COBRA DS 0080 GPumping speed 70 m³/hUltimate pressure 0.03 mbar
COBRA DS 0600 E Version as listed in the Busch shop, motor and equipment on request
The Busch COBRA DS 0600 E is a dry screw vacuum pump with a nominal pumping speed of 600 m³/h and an ultimate pressure of 0.01 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 600 m³/h 50 Hz 600 m³/h 60 Hz
- Ultimate pressure 0.01 mbar
- Rated motor power 15 kW 50 Hz 15 kW 60 Hz
| Variant | Part number |
|---|---|
| Version as listed in the Busch shop, motor and equipment on request (selected) | 1361800185 |
| Version as listed in the Busch shop, motor and equipment on request | 1361800189 |
Busch COBRA DS 0600 E – dry screw vacuum pump
The Busch COBRA DS 0600 E is a dry screw vacuum pump. The nominal pumping speed is 600 m³/h, the ultimate pressure 0.01 mbar. Nominal motor rating 15 kW.Features
- Powerful: screw design, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
- Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling, high hydrogen throughput
- Compact: space-saving design with directly mounted canned motor
Typical applications
Busch lists: Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, polysilicon etching, PECVD and others).Accessories
- Tantalum coating for harsh operating conditions
Versions of the Busch COBRA DS 0600 E
The 2 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 600 |
|---|---|
| Pumping speed 60Hz | 600 |
| Ultimate pressure | 0.01 |
| Rated motor power 50Hz | 15 |
| Rated motor power 60Hz | 15 |
| Weight | 745 |
| Length | 165.4 |
| Width | 60 |
| Height | 74.7 |
| Inlet connection flange | DN 100 |
| Outlet connection flange | DN 63 |
| Noise level | 70 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 600 m³/h |
| Ultimate pressure | 0.01 mbar |
| Rated motor power | 15 kW |
| Nominal speed | 3600 min⁻¹ |
| Power consumption at ultimate pressure | 9 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | < 70 dB(A) |
| Water consumption | 6 l/min |
| Nitrogen consumption | 0 – 200 l/min |
| Dimensions (L × W × H) | 1654 × 600 × 747 mm |
| Weight (approx.) | 745 kg |
| Gas inlet | DN 100 |
| Gas outlet | DN 63 |
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