal growing: the key facts
- PurityAtlas Copco names a low-gas environment for pure silicon; according to Busch, the vacuum keeps the process chamber free of contamination.
- MaterialsLeybold names silicon and SiC crystals for wafers, Edwards Si, III-V, SiC and diamond.
- Dry pumpsFor crystal growing and casting Atlas Copco names dust- and corrosion-resistant dry vacuum pumps, and for silicon crystal pulling the DWS VSD+.
- DesignThe design depends on the furnace and the process; we determine the right pump together with you, based on furnace volume, heating-up time and gas flow.
Operating principle
How it works: Crystal growing
The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.
- EvacuationThe furnace with crucible and raw material is evacuated; the vacuum removes the air and, according to Busch, keeps the chamber free of contamination.
- MeltingThe heater melts the silicon in the crucible – according to Atlas Copco in a low-gas environment for pure silicon.
- GrowingThe crystal grows from the melt and is pulled; the pump maintains the vacuum throughout growth. According to Leybold, this is how Si and SiC crystals for wafers are produced.
Vacuum and sizing
Crystal growing: how much vacuum is needed
What the manufacturers say about pressure, pumping speed and sizing.
Which vacuum
Leybold says that Si and SiC crystals for wafers are pulled and grown under vacuum, Atlas Copco names a low-gas environment for pure silicon, Busch a process chamber that the vacuum keeps free of contamination.
Which pumping speed
The design depends on the furnace volume, the heating-up time and the gas flow during growth.
What determines the design
Atlas Copco names dust- and corrosion-resistant dry vacuum pumps – dust from the furnace and purity of the melt are the requirements. Alongside the dry DRYVAC and SCREWLINE SP, Leybold also names the oil-lubricated TRIVAC B, Edwards GXS, EXS and EDS, Busch COBRA and PANDA/PUMA.
Technology
Crystal growing: the vacuum pumps the manufacturers name
Listed are the series the manufacturer itself names for this application. “Show only …” sets the filter of the product overview.
Screw vacuum pumps
99 models · 70–7,385 m³/h
Liquid ring vacuum pumps
33 models · 20–8,100 m³/h
Roots vacuum pumps
26 models · 250–12,000 m³/h
Oil-lubricated rotary vane vacuum pumps
20 models · 2.7–79 m³/h
Product overview
Crystal growing: all 178 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Atlas Copco DWS VSD+ series 6 models
DWS 160 VSD+Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1DWS 250 VSD+Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1DWS 450 VSD+Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3DWS 750 VSD+Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3DWS 160/1750 VSD+Pumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 1DWS 250/2600 VSD+Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 1Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants 
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants 
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants 
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants 
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants 
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants 
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants 
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants Busch COBRA Semicon series 22 models
COBRA DS 0080 GPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 2
COBRA BA 0100 CPumping speed 85 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 3
COBRA BC 0101 GPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
COBRA DS 0160 GPumping speed 140 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
COBRA DS 0700 GPumping speed 500 m³/h 50 Hz610 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 0601 GPumping speed 550 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 3 kW 50 Hz3.3 kW 60 HzVariants 1
COBRA DS 0600 EPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2
COBRA DS 1000 GPumping speed 775 m³/h 50 Hz960 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 1001 GPumping speed 870 m³/h 50 Hz870 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
COBRA BC 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 1
COBRA DS 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.4 kW 60 HzVariants 2
COBRA DS 2000 GPumping speed 1,365 m³/h 50 Hz1,640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 2
COBRA DS 1800 APumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8.4 kW 50 Hz8.4 kW 60 HzVariants 1
COBRA DS 1800 A XPumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 10.6 kW 50 Hz10.6 kW 60 HzVariants 1
COBRA DS 3010 GPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3161 CPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3181 CPumping speed 3,500 m³/h 50 Hz3,500 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 33.5 kW 50 Hz33.5 kW 60 HzVariants 
COBRA DS 5161 BPumping speed 4,300 m³/h 50 Hz4,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 
COBRA DS 8161 FPumping speed 6,000 m³/h 50 Hz6,000 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 9161 BPumping speed 6,220 m³/h 50 Hz6,220 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 35 kW 50 Hz35 kW 60 HzVariants 
COBRA DS 8162 FPumping speed 7,200 m³/h 50 Hz7,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 50 kW 50 Hz50 kW 60 HzVariants 
COBRA DS 8163 BPumping speed 7,385 m³/h 50 Hz7,385 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 65 kW 50 Hz65 kW 60 HzVariants Busch PANDA/PUMA series 26 models
PANDA WV 0250 CPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure Rated motor power 1 kW 50 Hz1.2 kW 60 HzVariants PANDA WZ 0250 BPumping speed 263 m³/h 50 Hz315 m³/h 60 HzUltimate pressure Rated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants PANDA WV 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants 4PUMA WY 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0500 D2Pumping speed 520 m³/h 50 Hz620 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants PANDA WZ 0500 BPumping speed 525 m³/h 50 Hz630 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0700 DPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PUMA WY 0700 CPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1000 D2Pumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PANDA WV 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 5PANDA WZ 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WY 1250 CPumping speed 1,250 m³/h 50 Hz1,500 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1250 D2Pumping speed 1,295 m³/h 50 Hz1,555 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants PANDA WV 1800 APumping speed 1,600 m³/h 50 Hz1,920 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 5PUMA WY 2000 CPumping speed 2,010 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PUMA WP 2000 D2Pumping speed 2,020 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants PANDA WV 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants 5PANDA WZ 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PANDA WV 2200 APumping speed 2,155 m³/h 50 Hz2,585 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants PUMA WY 3600 APumping speed 3,600 m³/h 50 Hz3,600 m³/h 60 HzUltimate pressure Rated motor power 15 kW 50 Hz15 kW 60 HzVariants PANDA WV 4500 BPumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 4PUMA WP 4500 B2Pumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants PUMA WP 5400 APumping speed 6,480 m³/h 50 Hz6,480 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WP 8100 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants PUMA WY 8000 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WG 9600Pumping speed 12,000 m³/h 50 Hz12,000 m³/h 60 HzUltimate pressure 130 mbarRated motor power Variants Edwards EDS series 3 models
Edwards EDS200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 10Edwards EDS300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10Edwards EDS480Pumping speed 460 m³/h 50 Hz460 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5Edwards EXS series 11 models
Edwards EXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2Edwards EXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2Edwards EXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3Edwards EXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3Edwards EXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 2Edwards EXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2Edwards EXS450/2600Pumping speed 2,130 m³/h 50 Hz2,130 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 2Edwards EXS750/2600Pumping speed 2,280 m³/h 50 Hz2,280 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards EXS450/4200Pumping speed 3,180 m³/h 50 Hz3,180 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 2Edwards EXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards EXS750/8000Pumping speed 5,760 m³/h 50 Hz5,760 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards GXS series 10 models
Edwards GXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 12Edwards GXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10Edwards GXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 8Edwards GXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 12Edwards GXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 11Edwards GXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 10Edwards GXS450/2600Pumping speed 2,200 m³/h 50 Hz2,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9Edwards GXS750/2600Pumping speed 2,300 m³/h 50 Hz2,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 8Edwards GXS450/4200Pumping speed 3,026 m³/h 50 Hz3,026 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9Edwards GXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 10Edwards LR1A series 12 models
Edwards LR1A700Pumping speed 601.2 m³/h 50 Hz698.4 m³/h 60 HzUltimate pressure 33 mbarRated motor power 18.5 kW 50 Hz30 kW 60 HzVariants 3Edwards LR1A800Pumping speed 748.8 m³/h 50 Hz889.2 m³/h 60 HzUltimate pressure 33 mbarRated motor power 22 kW 50 Hz30 kW 60 HzVariants 3Edwards LR1A1200Pumping speed 1,080 m³/h 50 Hz1,321.2 m³/h 60 HzUltimate pressure 33 mbarRated motor power 37 kW 50 Hz45 kW 60 HzVariants 3Edwards LR1A1300Pumping speed 1,231.2 m³/h 50 Hz1,450.8 m³/h 60 HzUltimate pressure 33 mbarRated motor power 37 kW 50 Hz55 kW 60 HzVariants 3Edwards LR1A1600Pumping speed 1,699.2 m³/h 50 Hz2,001.6 m³/h 60 HzUltimate pressure 33 mbarRated motor power 45 kW 50 Hz75 kW 60 HzVariants 3Edwards LR1A2500Pumping speed 2,451.6 m³/h 50 Hz2,779.2 m³/h 60 HzUltimate pressure 33 mbarRated motor power 75 kW 50 Hz90 kW 60 HzVariants 3Edwards LR1A4000Pumping speed 3,996 m³/h 50 Hz3,996 m³/h 60 HzUltimate pressure 33 mbarRated motor power 110 kW 50 Hz110 kW 60 HzVariants 3Edwards LR1A5000Pumping speed 4,536 m³/h 50 Hz4,536 m³/h 60 HzUltimate pressure 33 mbarRated motor power 132 kW 50 Hz132 kW 60 HzVariants 3Edwards LR1A5500Pumping speed 5,292 m³/h 50 Hz5,292 m³/h 60 HzUltimate pressure 33 mbarRated motor power 160 kW 50 Hz160 kW 60 HzVariants 3Edwards LR1A6500Pumping speed 6,012 m³/h 50 Hz6,012 m³/h 60 HzUltimate pressure 33 mbarRated motor power 160 kW 50 Hz160 kW 60 HzVariants 3Edwards LR1A8000Pumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure 33 mbarRated motor power 250 kW 50 Hz250 kW 60 HzVariants 3Edwards LR1A500Pumping speed Ultimate pressure 33 mbarRated motor power 15 kW 50 Hz22 kW 60 HzVariants 2Edwards LR1C series 9 models
Edwards LR1C030Pumping speed 27 m³/h 50 Hz31 m³/h 60 HzUltimate pressure 33 mbarRated motor power 0.81 kW 50 Hz1.27 kW 60 HzVariants 3Edwards LR1C050Pumping speed 50.4 m³/h 50 Hz61.2 m³/h 60 HzUltimate pressure 33 mbarRated motor power 1.45 kW 50 Hz2.55 kW 60 HzVariants 3Edwards LR1C080Pumping speed 79.2 m³/h 50 Hz93.6 m³/h 60 HzUltimate pressure 33 mbarRated motor power 2.35 kW 50 Hz3.45 kW 60 HzVariants 3Edwards LR1C110Pumping speed 111.6 m³/h 50 Hz129.6 m³/h 60 HzUltimate pressure 33 mbarRated motor power 3.85 kW 50 Hz6.3 kW 60 HzVariants 3Edwards LR1C150Pumping speed 165.6 m³/h 50 Hz194.4 m³/h 60 HzUltimate pressure 33 mbarRated motor power 4 kW 50 Hz5.5 – 6.3 kW 60 HzVariants 6Edwards LR1C200Pumping speed 230.4 m³/h 50 Hz270 m³/h 60 HzUltimate pressure 33 mbarRated motor power 5.5 kW 50 Hz7.5 – 8.2 kW 60 HzVariants 6Edwards LR1C300Pumping speed 280.8 m³/h 50 Hz331.2 m³/h 60 HzUltimate pressure 33 mbarRated motor power 7.5 kW 50 Hz11 – 12.9 kW 60 HzVariants 6Edwards LR1C400Pumping speed 399.6 m³/h 50 Hz471.6 m³/h 60 HzUltimate pressure 33 mbarRated motor power 11 kW 50 Hz18.5 kW 60 HzVariants 6Edwards LR1C500Pumping speed 500.4 m³/h 50 Hz579.6 m³/h 60 HzUltimate pressure 33 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 6Edwards LR1D series 12 models
Edwards LR1D0035Pumping speed 20 m³/h 50 Hz28.8 m³/h 60 HzUltimate pressure 30 mbarRated motor power 0.9 kW 50 Hz1.12 kW 60 HzVariants 4Edwards LR1D0060Pumping speed 42.6 m³/h 50 Hz45.7 m³/h 60 HzUltimate pressure 30 mbarRated motor power 1.94 kW 50 Hz2.24 kW 60 HzVariants 4Edwards LR1D0100Pumping speed 69.5 m³/h 50 Hz90.1 m³/h 60 HzUltimate pressure 30 mbarRated motor power 2.8 kW 50 Hz4.1 kW 60 HzVariants 4Edwards LR1D0135Pumping speed 101.1 m³/h 50 Hz130.5 m³/h 60 HzUltimate pressure 30 mbarRated motor power 3.06 kW 50 Hz4.1 kW 60 HzVariants 4Edwards LR1D0170Pumping speed 117.7 m³/h 50 Hz148.2 m³/h 60 HzUltimate pressure 30 mbarRated motor power 3.8 kW 50 Hz4.1 kW 60 HzVariants 4Edwards LR1D0260Pumping speed 168.5 m³/h 50 Hz208 m³/h 60 HzUltimate pressure 30 mbarRated motor power 5.78 kW 50 Hz7.46 kW 60 HzVariants 4Edwards LR1D0340Pumping speed 252.7 m³/h 50 Hz301.6 m³/h 60 HzUltimate pressure 30 mbarRated motor power 7.8 kW 50 Hz11.19 kW 60 HzVariants 2Edwards LR1D0510Pumping speed 336 m³/h 50 Hz393.2 m³/h 60 HzUltimate pressure 30 mbarRated motor power 10.82 kW 50 Hz14.92 kW 60 HzVariants 2Edwards LR1D0770Pumping speed 476.7 m³/h 50 Hz578.7 m³/h 60 HzUltimate pressure 30 mbarRated motor power 14.92 kW 50 Hz18.65 kW 60 HzVariants 3Edwards LR1D0940Pumping speed 729.6 m³/h 50 Hz880.5 m³/h 60 HzUltimate pressure 30 mbarRated motor power 23.13 kW 50 Hz29.84 kW 60 HzVariants 3Edwards LR1D1280Pumping speed 951.5 m³/h 50 Hz1,193.4 m³/h 60 HzUltimate pressure 30 mbarRated motor power 28.35 kW 50 Hz41.03 kW 60 HzVariants 3Edwards LR1D2040Pumping speed 1,340 m³/h 50 Hz1,644.1 m³/h 60 HzUltimate pressure 30 mbarRated motor power 42.15 kW 50 Hz60.43 kW 60 HzVariants 3Leybold DRYVAC series 9 models
DRYVAC DV 200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 500Pumping speed 380 – 460 m³/h 50 Hz380 – 460 m³/h 60 HzUltimate pressure 0.01 – 0.05 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5
DRYVAC DV 650Pumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 33DRYVAC DV 650 FPPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 8
DRYVAC DV 800Pumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 11DRYVAC DV 800 FP-rPumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 4
DRYVAC DV 1200Pumping speed 1,250 m³/h 50 Hz1,250 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 3DRYVAC DV 1600Pumping speed 1,600 m³/h 50 Hz1,600 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 39.2 kW 50 Hz39.2 kW 60 HzVariants 1Leybold SCREWLINE series 2 models
SCREWLINE SP 630Pumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 6SCREWLINE SP 630 FPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 11Leybold TRIVAC series 20 models
TRIVAC D 2,5 EPumping speed 2.7 m³/h 50 Hz3.3 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.28 – 0.29 kW 50 Hz0.3 – 0.31 kW 60 HzVariants 3
TRIVAC D 4 BPumping speed 4.2 m³/h 50 Hz5 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3TRIVAC D 4 TPumping speed 4.3 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.25 – 0.57 kW 50 Hz0.25 – 0.66 kW 60 HzVariants 2TRIVAC D 5 LPumping speed 5.1 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2TRIVAC D 8 TPumping speed 8.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.37 – 0.66 kW 60 HzVariants 2
TRIVAC D 8 BPumping speed 8.5 m³/h 50 Hz10.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3TRIVAC D 12 LPumping speed 12 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2TRIVAC D 16 TPumping speed 16.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.55 – 0.75 kW 60 HzVariants 2
TRIVAC D 16 BPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 6
TRIVAC D 16 BCSPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 25 BPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 4
TRIVAC D 25 BCSPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2TRIVAC D 30 TPumping speed 30.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 40 BPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
TRIVAC D 40 BCSPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2TRIVAC D 40 LPumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 4TRIVAC D 63 LPumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 4
TRIVAC D 65 BPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1
TRIVAC D 65 BCSPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2TRIVAC D 90 LPumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 3No model matches these filters.
Atlas Copco DWS VSD+ series 6 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Busch PANDA/PUMA series 26 models
Edwards EDS series 3 models
Edwards EXS series 11 models
Edwards GXS series 10 models
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
Leybold DRYVAC series 9 models
Leybold SCREWLINE series 2 models
Leybold TRIVAC series 20 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Industries
Crystal growing: where the manufacturers name it
The manufacturers list these uses on their own pages.
Solar and photovoltaics
Atlas Copco, Busch and Leybold name crystal growing for solar and photovoltaics: Atlas Copco crystal growing and casting with dust- and corrosion-resistant dry pumps and silicon crystal pulling with DWS VSD+, Busch the growing of silicon crystals with COBRA and PANDA (16 products), Leybold the pulling and growing of Si and SiC crystals for wafers with DRYVAC, SCREWLINE SP and TRIVAC B.
Mechanical engineering and manufacturing
Among its industrial solutions Edwards names the crystal growing of Si, III-V, SiC and diamond with GXS, EXS and EDS.
Chemicals
On its chemical process engineering page Edwards lists crystallisation with the LR1A, LR1C and LR1D liquid ring vacuum pumps – without a description; what is meant there is the crystallisation of a substance from solution, not the growing of a single crystal.
Frequently asked questions
Crystal growing: frequently asked questions
Why is silicon for wafers pulled under vacuum?
According to Atlas Copco, pure silicon needs a low-gas environment; according to Busch, the vacuum keeps the process chamber free of contamination. Leybold names the pulling and growing of Si and SiC crystals for wafers under vacuum. With no air and no foreign gases in the furnace, no contamination gets into the melt and the growing crystal.
How much vacuum does crystal growing need?
Atlas Copco speaks of a low-gas environment, Leybold of crystals under vacuum; the design depends on the furnace and the process.
Which vacuum pump for silicon crystal pulling?
Atlas Copco names the DWS VSD+ and, in general, dust- and corrosion-resistant dry vacuum pumps; Busch COBRA and PANDA, and on its product page COBRA Industry, COBRA Semicon and PANDA/PUMA; Leybold DRYVAC, SCREWLINE SP and TRIVAC B (plus POWER BOOST and VARODRY); Edwards GXS, EXS and EDS.
Oil-free or oil-lubricated for crystal growing?
Atlas Copco explicitly names dry vacuum pumps that are dust- and corrosion-resistant. Edwards with GXS, EXS and EDS and Busch with COBRA and PANDA/PUMA also name dry pumps. Alongside the dry DRYVAC and SCREWLINE SP, Leybold also lists the oil-lubricated rotary vane vacuum pump TRIVAC B – so both are named.
Which vacuum pump for SiC crystal growing?
Leybold names Si and SiC crystals for wafers with DRYVAC, SCREWLINE SP and TRIVAC B; Edwards names the crystal growing of Si, III-V, SiC and diamond with GXS, EXS and EDS.
Why dust- and corrosion-resistant vacuum pumps for crystal furnaces?
For crystal growing and casting Atlas Copco names dust- and corrosion-resistant dry vacuum pumps. Dust and vapours get from the hot furnace into the suction line; a separator or filter upstream of the pump retains the dust, and the pump itself has to tolerate the rest.
Which vacuum pump for silicon crystal casting?
Atlas Copco names crystal growing and casting together and, for these, dust- and corrosion-resistant dry vacuum pumps as well as a low-gas environment for pure silicon; for silicon crystal pulling Atlas Copco names the DWS VSD+.
Which vacuum pump for crystallisation in chemistry?
Edwards lists crystallisation on its chemical process engineering page with the LR1A, LR1C and LR1D liquid ring vacuum pumps, without describing it. What is meant there is the crystallisation of a substance out of a solution under vacuum – a different process from growing single crystals for wafers.
What to do if dust from the furnace gets into the vacuum pump?
A separator or filter between furnace and pump retains dust. For crystal growing Atlas Copco names dust- and corrosion-resistant dry vacuum pumps, and according to Busch the vacuum keeps the process chamber free of contamination.
A single pump or a central vacuum system?
A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group – more under Central Vacuum.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the volume – we advise you on selection, spare parts and service.
