Industry
Vacuum pumps for semiconductors, electronics and displays
Wafer fabrication, coating, display production and PCB assembly need vacuum in very different ranges: from particle-free process vacuum for etching and deposition and load-lock chambers to the vacuum for pick & place and handling. Pfeiffer Vacuum and Busch name dry backing pumps for this, Becker and Elmo Rietschle pumps for assembly, drying and extraction, Atlas Copco pumps for the house vacuum of the fab. Below you can see which series the manufacturers themselves name for these tasks – 516 models from 7 manufacturers.
Compare 516 modelsSee the applications
- 516Models
- 62Series
- 7Manufacturers
- 8Applications
In short
Semiconductors, electronics and displays: vacuum pumps – the key facts
- Process vacuumFor wafer etching Pfeiffer Vacuum names 10⁻²–10⁻³ hPa, for stripping and ashing about 1 hPa at 600–1,800 (3,000) m³/h and for ALD 10⁻¹–5 mbar at 1,800–4,500 m³/h.
- Dry backing pumpsFor wafer fabrication Pfeiffer Vacuum names dry pumps – multi-stage Roots pumps, screw and scroll vacuum pumps – because the by-products of many processes are corrosive or powdery. Busch names the COBRA Semicon series for this.
- House vacuumFor the central vacuum of IC manufacturing Atlas Copco states 100–400 mbar abs. and 2,000–8,000 m³/h, over 12,000 m³/h in large fabs – around the clock, with heat recovery of up to 75 %.
- Pick & placeFor the electronics industry Becker names precise vacuum with low pulsation and vibration, above all for pick & place, and a case study with 20,000 maintenance-free operating hours.
Applications
Semiconductors, electronics and displays: what vacuum pumps are used for
For each application: what the vacuum does and which series the manufacturers name for it. The information comes from the manufacturers’ own pages.
Etching, stripping and ion implantation
In dielectric, conductor and polysilicon etching, in stripping and ashing and in ALE, the processes work at 10⁻²–10⁻³ hPa according to Pfeiffer Vacuum, with dry backing pumps and turbo pumps; in stripping at about 1 hPa with 600–1,800 (3,000) m³/h. Busch names the COBRA Semicon series for polysilicon etching and ion implantation; Pfeiffer Vacuum names ACP and TORRI for implantation, A4 and COBRA BC/DS for etching, and for EUV lithography particle-free vacuum with a high H₂ flow in the light source (ACP, HiLobe).
- BuschCOBRA Semicon
- Pfeiffer VacuumA4, ACP, TORRI, A 100/200 L, COBRA Semicon Pfeiffer Vacuum also names HiLobe
Thin-film deposition: CVD, PECVD, ALD and PVD
Pfeiffer Vacuum names the A4 series for PECVD/SACVD, PVD, ALD, LPCVD/diffusion and MBE and points out that the by-products are corrosive or powdery; for ALD Pfeiffer states 10⁻¹–5 mbar at 1,800–4,500 m³/h, for MBE about 10⁻¹¹ hPa. Busch names the COBRA Semicon series for ALD, PECVD, PVD and LPCVD/diffusion and COBRA DS for CVD/PECVD layers such as anti-reflective coatings. For decorative, optical and glass coating both manufacturers name further series – Busch COBRA Industry, R5, PANDA/PUMA and MINK, Pfeiffer ACP, DuoVane, HiLobe, HiScroll and TORRI.
- BuschCOBRA Semicon, COBRA Industry Busch names R5, PANDA/PUMA and MINK for decorative, optical and glass coating
- Pfeiffer VacuumA4, ACP, TORRI, COBRA Semicon Pfeiffer Vacuum also names DuoVane, HiLobe and HiScroll
Load-lock and transfer chambers
According to Pfeiffer Vacuum, load locks stay particle-free under vacuum and must be pumped down quickly; named are A 100 L and A 200 L with 100 and 200 m³/h respectively for 10⁻¹–10⁻² hPa, as well as A4, ACP, TORRI and COBRA DS. For load-lock chambers Busch names COBRA (NX, DS, NC), PANDA WV and PUMA WY, so that wafers are transferred in without a pressure surge.
- BuschCOBRA Industry, COBRA Semicon Busch also names PANDA WV and PUMA WY
- Pfeiffer VacuumA 100/200 L, A4, ACP, TORRI, COBRA Semicon
Pick & place, chip mounters and handling
Vacuum holds the suction cups during automated lifting and transfer. Becker names PCB assembly with chip mounters, automatic loading and unloading machines and gantry systems for this, and KVT, VT and SV as series; a case study names 20,000 maintenance-free operating hours. For vacuum lifters Becker gives SV with 195–1,250 m³/h and −290 to −440 mbar, for robotic pick & place the claw vacuum pumps BCV (BCV 100: 50 mbar, BCV 300: 150 mbar). Elmo Rietschle names pick & place for electronics with the G, L and V families.
- BeckerKVT, KVX, VT, VX, VTLF, VXLF, SV, VASF, BCV
- Elmo RietschleG-BH1, G-BH2, G-BH7, G-BH9, G-BH100, L-BL2, L-BV2, L-BV3, L-BV5, L-BV7, V-VGD, V-VTN, V-VCB, V-VCA/VCE, V-VCS, V-VCX, V-KTR, V-VTR G, L and V families according to Elmo Rietschle’s electronics page, not assigned to the individual application
House vacuum for assembly, transport, cutting and testing
Atlas Copco names central vacuum for all handling steps of IC manufacturing – assembly, transport, cutting, moulding, testing – with 100–400 mbar abs. and 2,000–8,000 m³/h, over 12,000 m³/h in large fabs. Named are GHS VSD+, DZS VSD+ (Class 0) and LRP VSD+, clean and stable house vacuum around the clock, heat recovery of up to 75 % and precise pressure control for several lines. Leybold lists electronics manufacturing for NOVADRY NDi with central vacuum below 100 mbar.
More on House vacuum for assembly, transport, cutting and testing →
Vacuum drying of components and assemblies
Elmo Rietschle and Becker list the drying of electronic components without describing it further; Becker also names drying and impregnating in autoclaves and the evacuation of drying plants. As a general rule, according to Becker, water evaporates under vacuum from as low as 20–40 °C (named for VADS and U). For vacuum drying Elmo Rietschle names versions with high water vapour tolerance (V-VC 40–150, 40–180 m³/h) and, for short evacuation times, the S-VSI 300 with up to 380 m³/h and 0.1 mbar (abs.).
Inspection and metrology: CD-SEM, analysis, leak detection
For low-vibration wafer metrology with CD-SEM Pfeiffer Vacuum names 10⁻⁵–10⁻⁷ hPa and ACP and HiScroll as backing pumps, and A 100/200 L, ACP and TORRI for inspection and metrology as a whole. According to Pfeiffer, residual gas analysis measures the gas composition in the vacuum (contamination, leaks, outgassing) at no more than 10⁻⁴ hPa at the analyser. In helium leak detection, a leak detector locates helium sprayed on from outside at about 10⁻⁷–10⁻⁹ mbar·l/s; as backing pumps Pfeiffer names ACP, DuoVane and HiScroll.
- Pfeiffer VacuumACP, A 100/200 L, TORRI Pfeiffer Vacuum also names HiScroll and DuoVane
More on Inspection and metrology: CD-SEM, analysis, leak detection →
PCB manufacturing: fixing, soldering, wet processes
Becker names fixing in semiconductor test processes, solder fume extraction and blowing in and blowing off in PCB wet processes, without describing them. As a general rule, according to Becker, vacuum clamping holds parts in place so that they can be machined precisely, and when mixtures of gas, liquid and solids are extracted, a separator protects the pump. Edwards lists PCB manufacturing and electronics testing for scroll vacuum pumps.
- BeckerVT, VX, KVT, KVX, VTLF, VXLF, O, U, U4, VADS, SV, VASF series from Becker’s vacuum clamping page
- Edwardslists PCB manufacturing and electronics testing for scroll vacuum pumps without a series
More on PCB manufacturing: fixing, soldering, wet processes →
Manufacturers and series
Semiconductors, electronics and displays: 7 manufacturers, 62 series
Listed are the series the manufacturer itself names for this industry. “Show only …” sets the filter of the product overview.
Atlas Copco
59 models · 65–36,600 m³/h
Becker
85 models · 1.9–2,000 m³/h
Busch
174 models · 3–12,000 m³/h
Edwards
12 models · 82–3,450 m³/h
Elmo Rietschle
118 models · 10–5,740 m³/h
- V-VGD2
- V-VTN3
- V-VCB2
- V-VCA/VCE2
- G-BH1001
- V-VCS13
- V-VCX7
- V-KTR4
- V-VTR2
- S-VSI1
- S-SVT11
- G-BH125
- G-BH29
- G-BH715
- G-BH91
- L-BL27
- L-BV24
- L-BV31
- L-BV55
- L-BV73
Leybold
9 models · 63–950 m³/h
Pfeiffer Vacuum
59 models · 1.25–13,540 m³/h
Product overview
Semiconductors, electronics and displays: all 516 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Atlas Copco AWL series 11 models
AWL 4000Pumping speed 4,290 m³/h 50 HzUltimate pressure 160 mbarRated motor power 160 kW 50 HzVariants AWL 5500Pumping speed 5,580 m³/h 50 HzUltimate pressure 160 mbarRated motor power 185 kW 50 HzVariants AWL 7000Pumping speed 6,900 m³/h 50 HzUltimate pressure 160 mbarRated motor power 185 kW 50 HzVariants 8AWL 9500Pumping speed 9,200 m³/h 50 HzUltimate pressure 160 mbarRated motor power 200 kW 50 HzVariants 8AWL 12500Pumping speed 12,500 m³/h 50 HzUltimate pressure 160 mbarRated motor power 280 kW 50 HzVariants 8AWL 15000Pumping speed 15,000 m³/h 50 HzUltimate pressure 160 mbarRated motor power 315 kW 50 HzVariants 9AWL 17500Pumping speed 17,400 m³/h 50 HzUltimate pressure 160 mbarRated motor power 400 kW 50 HzVariants 8AWL 21500Pumping speed 21,300 m³/h 50 HzUltimate pressure 160 mbarRated motor power 450 kW 50 HzVariants 8AWL 26000Pumping speed 25,800 m³/h 50 HzUltimate pressure 160 mbarRated motor power 560 kW 50 HzVariants 6AWL 30000Pumping speed 30,000 m³/h 50 HzUltimate pressure 160 mbarRated motor power 630 kW 50 HzVariants 4AWL 37500Pumping speed 36,600 m³/h 50 HzUltimate pressure 160 mbarRated motor power 800 kW 50 HzVariants Atlas Copco DHS VSD+ series 1 model
DHS 3000 VSD+Pumping speed 3,044 m³/h 50 Hz3,044 m³/h 60 HzUltimate pressure 350 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 4Atlas Copco DWS VSD+ series 6 models
DWS 160 VSD+Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1DWS 250 VSD+Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1DWS 450 VSD+Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3DWS 750 VSD+Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3DWS 160/1750 VSD+Pumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 1DWS 250/2600 VSD+Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 1Atlas Copco DZS series 8 models
DZS 065APumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 50 mbarRated motor power 1.8 kW 50 Hz2.2 kW 60 HzVariants 12DZS 065APPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure Rated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 5DZS 150APumping speed 150 m³/h 50 Hz180 m³/h 60 HzUltimate pressure 50 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 12DZS 150APPumping speed 150 m³/h 50 Hz180 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz15 kW 60 HzVariants 6DZS 300APPumping speed 238 m³/h 50 Hz280 m³/h 60 HzUltimate pressure Rated motor power 19 kW 50 Hz22 kW 60 HzVariants 6DZS 300APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 140 – 200 mbarRated motor power 6.2 kW 50 Hz7.5 kW 60 HzVariants 12DZS 500 VPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 9.2 kW 50 Hz11 kW 60 HzVariants 8DZS 1000 VPumping speed 950 m³/h 50 Hz1,140 m³/h 60 HzUltimate pressure 200 mbarRated motor power 18.5 kW 50 Hz22 kW 60 HzVariants 8Atlas Copco DZS VSD+ series 5 models
DZS 100 VSD+Pumping speed 105 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 50 mbarRated motor power 3 kW 50 Hz3 kW 60 HzVariants 3DZS 200 VSD+Pumping speed 189 m³/h 50 Hz189 m³/h 60 HzUltimate pressure 50 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 3DZS 400 VSD+Pumping speed 398 m³/h 50 Hz398 m³/h 60 HzUltimate pressure 140 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3DZS 600 VSD+Pumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 2DZS 1200 VSD+Pumping speed 1,140 m³/h 50 Hz1,140 m³/h 60 HzUltimate pressure 200 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 2Atlas Copco GHS VSD+ series 21 models
GHS 350 VSD+Pumping speed 400 m³/h 50 Hz400 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 29GHS 402 VSD+Pumping speed 467 m³/h 50 Hz467 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 4GHS 585 VSD+Pumping speed 560 m³/h 50 Hz560 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 30GHS 602 VSD+Pumping speed 640 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 7.5 – 11 kW 50 Hz7.5 – 11 kW 60 HzVariants 4GHS 730 VSD+Pumping speed 730 m³/h 50 Hz730 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 30GHS 752 VSD+Pumping speed 805 m³/h 50 Hz805 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 11 – 15 kW 50 Hz11 – 15 kW 60 HzVariants 4GHS 900 VSD+Pumping speed 870 m³/h 50 Hz870 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 32GHS 902 VSD+Pumping speed 917 m³/h 50 Hz917 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 15 – 18.5 kW 50 Hz15 – 18.5 kW 60 HzVariants 4GHS 1002 VSD+Pumping speed 1,039 m³/h 50 Hz1,039 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants GHS 1202 VSD+Pumping speed 1,172 m³/h 50 Hz1,172 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9GHS 1300 VSD+Pumping speed 1,250 – 1,615 m³/h 50 Hz1,250 – 1,615 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 18 – 22 kW 50 Hz18 – 22 kW 60 HzVariants 33GHS 1402 VSD+Pumping speed 1,383 m³/h 50 Hz1,383 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 9GHS 1602 VSD+Pumping speed 1,581 m³/h 50 Hz1,581 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 9GHS 1600 VSD+Pumping speed 1,590 – 1,811 m³/h 50 Hz1,590 – 1,811 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 28 – 30 kW 50 Hz28 – 30 kW 60 HzVariants 33GHS 2002 VSD+Pumping speed 1,771 m³/h 50 Hz1,771 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 9GHS 1900 VSD+Pumping speed 1,810 m³/h 50 Hz1,810 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 21GHS 2700 VSD+Pumping speed 2,674 m³/h 50 Hz2,674 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 45 kW 50 Hz45 kW 60 HzVariants 8GHS 3400 VSD+Pumping speed 3,268 m³/h 50 Hz3,268 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 8GHS 3800 VSD+Pumping speed 3,724 m³/h 50 Hz3,724 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 9GHS 4600 VSD+Pumping speed 4,494 m³/h 50 Hz4,494 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 75 kW 50 Hz75 kW 60 HzVariants 9GHS 5400 VSD+Pumping speed 5,136 m³/h 50 Hz5,136 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 90 kW 50 Hz90 kW 60 HzVariants 9Atlas Copco GVS VSD+ series 4 models
GVS 80 VSD+Pumping speed 78 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1
GVS 120 VSD+Pumping speed 117 m³/h 50 Hz117 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 1GVS 255 VSD+Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1GVS 400 VSD+Pumping speed 351 m³/h 50 Hz351 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 1Atlas Copco LRP VSD+ series 3 models
LRP 700 VSD+Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 25 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 10LRP 900 VSD+Pumping speed 940 m³/h 50 Hz940 m³/h 60 HzUltimate pressure 25 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 10LRP 1000 VSD+Pumping speed 1,050 m³/h 50 Hz1,050 m³/h 60 HzUltimate pressure 25 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 10Becker BCV series 7 models
BCV 100Pumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 50 mbarRated motor power 2.2 – 3 kW 50 Hz2.2 – 3 kW 60 HzVariants 4BCV 150Pumping speed 150 m³/h 50 Hz180 m³/h 60 HzUltimate pressure 100 mbarRated motor power 3 – 4 kW 50 Hz3 – 4 kW 60 HzVariants 4BCV 300Pumping speed 275 m³/h 50 Hz325 m³/h 60 HzUltimate pressure 150 mbarRated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 4BCV 400Pumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 9.2 kW 50 Hz11.8 kW 60 HzVariants 5BCV 400 FDPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants 4BCV 500Pumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 9.2 kW 50 Hz11.8 kW 60 HzVariants 5BCV 500 FDPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 9.2 kW 50 Hz11.8 kW 60 HzVariants 5Becker KVT series 4 models
KVT 3.60Pumping speed 55 m³/h 50 Hz66 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6
KVT 3.80Pumping speed 67 m³/h 50 Hz78.5 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6
KVT 3.100Pumping speed 98 m³/h 50 Hz112 m³/h 60 HzUltimate pressure 100 mbarRated motor power 3 kW 50 Hz3.6 kW 60 HzVariants 8
KVT 3.140Pumping speed 129 m³/h 50 Hz154 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4 kW 50 Hz4.5 – 4.8 kW 60 HzVariants 7Becker KVX series 4 models
KVX 3.60Pumping speed 55 m³/h 50 Hz66 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6KVX 3.80Pumping speed 67 m³/h 50 Hz78.5 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6KVX 3.100Pumping speed 98 m³/h 50 Hz112 m³/h 60 HzUltimate pressure 100 mbarRated motor power 3 kW 50 Hz3.6 kW 60 HzVariants 8KVX 3.140Pumping speed 129 m³/h 50 Hz154 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4 kW 50 Hz4.5 – 4.8 kW 60 HzVariants 7Becker O series 6 models
O 6.4Pumping speed 4 m³/h 50 Hz4.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.12 kW 50 Hz0.15 kW 60 HzVariants O 6.8Pumping speed 8 m³/h 50 Hz9.6 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.3 kW 50 Hz0.36 kW 60 HzVariants O 5.10 (XL)Pumping speed 10.5 m³/h 50 Hz12.5 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.45 – 0.66 kW 60 HzVariants 6O 5.16 (XL)Pumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 6O 5.21 (XL)Pumping speed 23.5 m³/h 50 Hz27 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 6O 5.25 (XL K)Pumping speed 26 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 6Becker RBP series 3 models
RBP 500Pumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 2.2 – 3 kW 50 Hz2.2 – 3 kW 60 HzVariants 5RBP 1000Pumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure Rated motor power 4 – 5.5 kW 50 Hz4 – 5.5 kW 60 HzVariants 5RBP 2000Pumping speed 2,000 m³/h 50 Hz2,400 m³/h 60 HzUltimate pressure Rated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 5Becker SV series 16 models
SV 130/2Pumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure Rated motor power 0.55 – 1.1 kW 50 Hz0.66 – 1.3 kW 60 HzVariants 11
SV 200/2Pumping speed 90 m³/h 50 Hz110 m³/h 60 HzUltimate pressure Rated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.8 kW 60 HzVariants 9SV 201/2Pumping speed 90 m³/h 50 Hz110 m³/h 60 HzUltimate pressure Rated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.8 kW 60 HzVariants 9SV 130/1Pumping speed 130 m³/h 50 Hz160 m³/h 60 HzUltimate pressure Rated motor power 0.55 – 1.5 kW 50 Hz0.66 – 1.8 kW 60 HzVariants 19SV 300/2Pumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure Rated motor power 2.2 – 3 kW 50 Hz2.65 – 3.6 kW 60 HzVariants 7SV 200/1Pumping speed 180 m³/h 50 Hz230 m³/h 60 HzUltimate pressure Rated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.8 kW 60 HzVariants 9SV 201/1Pumping speed 190 m³/h 50 Hz230 m³/h 60 HzUltimate pressure Rated motor power 1.1 – 2.2 kW 50 Hz1.3 – 2.65 kW 60 HzVariants 12
SV 400/2Pumping speed 195 m³/h 50 Hz235 m³/h 60 HzUltimate pressure Rated motor power 3 – 5.5 kW 50 Hz3.6 – 6.6 kW 60 HzVariants 12SV 500/2Pumping speed 260 m³/h 50 Hz305 m³/h 60 HzUltimate pressure Rated motor power 3 – 5.5 kW 50 Hz3.6 – 6.6 kW 60 HzVariants 12SV 300/1Pumping speed 325 m³/h 50 Hz390 m³/h 60 HzUltimate pressure Rated motor power 2.2 – 4 kW 50 Hz2.65 – 4.8 kW 60 HzVariants 11
SV 700/2Pumping speed 375 m³/h 50 Hz435 m³/h 60 HzUltimate pressure Rated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 3SV 400/1Pumping speed 390 m³/h 50 Hz470 m³/h 60 HzUltimate pressure Rated motor power 3 – 5.5 kW 50 Hz3.6 – 6.6 kW 60 HzVariants 12SV 1100/2Pumping speed 510 m³/h 50 Hz605 m³/h 60 HzUltimate pressure Rated motor power 7.5 – 11 kW 50 Hz9 – 13.2 kW 60 HzVariants 6SV 500/1Pumping speed 510 m³/h 50 Hz610 m³/h 60 HzUltimate pressure Rated motor power 4 – 7.5 kW 50 Hz4.8 – 9 kW 60 HzVariants 12SV 700/1Pumping speed 750 m³/h 50 Hz900 m³/h 60 HzUltimate pressure Rated motor power 5.5 – 11 kW 50 Hz6.6 – 13.2 kW 60 HzVariants 10SV 1100/1Pumping speed 1,050 m³/h 50 Hz1,250 m³/h 60 HzUltimate pressure Rated motor power 7.5 – 15 kW 50 Hz9 – 18 kW 60 HzVariants 9Becker U4 series 4 models
U 4.400 F/KPumping speed 435 m³/h 50 Hz508 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 7U 4.400 SA/KPumping speed 435 m³/h 50 Hz508 m³/h 60 HzUltimate pressure 3 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 7
U 4.630 F/KPumping speed 624 m³/h 50 Hz732 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 15 kW 50 Hz18 kW 60 HzVariants 4U 4.630 SA/KPumping speed 624 m³/h 50 Hz732 m³/h 60 HzUltimate pressure 3 mbarRated motor power 15 kW 50 Hz18 kW 60 HzVariants 4Becker U series 8 models
U 5.40 (XL K)Pumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 1 mbarRated motor power 1.1 kW 50 Hz1.35 kW 60 HzVariants 5U 5.45Pumping speed 45 m³/h 50 Hz54 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 – 1.8 kW 50 Hz1.5 – 1.8 kW 60 HzVariants 4U 5.65 (XL K)Pumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 – 1.8 kW 50 Hz1.5 – 1.8 kW 60 HzVariants 4
U 5.71Pumping speed 70 m³/h 50 Hz84 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 5
U 5.101Pumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.2 kW 50 Hz2.2 – 2.6 kW 60 HzVariants 4
U 5.166Pumping speed 165 m³/h 50 Hz198 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 3 – 4 kW 50 Hz3.6 – 4.8 kW 60 HzVariants 8
U 5.201Pumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 – 5.5 kW 50 Hz4.5 – 6.6 kW 60 HzVariants 10U 5.301Pumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 – 7.5 kW 50 Hz6.6 – 9 kW 60 HzVariants 9Becker VADS series 3 models
VADS 250Pumping speed 290 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants VADS 1500+ VerdichterPumping speed 1,230 m³/h 50 Hz1,230 m³/h 60 HzUltimate pressure Rated motor power Variants VADS 1500+Pumping speed 1,380 m³/h 50 Hz1,380 m³/h 60 HzUltimate pressure 200 mbarRated motor power Variants Becker VARIAIR RV series 1 model
VARIAIR RV 2.1944/10Pumping speed 1,570 m³/h 50 Hz1,570 m³/h 60 HzUltimate pressure Rated motor power Variants Becker VASF series 6 models
VASF 2.50/2Pumping speed 24 m³/h 50 Hz24 m³/h 60 HzUltimate pressure Rated motor power Variants VASF 2.80/2Pumping speed 45 m³/h 50 Hz45 m³/h 60 HzUltimate pressure Rated motor power Variants VASF 2.50/1Pumping speed 48 m³/h 50 Hz48 m³/h 60 HzUltimate pressure Rated motor power Variants VASF 2.120/2Pumping speed 71 m³/h 50 Hz71 m³/h 60 HzUltimate pressure Rated motor power Variants VASF 2.80/1Pumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure Rated motor power Variants VASF 2.120/1Pumping speed 143 m³/h 50 Hz143 m³/h 60 HzUltimate pressure Rated motor power Variants Becker VATP series 1 model
VATP 1600Pumping speed 1,570 m³/h 50 Hz1,570 m³/h 60 HzUltimate pressure Rated motor power Variants Becker VTLF series 6 models
VTLF 2.200Pumping speed 178 m³/h 50 Hz218 m³/h 60 HzUltimate pressure 200 mbarRated motor power 4 kW 50 Hz4.8 kW 60 HzVariants 4
VTLF 2.250Pumping speed 244 m³/h 50 Hz286 m³/h 60 HzUltimate pressure 200 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 5
VTLF 2.250 SKPumping speed 247 m³/h 50 Hz295 m³/h 60 HzUltimate pressure 100 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 4
VTLF 2.360Pumping speed 351 m³/h 50 Hz402 m³/h 60 HzUltimate pressure 250 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 4
VTLF 2.400Pumping speed 390 m³/h 50 Hz460 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 – 11 kW 50 Hz9 – 13.2 kW 60 HzVariants 5
VTLF 2.500Pumping speed 495 m³/h 50 Hz570 m³/h 60 HzUltimate pressure 250 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 4Becker VT series 7 models
VT 4.2Pumping speed 1.9 m³/h 50 Hz2.3 m³/h 60 HzUltimate pressure 400 mbarRated motor power 0.09 kW 50 Hz0.105 kW 60 HzVariants 1
VT 4.4Pumping speed 4.1 m³/h 50 Hz4.7 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.18 kW 50 Hz0.21 – 0.22 kW 60 HzVariants 2
VT 4.8Pumping speed 8 m³/h 50 Hz9.1 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.3 – 0.37 kW 50 Hz0.35 – 0.44 kW 60 HzVariants 3
VT 4.10Pumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.37 kW 50 Hz0.44 – 0.45 kW 60 HzVariants 3
VT 4.16Pumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.55 kW 50 Hz0.66 – 0.7 kW 60 HzVariants 4
VT 4.25Pumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.75 – 0.8 kW 50 Hz0.9 – 1 kW 60 HzVariants 5
VT 4.40Pumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 150 mbarRated motor power 1.1 – 1.3 kW 50 Hz1.1 – 1.5 kW 60 HzVariants 5Becker VXLF series 5 models
VXLF 2.200Pumping speed 178 m³/h 50 Hz218 m³/h 60 HzUltimate pressure 200 mbarRated motor power 4 kW 50 Hz4.8 kW 60 HzVariants 4VXLF 2.250Pumping speed 244 m³/h 50 Hz286 m³/h 60 HzUltimate pressure 200 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 5VXLF 2.250 SKPumping speed 247 m³/h 50 Hz295 m³/h 60 HzUltimate pressure 100 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 4VXLF 2.400Pumping speed 390 m³/h 50 Hz460 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 – 11 kW 50 Hz9 – 13.2 kW 60 HzVariants 5VXLF 2.500Pumping speed 495 m³/h 50 Hz570 m³/h 60 HzUltimate pressure 250 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 4Becker VX series 4 models
VX 4.10Pumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 100 mbarRated motor power 0.37 kW 50 Hz0.44 – 0.45 kW 60 HzVariants 3VX 4.16Pumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 100 mbarRated motor power 0.55 kW 50 Hz0.66 – 0.7 kW 60 HzVariants 4VX 4.25Pumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 100 mbarRated motor power 0.75 – 0.8 kW 50 Hz0.9 – 1 kW 60 HzVariants 5VX 4.40Pumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 100 mbarRated motor power 1.1 – 1.3 kW 50 Hz1.1 – 1.5 kW 60 HzVariants 5Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants 
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants 
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants 
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants 
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants 
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants 
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants 
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants Busch COBRA Semicon series 22 models
COBRA DS 0080 GPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 2
COBRA BA 0100 CPumping speed 85 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 3
COBRA BC 0101 GPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
COBRA DS 0160 GPumping speed 140 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
COBRA DS 0700 GPumping speed 500 m³/h 50 Hz610 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 0601 GPumping speed 550 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 3 kW 50 Hz3.3 kW 60 HzVariants 1
COBRA DS 0600 EPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2
COBRA DS 1000 GPumping speed 775 m³/h 50 Hz960 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 1001 GPumping speed 870 m³/h 50 Hz870 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
COBRA BC 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 1
COBRA DS 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.4 kW 60 HzVariants 2
COBRA DS 2000 GPumping speed 1,365 m³/h 50 Hz1,640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 2
COBRA DS 1800 APumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8.4 kW 50 Hz8.4 kW 60 HzVariants 1
COBRA DS 1800 A XPumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 10.6 kW 50 Hz10.6 kW 60 HzVariants 1
COBRA DS 3010 GPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3161 CPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3181 CPumping speed 3,500 m³/h 50 Hz3,500 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 33.5 kW 50 Hz33.5 kW 60 HzVariants 
COBRA DS 5161 BPumping speed 4,300 m³/h 50 Hz4,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 
COBRA DS 8161 FPumping speed 6,000 m³/h 50 Hz6,000 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 9161 BPumping speed 6,220 m³/h 50 Hz6,220 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 35 kW 50 Hz35 kW 60 HzVariants 
COBRA DS 8162 FPumping speed 7,200 m³/h 50 Hz7,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 50 kW 50 Hz50 kW 60 HzVariants 
COBRA DS 8163 BPumping speed 7,385 m³/h 50 Hz7,385 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 65 kW 50 Hz65 kW 60 HzVariants Busch MINK series 32 models
MINK MB 0018 APumping speed 18 m³/h 50 Hz18 m³/h 60 HzUltimate pressure 600 mbarRated motor power 0.5 kW 50 Hz0.5 kW 60 HzVariants 2
MINK MV 0040 E ECOTORQUEPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MI 2124 BVPumping speed 50 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 20 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 
MINK MV 0060 E ECOTORQUEPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MM 0084 APumping speed 62 m³/h 50 Hz75 m³/h 60 HzUltimate pressure 60 mbarRated motor power 1.5 kW 50 Hz1.7 kW 60 HzVariants MINK MM 1104 BVPumping speed 62 m³/h 50 Hz75 m³/h 60 HzUltimate pressure 60 mbarRated motor power 1.5 kW 50 Hz1.7 kW 60 HzVariants 10
MINK MM 1104 CVMPumping speed 62 m³/h 50 HzUltimate pressure 400 mbarRated motor power 1.3 kW 50 HzVariants 
MINK MM 0104 APumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 60 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 
MINK MM 1144 BVPumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 60 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 9
MINK MV 0080 E ECOTORQUEPumping speed 80 m³/h 50 Hz80 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MM 0142 APumping speed 110 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 40 mbarRated motor power 3 kW 50 Hz3.4 kW 60 HzVariants 
MINK MM 1102 BVPumping speed 110 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 60 mbarRated motor power 3 kW 50 Hz3.4 kW 60 HzVariants 6
MINK MM 1102 CVMPumping speed 110 m³/h 50 HzUltimate pressure 400 mbarRated motor power 2.2 kW 50 HzVariants 
MINK MI 2122 BVPumping speed 120 m³/h 50 Hz145 m³/h 60 HzUltimate pressure 20 mbarRated motor power 5.1 kW 50 Hz6.8 kW 60 HzVariants 
MINK MM 0182 APumping speed 140 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 40 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 
MINK MM 1142 BVPumping speed 140 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 60 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 13
MINK MM 1324 AVPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 60 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2
MINK MM 1202 AVPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 11
MINK MM 1252 AVPumping speed 245 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 100 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 8MINK MW 0332 BPumping speed 280 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.8 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
MINK MV 0312 BPumping speed 290 m³/h 50 Hz345 m³/h 60 HzUltimate pressure 150 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 4
MINK MM 1322 AVPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 150 mbarRated motor power 6 kW 50 Hz8 kW 60 HzVariants 10
MINK MV 0310 BPumping speed 345 m³/h 50 Hz345 m³/h 60 HzUltimate pressure 150 mbarRated motor power 6 kW 50 Hz6 kW 60 HzVariants MINK MV 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 100 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 
MINK MM 1402 AVPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 3
MINK MV 0502 BPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 2
MINK MV 0500 BPumping speed 470 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
MINK MM 1502 AVPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 5
MINK MV 0602 BPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 3
MINK MV 0600 BPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
MINK MV 1202 BPumping speed 950 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 200 mbarRated motor power 18.5 kW 50 Hz22 kW 60 HzVariants 3MINK MV 1200 B ECOTORQUEPumping speed 1,150 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 200 mbarRated motor power 25 kW 50 Hz25 kW 60 HzVariants Busch PANDA/PUMA series 26 models
PANDA WV 0250 CPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure Rated motor power 1 kW 50 Hz1.2 kW 60 HzVariants PANDA WZ 0250 BPumping speed 263 m³/h 50 Hz315 m³/h 60 HzUltimate pressure Rated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants PANDA WV 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants 4PUMA WY 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0500 D2Pumping speed 520 m³/h 50 Hz620 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants PANDA WZ 0500 BPumping speed 525 m³/h 50 Hz630 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0700 DPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PUMA WY 0700 CPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1000 D2Pumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PANDA WV 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 5PANDA WZ 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WY 1250 CPumping speed 1,250 m³/h 50 Hz1,500 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1250 D2Pumping speed 1,295 m³/h 50 Hz1,555 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants PANDA WV 1800 APumping speed 1,600 m³/h 50 Hz1,920 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 5PUMA WY 2000 CPumping speed 2,010 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PUMA WP 2000 D2Pumping speed 2,020 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants PANDA WV 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants 5PANDA WZ 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PANDA WV 2200 APumping speed 2,155 m³/h 50 Hz2,585 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants PUMA WY 3600 APumping speed 3,600 m³/h 50 Hz3,600 m³/h 60 HzUltimate pressure Rated motor power 15 kW 50 Hz15 kW 60 HzVariants PANDA WV 4500 BPumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 4PUMA WP 4500 B2Pumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants PUMA WP 5400 APumping speed 6,480 m³/h 50 Hz6,480 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WP 8100 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants PUMA WY 8000 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WG 9600Pumping speed 12,000 m³/h 50 Hz12,000 m³/h 60 HzUltimate pressure 130 mbarRated motor power Variants Busch R5 series 58 models
R5 PB 0003 DPumping speed 3 m³/h 50 Hz3.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants R5 PB 0004 CPumping speed 4 m³/h 50 Hz4.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants R5 PB 0008 CPumping speed 8 m³/h 50 Hz9.6 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.35 kW 50 Hz0.45 kW 60 HzVariants 
R5 KB 0010 EPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants 1R5 KD 0012 APumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants R5 RA 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1R5 RC 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1R5 KB 0016 EPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants 1R5 KD 0020 APumping speed 16 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants R5 RA 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1R5 RC 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1R5 KB 0020 DPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 1
R5 RB 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 2R5 RC 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants R5 KD 0025 APumping speed 22 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants R5 KB 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 1
R5 RA 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1 kW 50 Hz1.2 kW 60 HzVariants 3R5 KB 0040 DPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1R5 RA 0040 FPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.4 kW 50 Hz1.7 kW 60 HzVariants 3R5 RE 0040 CPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz2.2 kW 60 HzVariants R5 RA 0063 FPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 3R5 RE 0063 CPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3 kW 60 HzVariants R5 RA 0100 FPumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.7 kW 50 Hz3.4 kW 60 HzVariants 3R5 RA 0155 APumping speed 150 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants R5 RA 0165 DPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3R5 RA 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.8 kW 60 HzVariants 
R5 RD 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2R5 RA 0165 D ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0200 A ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0205 DPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3R5 RA 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants R5 RD 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 1R5 RA 0205 D ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0240 A ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0255 DPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants 3R5 RD 0300 APumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 1R5 RA 0255 D ECOTORQUEPumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0305 DPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 8.3 kW 50 Hz10 kW 60 HzVariants 3R5 RA 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants R5 RD 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 2R5 RA 0305 D ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0400 CPumping speed 410 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 3R5 RA 0520 APumping speed 430 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz12.5 kW 60 HzVariants 1R5 RA 0400 C ECOTORQUEPumping speed 480 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0502 CPumping speed 510 m³/h 50 Hz590 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 1R5 RA 0520 A ECOTORQUEPumping speed 520 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0502 C ECOTORQUEPumping speed 580 m³/h 50 Hz580 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0600 A ECOTORQUEPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 0630 CPumping speed 630 m³/h 50 Hz760 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 2R5 RA 0630 C ECOTORQUEPumping speed 745 m³/h 50 Hz745 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0840 A ECOTORQUEPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 0840 B PLUSPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 1000 BPumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 22 kW 50 Hz30 kW 60 HzVariants 1R5 RA 1000 A PLUSPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants R5 RA 1000 B ECOTORQUEPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power Variants R5 RA 1600 BPumping speed 1,600 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz37 kW 60 HzVariants 1R5 RA 1600 A PLUSPumping speed 1,800 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants Edwards GV series 2 models
Edwards Drystar GV80Pumping speed 82 m³/h 50 Hz94 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 7Edwards GV110Pumping speed 110 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 6 × 10-3 mbarRated motor power 4 – 5.5 kW 50 Hz4 – 5.5 kW 60 HzVariants 3Edwards GXS series 10 models
Edwards GXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 12Edwards GXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10Edwards GXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 8Edwards GXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 12Edwards GXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 11Edwards GXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 10Edwards GXS450/2600Pumping speed 2,200 m³/h 50 Hz2,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9Edwards GXS750/2600Pumping speed 2,300 m³/h 50 Hz2,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 8Edwards GXS450/4200Pumping speed 3,026 m³/h 50 Hz3,026 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9Edwards GXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 10Elmo Rietschle G-BH1 series 25 models
G-BH1 2BH1 100Pumping speed Ultimate pressure Rated motor power 0.2 – 0.25 kW 50 Hz0.23 – 0.29 kW 60 HzVariants 5G-BH1 2BH1 200Pumping speed Ultimate pressure Rated motor power 0.25 kW 50 Hz0.29 – 0.32 kW 60 HzVariants 4G-BH1 2BH1 300Pumping speed Ultimate pressure Rated motor power 0.25 – 0.55 kW 50 Hz0.29 – 0.63 kW 60 HzVariants 8G-BH1 2BH1 310Pumping speed Ultimate pressure Rated motor power 0.55 – 0.7 kW 50 Hz0.63 – 0.83 kW 60 HzVariants 4G-BH1 2BH1 330Pumping speed Ultimate pressure Rated motor power 0.25 – 0.7 kW 50 Hz0.29 – 0.83 kW 60 HzVariants 9G-BH1 2BH1 400Pumping speed Ultimate pressure Rated motor power 0.7 – 1.3 kW 50 Hz0.83 – 1.6 kW 60 HzVariants 13G-BH1 2BH1 410Pumping speed Ultimate pressure Rated motor power 1.75 – 2.5 kW 50 Hz2 – 3 kW 60 HzVariants 10G-BH1 2BH1 430Pumping speed Ultimate pressure Rated motor power 0.95 – 1.3 kW 50 Hz1.1 – 1.6 kW 60 HzVariants 10G-BH1 2BH1 490Pumping speed Ultimate pressure Rated motor power 0.95 kW 50 Hz1.1 kW 60 HzVariants 5G-BH1 2BH1 500Pumping speed Ultimate pressure Rated motor power 0.95 – 2.5 kW 50 Hz1.1 – 3 kW 60 HzVariants 20G-BH1 2BH1 510Pumping speed Ultimate pressure Rated motor power 3.45 – 4.6 kW 50 Hz4 – 5.3 kW 60 HzVariants 10G-BH1 2BH1 530Pumping speed Ultimate pressure Rated motor power 1.3 – 2.5 kW 50 Hz1.6 – 3 kW 60 HzVariants 15G-BH1 2BH1 600Pumping speed Ultimate pressure Rated motor power 1.75 – 4.6 kW 50 Hz2 – 5.3 kW 60 HzVariants 23G-BH1 2BH1 610Pumping speed Ultimate pressure Rated motor power 2.2 – 8.6 kW 50 Hz2.55 – 9.9 kW 60 HzVariants 32G-BH1 2BH1 630Pumping speed Ultimate pressure Rated motor power 2.5 – 4.6 kW 50 Hz3 – 5.3 kW 60 HzVariants 18G-BH1 2BH1 640Pumping speed Ultimate pressure Rated motor power 4 – 8.6 kW 50 Hz4.6 – 9.9 kW 60 HzVariants 15G-BH1 2BH1 690Pumping speed Ultimate pressure Rated motor power 2.5 – 3.45 kW 50 Hz3 – 4 kW 60 HzVariants 12G-BH1 2BH1 800Pumping speed Ultimate pressure Rated motor power 4 – 8.6 kW 50 Hz4.6 – 9.9 kW 60 HzVariants 29G-BH1 2BH1 810Pumping speed Ultimate pressure Rated motor power 7.5 – 17.3 kW 50 Hz8.6 – 19.9 kW 60 HzVariants 18G-BH1 2BH1 830Pumping speed Ultimate pressure Rated motor power 4 – 8.6 kW 50 Hz4.6 – 9.9 kW 60 HzVariants 29G-BH1 2BH1 900Pumping speed Ultimate pressure Rated motor power 8.5 – 21.3 kW 50 Hz9.8 – 24.5 kW 60 HzVariants 34G-BH1 2BH1 910Pumping speed Ultimate pressure Rated motor power 12.6 – 25.3 kW 50 Hz14.5 – 29 kW 60 HzVariants 20G-BH1 2BH1 930Pumping speed Ultimate pressure Rated motor power 8.5 – 21.3 kW 50 Hz9.8 – 24.5 kW 60 HzVariants 32G-BH1 2BH1 940Pumping speed Ultimate pressure Rated motor power 17.3 – 25.3 kW 50 Hz19.9 – 29 kW 60 HzVariants 12G-BH1 2BH1 943Pumping speed Ultimate pressure Rated motor power 17.3 – 25.3 kW 50 Hz19.9 – 29 kW 60 HzVariants 15Elmo Rietschle G-BH2 series 9 models
G-BH2 2BH2 0360-1Pumping speed Ultimate pressure Rated motor power 2.5 – 6.3 kW 50 Hz3 – 7.3 kW 60 HzVariants 16G-BH2 2BH2 0360-2Pumping speed Ultimate pressure Rated motor power 4.6 – 12.6 kW 50 Hz5.3 – 14.5 kW 60 HzVariants 17G-BH2 2BH2 0360-3Pumping speed Ultimate pressure Rated motor power 6.3 – 12.6 kW 50 Hz7.3 – 14.5 kW 60 HzVariants 12G-BH2 2BH2 0540-1Pumping speed Ultimate pressure Rated motor power 4.6 – 8.6 kW 50 Hz5.3 – 9.9 kW 60 HzVariants 13G-BH2 2BH2 0540-2Pumping speed Ultimate pressure Rated motor power 8.6 – 17.3 kW 50 Hz9.9 – 19.9 kW 60 HzVariants 13G-BH2 2BH2 0540-3Pumping speed Ultimate pressure Rated motor power 12.6 – 21.3 kW 50 Hz14.5 – 24.5 kW 60 HzVariants 12G-BH2 2BH2 0780-1Pumping speed Ultimate pressure Rated motor power 6.3 – 17.3 kW 50 Hz7.3 – 19.9 kW 60 HzVariants 17G-BH2 2BH2 0780-2Pumping speed Ultimate pressure Rated motor power 12.6 – 25.3 kW 50 Hz14.5 – 29 kW 60 HzVariants 16G-BH2 2BH2 0780-3Pumping speed Ultimate pressure Rated motor power 17.3 – 25.3 kW 50 Hz19.9 – 28.5 kW 60 HzVariants 12Elmo Rietschle G-BH7 series 15 models
G-BH7 2BH7 210Pumping speed Ultimate pressure Rated motor power 0.55 – 1 kW 50 Hz0.63 – 1.1 kW 60 HzVariants 8G-BH7 2BH7 220Pumping speed Ultimate pressure Rated motor power 0.81 – 1.8 kW 50 Hz0.94 – 2 kW 60 HzVariants 10G-BH7 2BH7 310Pumping speed Ultimate pressure Rated motor power 0.55 – 1.3 kW 50 Hz0.63 – 1.6 kW 60 HzVariants 11G-BH7 2BH7 320Pumping speed Ultimate pressure Rated motor power 1.3 – 2.5 kW 50 Hz1.6 – 3 kW 60 HzVariants 9G-BH7 2BH7 410Pumping speed Ultimate pressure Rated motor power 1.3 – 1.8 kW 50 Hz1.6 – 2 kW 60 HzVariants 6G-BH7 2BH7 420Pumping speed Ultimate pressure Rated motor power 1.8 – 3.45 kW 50 Hz2 – 4 kW 60 HzVariants 12G-BH7 2BH7 510Pumping speed Ultimate pressure Rated motor power 1.8 – 2.5 kW 50 Hz2 – 3 kW 60 HzVariants 6G-BH7 2BH7 520Pumping speed Ultimate pressure Rated motor power 2.5 – 4.6 kW 50 Hz3 – 5.3 kW 60 HzVariants 9G-BH7 2BH7 530Pumping speed Ultimate pressure Rated motor power 4.6 kW 50 Hz5.3 kW 60 HzVariants 3G-BH7 2BH7 610-0APumping speed Ultimate pressure Rated motor power 2.5 – 3.5 kW 50 Hz3 – 4 kW 60 HzVariants 10G-BH7 2BH7 610-3NPumping speed Ultimate pressure Rated motor power 2.5 – 4.6 kW 50 Hz3 – 5.3 kW 60 HzVariants 15G-BH7 2BH7 620-0APumping speed Ultimate pressure Rated motor power 3.45 – 6.3 kW 50 Hz4 – 7.3 kW 60 HzVariants 15G-BH7 2BH7 620-0NPumping speed Ultimate pressure Rated motor power 3.45 – 6.3 kW 50 Hz4 – 7.3 kW 60 HzVariants 15G-BH7 2BH7 630-0APumping speed Ultimate pressure Rated motor power 6.3 – 8.6 kW 50 Hz7.3 – 9.9 kW 60 HzVariants 10G-BH7 2BH7 630-0NPumping speed Ultimate pressure Rated motor power 6.3 – 8.6 kW 50 Hz7.3 – 9.9 kW 60 HzVariants 10Elmo Rietschle G-BH9 series 1 model
G-BH9 2BH9 2300Pumping speed Ultimate pressure Rated motor power 17.3 – 21.3 kW 50 Hz19.9 – 24.5 kW 60 HzVariants 5Elmo Rietschle G-BH100 series 1 model
G-BH100 2BH1 002Pumping speed 35 m³/h 50 HzUltimate pressure Rated motor power Variants 2Elmo Rietschle L-BL2 series 7 models
L-BL2 2BL2 041Pumping speed Ultimate pressure Rated motor power 0.85 kW 50 Hz1.15 kW 60 HzVariants 4L-BL2 2BL2 061Pumping speed Ultimate pressure Rated motor power 1.4 kW 50 Hz1.8 kW 60 HzVariants 4L-BL2 2BL2 101Pumping speed Ultimate pressure Rated motor power 2.4 kW 50 Hz3.5 kW 60 HzVariants 4L-BL2 2BL2 141Pumping speed Ultimate pressure Rated motor power 3.4 kW 50 Hz4.6 kW 60 HzVariants 4L-BL2 2BL2 251Pumping speed Ultimate pressure Rated motor power 4.2 kW 50 Hz5.6 kW 60 HzVariants 4L-BL2 2BL2 281Pumping speed Ultimate pressure Rated motor power 5.5 kW 50 Hz7.2 kW 60 HzVariants 4L-BL2 2BL2 341Pumping speed Ultimate pressure Rated motor power 7 kW 50 Hz9.7 kW 60 HzVariants 4Elmo Rietschle L-BV2 series 4 models
L-BV2 2BV2 060Pumping speed Ultimate pressure 33 mbarRated motor power 0.88 kW 50 Hz1.25 kW 60 HzVariants 5L-BV2 2BV2 061Pumping speed Ultimate pressure 33 mbarRated motor power 1.5 kW 50 Hz2 kW 60 HzVariants 5L-BV2 2BV2 070Pumping speed Ultimate pressure 33 mbarRated motor power 2.6 kW 50 Hz3.5 – 3.7 kW 60 HzVariants 5L-BV2 2BV2 071Pumping speed Ultimate pressure 33 mbarRated motor power 4 kW 50 Hz6.1 kW 60 HzVariants 5Elmo Rietschle L-BV3 series 1 model
L-BV3 2BV3 151Pumping speed Ultimate pressure 33 mbarRated motor power 0.3 kW 50 Hz0.4 kW 60 HzVariants 2Elmo Rietschle L-BV5 series 5 models
L-BV5 2BV5 110Pumping speed Ultimate pressure 33 mbarRated motor power 4.2 kW 50 Hz5.6 kW 60 HzVariants 4L-BV5 2BV5 111Pumping speed Ultimate pressure 33 mbarRated motor power 5.5 kW 50 Hz7.2 kW 60 HzVariants 4L-BV5 2BV5 121Pumping speed Ultimate pressure 33 mbarRated motor power 7 kW 50 Hz9.7 kW 60 HzVariants 4L-BV5 2BV5 131Pumping speed Ultimate pressure 33 mbarRated motor power 10.5 kW 50 Hz14.7 kW 60 HzVariants 4L-BV5 2BV5 161Pumping speed Ultimate pressure 33 mbarRated motor power 12.4 kW 50 Hz16 kW 60 HzVariants 4Elmo Rietschle L-BV7 series 3 models
L-BV7 2BV7 060Pumping speed Ultimate pressure 33 mbarRated motor power 0.85 kW 50 Hz1.15 kW 60 HzVariants 4L-BV7 2BV7 070Pumping speed Ultimate pressure 33 mbarRated motor power 2.4 kW 50 Hz3.5 kW 60 HzVariants 4L-BV7 2BV7 071Pumping speed Ultimate pressure 33 mbarRated motor power 3.4 kW 50 Hz4.6 kW 60 HzVariants 4Elmo Rietschle S-SVT series 11 models
S-SVT 600Pumping speed 605 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants S-SVT 800Pumping speed 735 m³/h 50 HzUltimate pressure Rated motor power 11 kW 50 HzVariants S-SVT 1000Pumping speed 905 m³/h 50 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 HzVariants S-SVT 1500Pumping speed 1,386 m³/h 50 HzUltimate pressure Rated motor power 22 kW 50 HzVariants S-SVT 1800Pumping speed 1,672 m³/h 50 HzUltimate pressure Rated motor power 30 kW 50 HzVariants S-SVT 2000Pumping speed 1,936 m³/h 50 HzUltimate pressure Rated motor power 37 kW 50 HzVariants S-SVT 3000Pumping speed 3,135 m³/h 50 HzUltimate pressure Rated motor power 45 kW 50 HzVariants S-SVT 4000Pumping speed 3,830 m³/h 50 HzUltimate pressure Rated motor power 55 kW 50 HzVariants S-SVT 4500Pumping speed 4,310 m³/h 50 HzUltimate pressure Rated motor power 75 kW 50 HzVariants S-SVT 5400Pumping speed 5,335 m³/h 50 HzUltimate pressure Rated motor power 75 kW 50 HzVariants S-SVT 6000Pumping speed 5,740 m³/h 50 HzUltimate pressure Rated motor power 90 kW 50 HzVariants Elmo Rietschle S-VSI series 1 model
S-VSI 301Pumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power Variants Elmo Rietschle V-KTR series 4 models
V-KTR 61Pumping speed 58 m³/h 50 Hz69 m³/h 60 HzUltimate pressure Rated motor power 3 kW 50 Hz3.6 kW 60 HzVariants V-KTR 81Pumping speed 66 m³/h 50 Hz82 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.8 kW 60 HzVariants V-KTR 101Pumping speed 98 m³/h 50 Hz118 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants V-KTR 141Pumping speed 135 m³/h 50 Hz159 m³/h 60 HzUltimate pressure Rated motor power 7.5 kW 50 Hz9 kW 60 HzVariants Elmo Rietschle V-VCA/VCE series 2 models
Elmo Rietschle V-VCB series 2 models
Elmo Rietschle V-VCS series 13 models
V-VCS 40Pumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 50Pumping speed 50 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 75Pumping speed 70 m³/h 50 Hz84 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 100Pumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 150Pumping speed 150 m³/h 50 Hz180 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 200Pumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 300Pumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 400Pumping speed 400 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 500Pumping speed 550 m³/h 50 Hz660 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 700Pumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 900Pumping speed 830 m³/h 50 Hz995 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power Variants V-VCS 1100Pumping speed 1,100 m³/h 50 Hz1,320 m³/h 60 HzUltimate pressure 1 mbarRated motor power Variants V-VCS 1300Pumping speed 1,280 m³/h 50 Hz1,535 m³/h 60 HzUltimate pressure 1 mbarRated motor power Variants Elmo Rietschle V-VCX series 7 models
V-VCX 40Pumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants V-VCX 50Pumping speed 50 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants V-VCX 75Pumping speed 70 m³/h 50 Hz84 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants V-VCX 100Pumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants V-VCX 150Pumping speed 150 m³/h 50 Hz180 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants V-VCX 200Pumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants V-VCX 300Pumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 3 mbarRated motor power Variants Elmo Rietschle V-VGD series 2 models
Elmo Rietschle V-VTN series 3 models
V-VTN 16Pumping speed 17 m³/h 50 Hz20.5 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.55 kW 50 Hz0.63 kW 60 HzVariants V-VTN 26Pumping speed 27 m³/h 50 Hz32 m³/h 60 HzUltimate pressure 150 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants V-VTN 41Pumping speed 42 m³/h 50 Hz50.4 m³/h 60 HzUltimate pressure 150 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants Elmo Rietschle V-VTR series 2 models
Leybold CLAWVAC series 5 models
CLAWVAC CP 65 BPumping speed 65 m³/h 50 Hz79 m³/h 60 HzUltimate pressure 50 mbarRated motor power 1.8 – 2.2 kW 50 Hz2.2 kW 60 HzVariants 8
CLAWVAC CP 150 BPumping speed 152 m³/h 50 Hz184 m³/h 60 HzUltimate pressure 50 mbarRated motor power 3.7 – 4 kW 50 Hz3.7 kW 60 HzVariants 8
CLAWVAC CP 300 BPumping speed 295 m³/h 50 Hz347 m³/h 60 HzUltimate pressure 140 – 200 mbarRated motor power 6.2 – 7.5 kW 50 Hz7.5 kW 60 HzVariants 8CLAWVAC CP 500Pumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 150 – 200 mbarRated motor power 9.2 kW 50 Hz11 kW 60 HzVariants 5CLAWVAC CP 1000Pumping speed 950 m³/h 50 Hz1,140 m³/h 60 HzUltimate pressure 150 – 200 mbarRated motor power 18.5 kW 50 Hz22 kW 60 HzVariants 5Leybold NOVADRY series 4 models
NOVADRY ND 65Pumping speed 63 m³/h 50 Hz63 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3
NOVADRY ND 100Pumping speed 96 m³/h 50 Hz96 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 3NOVADRY ND 160Pumping speed 138 m³/h 50 Hz138 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 3 kW 50 Hz3 kW 60 HzVariants 3NOVADRY ND 200Pumping speed 175 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 3Pfeiffer Vacuum A4 series 12 models
A 124 HPumping speed 95 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants A 204 H/XPumping speed 130 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants A 604 HPumping speed 480 m³/h 50 Hz560 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants A 804 H/XPumping speed 600 m³/h 50 Hz700 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants A 1204 HPumping speed 1,050 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants A 1504 H/XPumping speed 1,100 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants A 1804 H/XPumping speed 1,650 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants A 1504 XNPumping speed 1,100 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants A 1804 XNPumping speed 1,600 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants A 3004 H/XPumping speed 3,000 m³/h 60 HzUltimate pressure 4 × 10-3 mbarRated motor power Variants A 3004 XNPumping speed 2,900 m³/h 60 HzUltimate pressure 4 × 10-3 mbarRated motor power Variants A 804 XNPumping speed 600 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants Pfeiffer Vacuum A 100/200 L series 3 models
A 100 LPumping speed 100 m³/h 50 HzUltimate pressure 0.012 mbarRated motor power Variants 8A 100 L ESPumping speed 100 m³/h 50 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants 3A 200 LPumping speed 200 m³/h 50 HzUltimate pressure 0.013 mbarRated motor power Variants 5Pfeiffer Vacuum ACP series 4 models
ACP 15Pumping speed 14 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power Variants 9ACP 28Pumping speed 27 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 14ACP 40Pumping speed 37 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 15ACP 90Pumping speed 88 m³/h 50 HzUltimate pressure 0.03 mbarRated motor power Variants 6Pfeiffer Vacuum DuoVane series 12 models
DuoVane 1.6Pumping speed 1.25 m³/h 50 Hz1.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.075 kW 50 Hz0.09 kW 60 HzVariants 9DuoVane 3Pumping speed 2.5 m³/h 50 Hz2.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.25 kW 50 Hz0.3 kW 60 HzVariants 10DuoVane 6Pumping speed 5.5 m³/h 50 Hz6.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 2DuoVane 12Pumping speed 9.5 m³/h 50 Hz11.8 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5DuoVane 18Pumping speed 14 m³/h 50 Hz16.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 2DuoVane 22Pumping speed 19.5 m³/h 50 Hz22.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 5DuoVane 30Pumping speed 24 m³/h 50 Hz29 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1DuoVane 36Pumping speed 32 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.1 kW 50 Hz1.3 kW 60 HzVariants 11DuoVane 70Pumping speed 62 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 13DuoVane 95Pumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 1DuoVane 135Pumping speed 115 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 4 kW 50 Hz4.5 kW 60 HzVariants 3DuoVane 300Pumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 3Pfeiffer Vacuum HiLobe series 17 models
HiLobe 1002Pumping speed 1,050 m³/h 50 HzUltimate pressure Rated motor power 2 kW 50 HzVariants 1HiLobe 1004Pumping speed 1,050 m³/h 50 HzUltimate pressure Rated motor power 2 kW 50 HzVariants 2HiLobe 1302Pumping speed 1,300 m³/h 50 HzUltimate pressure Rated motor power 2.5 kW 50 HzVariants 2HiLobe 1304Pumping speed 1,300 m³/h 50 HzUltimate pressure Rated motor power 2.5 kW 50 HzVariants 2HiLobe 2104Pumping speed 2,100 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 2HiLobe 2703Pumping speed 2,700 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 1HiLobe 2704Pumping speed 2,700 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 2HiLobe 4504Pumping speed 4,440 m³/h 50 HzUltimate pressure Rated motor power 5.5 kW 50 HzVariants 2HiLobe 4503Pumping speed 4,500 m³/h 50 HzUltimate pressure Rated motor power 5.5 kW 50 HzVariants 1HiLobe 6203Pumping speed 6,200 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants 1HiLobe 6204Pumping speed 6,220 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants 2HiLobe 8103Pumping speed 8,120 m³/h 50 HzUltimate pressure Rated motor power 9 kW 50 HzVariants 1HiLobe 8104Pumping speed 8,120 m³/h 50 HzUltimate pressure Rated motor power 9 kW 50 HzVariants 1HiLobe 11003Pumping speed 10,830 m³/h 50 HzUltimate pressure Rated motor power 12 kW 50 HzVariants 1HiLobe 11004Pumping speed 10,830 m³/h 50 HzUltimate pressure Rated motor power 12 kW 50 HzVariants 1HiLobe 14003Pumping speed 13,540 m³/h 50 HzUltimate pressure Rated motor power 15 kW 50 HzVariants 1HiLobe 14004Pumping speed 13,540 m³/h 50 HzUltimate pressure Rated motor power 15 kW 50 HzVariants 1Pfeiffer Vacuum HiScroll series 4 models
HiScroll 6Pumping speed 6.1 m³/h 50 HzUltimate pressure 0.015 mbarRated motor power Variants 7HiScroll 12Pumping speed 12.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 7HiScroll 18Pumping speed 18.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 11HiScroll 46Pumping speed 43 m³/h 50 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 11Pfeiffer Vacuum SmartVane series 2 models
SmartVane 55Pumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 0.75 kW 50 HzVariants 2SmartVane 70Pumping speed 70 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1 kW 50 HzVariants 2Pfeiffer Vacuum TORRI series 4 models
TORRI BD 0100 APumping speed 100 m³/h 50 Hz100 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1TORRI BD 0300 APumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1TORRI BD 0600 APumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1TORRI BD 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants Pfeiffer Vacuum UnoLine Plus series 1 model
UnoLine BA 501Pumping speed 500 m³/h 50 Hz500 m³/h 60 HzUltimate pressure 0.06 mbarRated motor power 15 kW 50 Hz18 kW 60 HzVariants 2No model matches these filters.
Atlas Copco AWL series 11 models
Atlas Copco DHS VSD+ series 1 model
Atlas Copco DWS VSD+ series 6 models
Atlas Copco DZS series 8 models
Atlas Copco DZS VSD+ series 5 models
Atlas Copco GHS VSD+ series 21 models
Atlas Copco GVS VSD+ series 4 models
Atlas Copco LRP VSD+ series 3 models
Becker BCV series 7 models
Becker KVT series 4 models
Becker KVX series 4 models
Becker O series 6 models
Becker RBP series 3 models
Becker SV series 16 models
Becker U4 series 4 models
Becker U series 8 models
Becker VADS series 3 models
Becker VARIAIR RV series 1 model
Becker VASF series 6 models
Becker VATP series 1 model
Becker VTLF series 6 models
Becker VT series 7 models
Becker VXLF series 5 models
Becker VX series 4 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards GV series 2 models
Edwards GXS series 10 models
Elmo Rietschle G-BH1 series 25 models
Elmo Rietschle G-BH2 series 9 models
Elmo Rietschle G-BH7 series 15 models
Elmo Rietschle G-BH9 series 1 model
Elmo Rietschle G-BH100 series 1 model
Elmo Rietschle L-BL2 series 7 models
Elmo Rietschle L-BV2 series 4 models
Elmo Rietschle L-BV3 series 1 model
Elmo Rietschle L-BV5 series 5 models
Elmo Rietschle L-BV7 series 3 models
Elmo Rietschle S-SVT series 11 models
Elmo Rietschle S-VSI series 1 model
Elmo Rietschle V-KTR series 4 models
Elmo Rietschle V-VCA/VCE series 2 models
Elmo Rietschle V-VCB series 2 models
Elmo Rietschle V-VCS series 13 models
Elmo Rietschle V-VCX series 7 models
Elmo Rietschle V-VGD series 2 models
Elmo Rietschle V-VTN series 3 models
Elmo Rietschle V-VTR series 2 models
Leybold CLAWVAC series 5 models
Leybold NOVADRY series 4 models
Pfeiffer Vacuum A4 series 12 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Pfeiffer Vacuum SmartVane series 2 models
Pfeiffer Vacuum TORRI series 4 models
Pfeiffer Vacuum UnoLine Plus series 1 model
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Selection
Semiconductors, electronics and displays: choosing a vacuum pump
What the manufacturers highlight for use in this industry.
Process gases and by-products
According to Pfeiffer Vacuum, the by-products of many deposition processes are corrosive or powdery; dry backing pumps are named (multi-stage Roots, screw, scroll). For display processes such as CVD, etching, PVD, implantation and encapsulation Edwards names vacuum together with exhaust gas abatement. For applications with high gas throughput Busch and Pfeiffer name the COBRA Semicon series (COBRA DS).
Particles, vibration, pulsation
According to Pfeiffer Vacuum, wafer fabrication must stay free of particles and contamination; for CD-SEM and electron microscopy Pfeiffer Vacuum names low-vibration pumps. For pick & place Becker names precise vacuum with low pulsation and vibration.
Installation location
Pfeiffer Vacuum distinguishes between pumps in the cleanroom, in the sub-floor (point of use) and in the sub-fab. Atlas Copco names clean, stable house vacuum around the clock; Leybold names central vacuum below 100 mbar for electronics manufacturing.
Energy and speed control
For central vacuum systems with speed-controlled pumps Atlas Copco states up to 50 % less energy and CO2 and heat recovery of up to 75 %; for networks with speed-controlled pumps Leybold names energy savings of often more than 50 % (Leybold figure).
Frequently asked questions
Semiconductors, electronics and displays: frequently asked questions about vacuum pumps
Which vacuum pump is suitable for semiconductor manufacturing?
For wafer fabrication Pfeiffer Vacuum names dry backing pumps – multi-stage Roots pumps, screw and scroll vacuum pumps – and as series A 100/200 L, A4, ACP, COBRA DS/BC and TORRI, depending on the process in the cleanroom, in the sub-floor or in the sub-fab. Busch names the COBRA Semicon series from load lock to particle-generating processes such as polysilicon etching, stripping, PECVD, PVD and ALD. For display processes Edwards names GXS and GV together with exhaust gas abatement.
How much vacuum does wafer etching need?
For dielectric, conductor and polysilicon etching Pfeiffer Vacuum states 10⁻²–10⁻³ hPa, for stripping and ashing about 1 hPa at 600–1,800 (3,000) m³/h. Named are A4 and COBRA BC/DS for etching and A4 and COBRA BC for stripping; for polysilicon etching and stripping/ashing Busch names the COBRA Semicon series.
Which backing pump for ALD and CVD?
For ALD Pfeiffer Vacuum names 10⁻¹–5 mbar at 1,800–4,500 m³/h, and for ALD, PECVD and LPCVD/diffusion the A4 series and COBRA DS; according to Pfeiffer, the by-products are corrosive or powdery. Busch names the COBRA Semicon series for ALD, PECVD, PVD and LPCVD/diffusion and COBRA DS for CVD/PECVD layers such as anti-reflective coatings.
Which vacuum pump for load-lock chambers?
Pfeiffer Vacuum names A 100 L and A 200 L with 100 and 200 m³/h respectively for 10⁻¹–10⁻² hPa, plus A4, ACP, TORRI and COBRA DS; the load locks stay particle-free under vacuum and are pumped down quickly. Busch names COBRA (NX, DS, NC), PANDA WV and PUMA WY, so that wafers are transferred in without a pressure surge.
Which vacuum pump for pick & place and chip mounters?
For PCB assembly with chip mounters and for pick & place in general Becker names the KVT, VT and SV series and precise vacuum with low pulsation and vibration; a case study names 20,000 maintenance-free operating hours. For robotic pick & place Becker names the claw vacuum pumps BCV (BCV 100: 50 mbar, BCV 300: 150 mbar), for tube and column lifters the side channel blowers SV with 195–1,250 m³/h. Elmo Rietschle names pick & place for electronics with the G, L and V families.
Dry-running or oil-lubricated in semiconductor manufacturing?
For wafer fabrication Pfeiffer Vacuum names only dry backing pumps, because production must stay free of particles and contamination and the by-products are corrosive or powdery; Busch names the COBRA Semicon series for this. Outside the process chambers, for example in pick & place and handling, Becker names dry-running and oil-lubricated rotary vane, screw, claw and side channel pumps for the electronics industry. For the house vacuum Atlas Copco names DZS VSD+ in Class 0 in addition to GHS VSD+ and LRP VSD+.
Which vacuum pump for EUV lithography?
For EUV lithography Pfeiffer Vacuum names particle-free vacuum and a high H₂ flow in the light source, for structures below 10 nm; ACP and HiLobe are named as backing pumps, and for lithography in general A 100/200 L, A4, ACP and TORRI.
Which vacuum pump for scanning electron microscopes and CD-SEM?
For CD-SEM in wafer metrology Pfeiffer Vacuum names 10⁻⁵–10⁻⁷ hPa and low-vibration backing pumps, ACP and HiScroll. According to Pfeiffer, electron microscopy needs a scatter-free electron beam and low-vibration pumps; named are diaphragm, multi-stage Roots and scroll pumps, and HiScroll as a series.
Which vacuum pump for display manufacturing (TFT, LCD, OLED)?
For the manufacture of flat panel displays (TFT, LCD, AMOLED) Pfeiffer Vacuum names the A4 series and COBRA DS. For displays Busch names the COBRA Industry and the COBRA Semicon series, and high vacuum for the production of flat panel displays. For display processes – CVD, etching, PVD, implantation, encapsulation – Edwards names vacuum with exhaust gas abatement and the GXS and GV series.
How are leaks found in vacuum systems in semiconductor manufacturing?
Pfeiffer Vacuum describes helium leak detection: helium is sprayed on from outside, and a leak detector on the system locates the leaks at about 10⁻⁷–10⁻⁹ mbar·l/s; named are the ASM 340/310/390/392 leak detectors and ACP, DuoVane and HiScroll as backing pumps. Residual gas analysis also shows contamination, leaks and outgassing in the vacuum.
A pump at each machine or a central vacuum system?
A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group – more under Central Vacuum.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the number of machines – we advise you on selection, spare parts and service.
