Application

Backing pumps for high vacuum and accelerators

Accelerators, storage rings, beam pipes, lasers and ion sources work in high and ultra-high vacuum generated by turbo pumps or cryopumps. A turbo pump needs a backing pump that keeps the pressure at its outlet low, a cryopump a backing pump for pre-evacuation and regeneration. Pfeiffer Vacuum describes the pump chain in which the backing pump evacuates to about 10⁻³ hPa so that the high vacuum pump reaches pressures below 10⁻⁷ hPa. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it – 184 models from 4 manufacturers.

Compare 184 modelsHow it works

  • 184Models
  • 19Series
  • 4Manufacturers
  • approx. 10⁻³ hPaBacking vacuum in the UHV pump chain (Pfeiffer Vacuum)
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Touch the points: each part of the system explains itself.

In short

Backing pump for high vacuum and accelerators: the key facts

  • Backing vacuumFor generating ultra-high vacuum, Pfeiffer Vacuum describes a pump chain in which the backing pump evacuates to about 10⁻³ hPa; HiScroll, ACP and DuoVane are named.
  • UHV below 10⁻⁹ mbarAccording to Leybold, ultra-high vacuum below 10⁻⁹ mbar prevents surface contamination and reduces disturbances in accelerators; storage rings need ≤10⁻¹¹ mbar. As backing pumps Leybold names SCROLLVAC plus, ECODRY plus and SOGEVAC BI/DI.
  • Backing pump for turboAs backing pumps for turbo and high vacuum pumps, Edwards names XDS, RV, E2M, nXRi, GV and E2S; the nXRi reaches below 0.03 mbar.
  • Radiation-resistantFor accelerators, Pfeiffer Vacuum names stable, radiation-resistant ultra-high vacuum for the particle beam; Leybold describes cyclotron sections in proton therapy that need a vacuum of around 10⁻⁷ mbar despite magnetic fields and radiation.
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  • Air and gas (vacuum)
  • Exhaust

Operating principle

How it works: Backing pump for high vacuum and accelerators

The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.

  1. Pre-evacuationThe backing pump – with a Roots pump if required – lowers the chamber pressure; Edwards names pre-evacuation for gravitational wave detectors, Pfeiffer Vacuum the backing pump down to about 10⁻³ hPa.
  2. High vacuumThe turbo pump or cryopump takes over and, according to Pfeiffer Vacuum, reaches pressures below 10⁻⁷ hPa; behind the turbo pump, the backing pump maintains the backing vacuum.
  3. Bake-outFor ultra-high vacuum, Edwards names baking out the system; in operation the backing pump must maintain the backing vacuum permanently – Leybold names storage rings with ≤10⁻¹¹ mbar.

Vacuum and sizing

Backing pump for high vacuum and accelerators: how much vacuum is needed

What the manufacturers say about pressure, pumping speed and sizing.

Which vacuum

Leybold: ultra-high vacuum below 10⁻⁹ mbar, storage rings ≤10⁻¹¹ mbar, proton therapy around 10⁻⁷ mbar. Pfeiffer Vacuum: below 10⁻⁷ hPa for high-energy, plasma and space research, surface analysis and photonics, 10⁻⁶ to 10⁻⁹ hPa at the ion source, beam line and end station. For ion traps in quantum computing, Edwards names XHV.

Which backing pump

Pfeiffer Vacuum: backing pump down to about 10⁻³ hPa; HiScroll, ACP and DuoVane are named. Edwards: XDS, RV, E2M, nXRi, GV and E2S, the nXRi with below 0.03 mbar. Leybold: SCROLLVAC plus, ECODRY plus and SOGEVAC BI/DI, for high vacuum systems also NEO D and TRIVAC B. Busch names COBRA for beamlines, particle accelerators, plasma physics and photonics.

Which pumping speed

For the ion source, beam line and end station, Pfeiffer Vacuum names 1,200–3,000 l/s. The pumping speed of the backing pump depends on the high vacuum pump and the gas load.

What the manufacturers point out

Radiation resistance (Pfeiffer Vacuum), magnetic field and radiation in the cyclotron (Leybold), aggressive gases in ion implantation (Pfeiffer Vacuum), fast cycles in plasma physics (Pfeiffer Vacuum) and bake-out for ultra-high vacuum (Edwards).

Technology

Backing pump for high vacuum and accelerators: the vacuum pumps the manufacturers name

Listed are the series the manufacturer itself names for this application. “Show only …” sets the filter of the product overview.

Product overview

Backing pump for high vacuum and accelerators: all 184 models compared

Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.

Busch COBRA Industry series 36 models

COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants
COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants

Busch COBRA Semicon series 22 models

COBRA DS 0080 GPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 2
COBRA BA 0100 CPumping speed 85 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 3
COBRA BC 0101 GPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
COBRA DS 0160 GPumping speed 140 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
COBRA DS 0700 GPumping speed 500 m³/h 50 Hz610 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 0601 GPumping speed 550 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 3 kW 50 Hz3.3 kW 60 HzVariants 1
COBRA DS 0600 EPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2
COBRA DS 1000 GPumping speed 775 m³/h 50 Hz960 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 1001 GPumping speed 870 m³/h 50 Hz870 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
COBRA BC 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 1
COBRA DS 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.4 kW 60 HzVariants 2
COBRA DS 2000 GPumping speed 1,365 m³/h 50 Hz1,640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 2
COBRA DS 1800 APumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8.4 kW 50 Hz8.4 kW 60 HzVariants 1
COBRA DS 1800 A XPumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 10.6 kW 50 Hz10.6 kW 60 HzVariants 1
COBRA DS 3010 GPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3161 CPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3181 CPumping speed 3,500 m³/h 50 Hz3,500 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 33.5 kW 50 Hz33.5 kW 60 HzVariants
COBRA DS 5161 BPumping speed 4,300 m³/h 50 Hz4,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants
COBRA DS 8161 FPumping speed 6,000 m³/h 50 Hz6,000 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 9161 BPumping speed 6,220 m³/h 50 Hz6,220 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 35 kW 50 Hz35 kW 60 HzVariants
COBRA DS 8162 FPumping speed 7,200 m³/h 50 Hz7,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 50 kW 50 Hz50 kW 60 HzVariants
COBRA DS 8163 BPumping speed 7,385 m³/h 50 Hz7,385 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 65 kW 50 Hz65 kW 60 HzVariants

Edwards E2M series 9 models

Edwards E2M0.7Pumping speed 0.75 m³/h 50 Hz0.95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.09 kW 50 Hz0.09 kW 60 HzVariants 2
Edwards E2M1.5Pumping speed 1.6 m³/h 50 Hz2 m³/h 60 HzUltimate pressure 1.5 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 4
Edwards E2M2.5Pumping speed 2.5 m³/h 50 Hz3 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 2
Edwards E2M18Pumping speed 17 m³/h 50 Hz20.4 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 0.9 kW 60 HzVariants 8
Edwards E2M28Pumping speed 27.5 m³/h 50 Hz33 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 7
Edwards E2M40Pumping speed 37 m³/h 50 Hz44 m³/h 60 HzUltimate pressure 4.5 × 10-3 – 0.01 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.5 kW 60 HzVariants 9
Edwards E2M80Pumping speed 74 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 3 × 10-3 – 0.01 mbarRated motor power 2.2 – 3 kW 50 Hz3 kW 60 HzVariants 9
Edwards E2M175Pumping speed 160 m³/h 50 Hz196 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 5
Edwards E2M275Pumping speed 255 m³/h 50 Hz306 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 5

Edwards E2S series 3 models

Edwards E2S45Pumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 2
Edwards E2S65Pumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 2
Edwards E2S85Pumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 2

Edwards GV series 2 models

Edwards Drystar GV80Pumping speed 82 m³/h 50 Hz94 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 7
Edwards GV110Pumping speed 110 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 6 × 10-3 mbarRated motor power 4 – 5.5 kW 50 Hz4 – 5.5 kW 60 HzVariants 3

Edwards nXRi series 5 models

Edwards nXR30iPumping speed 30 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR40iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR60iPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR90iPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR120iPumping speed 120 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1

Edwards RV series 8 models

Edwards RV3Pumping speed 3.3 m³/h 50 Hz3.9 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 6
Edwards RV3 FXPumping speed 3.3 m³/h 50 Hz3.9 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 4
Edwards RV5Pumping speed 5.1 m³/h 50 Hz6.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 6
Edwards RV5 FXPumping speed 5.1 m³/h 50 Hz6.2 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 4
Edwards RV8Pumping speed 8.5 m³/h 50 Hz10 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 6
Edwards RV8 FXPumping speed 8.5 m³/h 50 Hz10 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 5
Edwards RV12Pumping speed 12 m³/h 50 Hz14.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 6
Edwards RV12 FXPumping speed 12 m³/h 50 Hz14.2 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 5

Edwards XDS series 2 models

Edwards XDS35iPumping speed 35 m³/h 50 Hz35 m³/h 60 HzUltimate pressure 0.01 – 0.03 mbarRated motor power Variants 6
Edwards XDS46iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants 2

Leybold ECODRY series 5 models

ECODRY 25 plusPumping speed 25 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 0.85 kW 50 Hz0.85 kW 60 HzVariants 1
ECODRY 35 plusPumping speed 35 m³/h 50 Hz35 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 0.85 kW 50 Hz0.85 kW 60 HzVariants 1
ECODRY 40 plusPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 1.2 kW 50 Hz1.2 kW 60 HzVariants 2
ECODRY 65 He plusPumping speed 55 m³/h 50 Hz55 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 1.2 kW 50 Hz1.2 kW 60 HzVariants 2
ECODRY 65 plusPumping speed 55 m³/h 50 Hz55 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 1.2 kW 50 Hz1.2 kW 60 HzVariants 4

Leybold NEO D series 5 models

NEO D 16Pumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.7 – 0.9 kW 60 HzVariants 11
NEO SD 16Pumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.7 – 0.9 kW 60 HzVariants 7
NEO D 25Pumping speed 24 m³/h 50 Hz29 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 8
NEO D 40Pumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power 1.15 – 1.3 kW 50 Hz1.5 kW 60 HzVariants 7
Leybold SOGEVAC NEO D 65 vacuum pumpNEO D 65Pumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power 2 kW 50 Hz2 kW 60 HzVariants 4

Leybold SCROLLVAC series 5 models

SCROLLVAC 3 plusPumping speed 3 m³/h 50 Hz3.5 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.18 – 0.21 kW 50 Hz0.18 – 0.21 kW 60 HzVariants 8
SCROLLVAC 7 plusPumping speed 5.1 – 6.1 m³/h 50 Hz6.1 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.26 kW 50 Hz0.26 kW 60 HzVariants 6
SCROLLVAC 10 plusPumping speed 9.1 – 10.6 m³/h 50 Hz10.6 m³/h 60 HzUltimate pressure 9 × 10-3 mbarRated motor power 0.28 kW 50 Hz0.28 kW 60 HzVariants 6
SCROLLVAC 15 plusPumping speed 12.6 – 14.5 m³/h 50 Hz14.5 m³/h 60 HzUltimate pressure 9 × 10-3 mbarRated motor power 0.3 kW 50 Hz0.3 kW 60 HzVariants 6
SCROLLVAC 18 plusPumping speed 16.7 – 20 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 0.26 kW 50 Hz0.26 kW 60 HzVariants 6

Leybold SOGEVAC series 23 models

SOGEVAC SV 10 BPumping speed 9.5 m³/h 50 Hz11.5 m³/h 60 HzUltimate pressure 1.5 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 3
SOGEVAC SV 16 DPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 13
SOGEVAC SV 16 DIPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 4
SOGEVAC SV 16 BPumping speed 15 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 7
SOGEVAC SV 25 BPumping speed 22.5 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 12
SOGEVAC SV 25 DPumping speed 22.5 m³/h 50 Hz25.5 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 15
SOGEVAC SV 28 BIPumping speed 23 m³/h 50 Hz27 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 1.1 kW 60 HzVariants 2
SOGEVAC SV 40 BI FCPumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3
SOGEVAC SV 55 BI²Pumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 4
SOGEVAC SV 40 BPumping speed 38.5 m³/h 50 Hz47 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.1 kW 50 Hz1.5 kW 60 HzVariants 25
SOGEVAC SV 40 BIPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 1.1 – 1.3 kW 50 Hz1.3 – 1.6 kW 60 HzVariants 3
SOGEVAC SV 65 BI FCPumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 2
SOGEVAC SV 70 BI²Pumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 2
SOGEVAC SV 65 BPumping speed 54 m³/h 50 Hz64 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 22
SOGEVAC SV 100 BPumping speed 87.5 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3.5 kW 60 HzVariants 31
SOGEVAC SV 120 BI FCPumping speed 90 – 100 m³/h 50 Hz90 – 100 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
SOGEVAC SV 120 BPumping speed 110 m³/h 50 Hz122 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.4 kW 50 Hz3.2 kW 60 HzVariants 12
SOGEVAC SV 220 BPumping speed 180 m³/h 50 Hz220 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 4.5 kW 50 Hz4.8 kW 60 HzVariants 8
SOGEVAC SV 300 BPumping speed 240 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants 45
SOGEVAC SV 320 BPumping speed 284 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 6
SOGEVAC SV 570 BPumping speed 470 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 11 kW 50 Hz11 – 13.2 kW 60 HzVariants 6
SOGEVAC SV 630 BPumping speed 640 m³/h 50 Hz755 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 34
SOGEVAC SV 750 BPumping speed 755 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 18.5 kW 50 HzVariants 15

Leybold TRIVAC series 20 models

TRIVAC D 2,5 EPumping speed 2.7 m³/h 50 Hz3.3 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.28 – 0.29 kW 50 Hz0.3 – 0.31 kW 60 HzVariants 3
TRIVAC D 4 B vacuum pumpTRIVAC D 4 BPumping speed 4.2 m³/h 50 Hz5 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3
TRIVAC D 4 TPumping speed 4.3 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.25 – 0.57 kW 50 Hz0.25 – 0.66 kW 60 HzVariants 2
TRIVAC D 5 LPumping speed 5.1 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2
TRIVAC D 8 TPumping speed 8.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.37 – 0.66 kW 60 HzVariants 2
TRIVAC D 8 BPumping speed 8.5 m³/h 50 Hz10.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3
TRIVAC D 12 LPumping speed 12 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2
TRIVAC D 16 TPumping speed 16.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.55 – 0.75 kW 60 HzVariants 2
TRIVAC D 16 BPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 6
TRIVAC D 16 BCSPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 25 BPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 4
TRIVAC D 25 BCSPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 30 TPumping speed 30.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 40 BPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
TRIVAC D 40 BCSPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
TRIVAC D 40 LPumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 4
TRIVAC D 63 LPumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 4
TRIVAC D 65 BPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1
TRIVAC D 65 BCSPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
TRIVAC D 90 LPumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 3

Pfeiffer Vacuum A4 series 12 models

A 124 HPumping speed 95 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants
A 204 H/XPumping speed 130 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants
A 604 HPumping speed 480 m³/h 50 Hz560 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants
A 804 H/XPumping speed 600 m³/h 50 Hz700 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants
A 1204 HPumping speed 1,050 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants
A 1504 H/XPumping speed 1,100 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants
A 1804 H/XPumping speed 1,650 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 8 × 10-3 mbarRated motor power Variants
A 1504 XNPumping speed 1,100 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants
A 1804 XNPumping speed 1,600 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants
A 3004 H/XPumping speed 3,000 m³/h 60 HzUltimate pressure 4 × 10-3 mbarRated motor power Variants
A 3004 XNPumping speed 2,900 m³/h 60 HzUltimate pressure 4 × 10-3 mbarRated motor power Variants
A 804 XNPumping speed 600 m³/h 60 HzUltimate pressure 0.0145 mbarRated motor power Variants

Pfeiffer Vacuum A 100/200 L series 3 models

A 100 LPumping speed 100 m³/h 50 HzUltimate pressure 0.012 mbarRated motor power Variants 8
A 100 L ESPumping speed 100 m³/h 50 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants 3
A 200 LPumping speed 200 m³/h 50 HzUltimate pressure 0.013 mbarRated motor power Variants 5

Pfeiffer Vacuum ACP series 4 models

ACP 15Pumping speed 14 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power Variants 9
ACP 28Pumping speed 27 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 14
ACP 40Pumping speed 37 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 15
ACP 90Pumping speed 88 m³/h 50 HzUltimate pressure 0.03 mbarRated motor power Variants 6

Pfeiffer Vacuum DuoVane series 12 models

DuoVane 1.6Pumping speed 1.25 m³/h 50 Hz1.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.075 kW 50 Hz0.09 kW 60 HzVariants 9
DuoVane 3Pumping speed 2.5 m³/h 50 Hz2.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.25 kW 50 Hz0.3 kW 60 HzVariants 10
DuoVane 6Pumping speed 5.5 m³/h 50 Hz6.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 2
DuoVane 12Pumping speed 9.5 m³/h 50 Hz11.8 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5
DuoVane 18Pumping speed 14 m³/h 50 Hz16.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 2
DuoVane 22Pumping speed 19.5 m³/h 50 Hz22.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 5
DuoVane 30Pumping speed 24 m³/h 50 Hz29 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
DuoVane 36Pumping speed 32 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.1 kW 50 Hz1.3 kW 60 HzVariants 11
DuoVane 70Pumping speed 62 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 13
DuoVane 95Pumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 1
DuoVane 135Pumping speed 115 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 4 kW 50 Hz4.5 kW 60 HzVariants 3
DuoVane 300Pumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 3

Pfeiffer Vacuum HiScroll series 4 models

HiScroll 6Pumping speed 6.1 m³/h 50 HzUltimate pressure 0.015 mbarRated motor power Variants 7
HiScroll 12Pumping speed 12.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 7
HiScroll 18Pumping speed 18.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 11
HiScroll 46Pumping speed 43 m³/h 50 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 11

Pfeiffer Vacuum TORRI series 4 models

TORRI BD 0100 APumping speed 100 m³/h 50 Hz100 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1
TORRI BD 0300 APumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
TORRI BD 0600 APumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
TORRI BD 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants

Model comparison

Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.

Industries

Backing pump for high vacuum and accelerators: where the manufacturers name it

The manufacturers list these uses on their own pages.

Research, laboratory and analytics

All four manufacturers name the backing pump here: Leybold for storage rings and ultra-high vacuum, Edwards for high-energy physics, gravitational wave detectors such as Virgo (2×3 km) and high-power lasers, Pfeiffer Vacuum for accelerators, plasma and photonics research, Busch with COBRA for beamlines and particle accelerators.

Industry page: Research, laboratory and analytics →

Medical and healthcare

Leybold describes cyclotron sections in proton therapy with a vacuum of around 10⁻⁷ mbar despite magnetic fields and radiation and names SCROLLVAC plus; for medical accelerators Pfeiffer Vacuum names ACP, DuoVane and HiScroll.

Industry page: Medical and healthcare →

Semiconductors, electronics and displays

Pfeiffer Vacuum names high vacuum of 10⁻⁶ to 10⁻⁹ hPa for the ion source, beam line and end station in ion implantation with aggressive gases, and A4 and ACP for this.

Industry page: Semiconductors, electronics and displays →

Frequently asked questions

Backing pump for high vacuum and accelerators: frequently asked questions

What is a backing pump and why is it needed?

A turbo pump cannot pump against atmospheric pressure; the backing pump keeps the pressure at its outlet low. A cryopump needs the backing pump for pre-evacuation and for regeneration. Pfeiffer Vacuum describes the pump chain as follows: the backing pump evacuates to about 10⁻³ hPa, and the high vacuum pump then reaches pressures below 10⁻⁷ hPa. Edwards names XDS, RV, E2M, nXRi, GV and E2S for this.

Which backing pump for a turbo pump?

As backing pumps for turbo and high vacuum pumps, Edwards names XDS, RV, E2M, nXRi, GV and E2S, the nXRi with below 0.03 mbar. Pfeiffer Vacuum names HiScroll, ACP and DuoVane, Leybold SCROLLVAC plus, ECODRY plus, SOGEVAC BI/DI, NEO D and TRIVAC B. Busch names COBRA for beamlines and particle accelerators.

How much backing vacuum does a turbomolecular pump need?

For generating ultra-high vacuum, Pfeiffer Vacuum names a backing pump down to about 10⁻³ hPa. For the nXRi as a backing pump, Edwards names an ultimate pressure below 0.03 mbar. The exact value depends on the high vacuum pump and the gas load.

What pressure is there in a particle accelerator?

For storage rings Leybold names ≤10⁻¹¹ mbar, and in general ultra-high vacuum below 10⁻⁹ mbar, which prevents surface contamination and reduces disturbances in accelerators. For accelerators Pfeiffer Vacuum names stable, radiation-resistant ultra-high vacuum, and for high-energy research pressures below 10⁻⁷ hPa; at the ion source, beam line and end station 10⁻⁶ to 10⁻⁹ hPa.

Oil-free or oil-lubricated as a backing pump in high vacuum?

The manufacturers name both. Leybold lists the dry SCROLLVAC plus and ECODRY plus as well as the oil-lubricated SOGEVAC BI/DI, TRIVAC B and NEO D; Pfeiffer Vacuum the dry HiScroll and ACP alongside the oil-lubricated DuoVane; Edwards the dry XDS, nXRi and GV alongside the oil-lubricated RV, E2M and E2S. Which version is suitable depends on the system and the cleanliness requirements.

Why must the pressure in ultra-high vacuum be so low?

According to Leybold, ultra-high vacuum prevents surface contamination and reduces disturbances in accelerators; storage rings need extremely low pressures. Edwards names ultra-high vacuum for a stable beam in high-energy physics, Pfeiffer Vacuum a particle-free environment for optics in photonics.

Which vacuum pump for proton therapy?

Leybold describes cyclotron sections that need a vacuum of around 10⁻⁷ mbar despite magnetic fields and radiation, and names SCROLLVAC plus with TURBOVAC iR and cryopumps. For medical accelerators Pfeiffer Vacuum names ACP, DuoVane and HiScroll.

Which vacuum pump for ion implantation?

For the ion source, beam line and end station, Pfeiffer Vacuum names high vacuum of 10⁻⁶ to 10⁻⁹ hPa at 1,200–3,000 l/s, together with aggressive gases, and A4 and ACP as pumps.

What if the backing pump has to work in a magnetic field or under radiation?

Leybold describes exactly this for cyclotron sections in proton therapy and names SCROLLVAC plus; for accelerators Pfeiffer Vacuum names radiation-resistant ultra-high vacuum with ACP and HiScroll. Selecting the pump and its installation location is then part of the system planning.

Which vacuum pump for plasma physics and photonics research?

For plasma physics, Pfeiffer Vacuum names stable vacuum control with fast cycles with ACP, and for photonics research a particle-free environment for optics with A 100/200 L, ACP, HiScroll and TORRI. Busch names COBRA for plasma physics and photonics research.

A single pump or a central vacuum system?

A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group – more under Central Vacuum.

Does Ehrler & Beck also supply spare parts and service?

Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.

Which pump suits your process?

Tell us the application, the medium and the volume – we advise you on selection, spare parts and service.

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