COBRA DS 0600 EPumping speed 600 m³/hUltimate pressure 0.01 mbar
COBRA DS 1800 A Version as listed in the Busch shop, motor and equipment on request
The Busch COBRA DS 1800 A is a dry screw vacuum pump with a nominal pumping speed of 1700 m³/h and an ultimate pressure of 0.003 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 1,700 m³/h 50 Hz 1,700 m³/h 60 Hz
- Ultimate pressure 3 × 10-3 mbar
- Rated motor power 8.4 kW 50 Hz 8.4 kW 60 Hz
| Variant | Part number |
|---|---|
| Version as listed in the Busch shop, motor and equipment on request (selected) | 1361800480 |
Busch COBRA DS 1800 A – dry screw vacuum pump
The Busch COBRA DS 1800 A is a dry screw vacuum pump. The nominal pumping speed is 1700 m³/h, the ultimate pressure 0.003 mbar. Nominal motor rating 8.4 kW.Features
- Powerful: screw design with integrated vacuum booster, for solar, flat panel display and semiconductor applications and harsh processes with high gas temperatures such as etching and CVD; good powder tolerance, tantalum-coated screw
- Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, high hydrogen throughput, low energy consumption, variable temperature control
- Compact: space-saving design with directly mounted canned motor; backing pump and vacuum booster on a common base frame, low vibration
Typical applications
Busch lists: Displays (physical vapour deposition (PVD)); Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, polysilicon etching, PECVD and others); Solar (crystal pulling).Versions of the Busch COBRA DS 1800 A
The 1 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 1,700 |
|---|---|
| Pumping speed 60Hz | 1,700 |
| Ultimate pressure | 3 × 10-3 |
| Rated motor power 50Hz | 8.4 |
| Rated motor power 60Hz | 8.4 |
| Weight | 500 |
| Length | 107.3 |
| Width | 42.6 |
| Height | 75 |
| Inlet connection flange | DN 160 ISO-K |
| Outlet connection flange | DN 40 ISO-KF |
| Noise level | 62 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 1700 m³/h |
| Ultimate pressure | 0.003 mbar |
| Rated motor power, backing pump | 4.4 kW |
| Rated motor power, vacuum booster | 4.0 kW |
| Rated speed, backing pump | 5100 min⁻¹ |
| Rated speed, vacuum booster | 5400 min⁻¹ |
| Power consumption at ultimate pressure | 4.1 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | < 62 dB(A) |
| Water consumption | 7.0–8.0 l/min |
| Nitrogen consumption | 0 – 75 l/min |
| Dimensions (L × W × H) | 1073 × 426 × 750 mm |
| Weight (approx.) | 500 kg |
| Gas inlet | DN 160 ISO-K |
| Gas outlet | DN 40 ISO-KF |
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