Ehrler & Beck Vakuum- und Drucklufttechnik GmbH
Ehrler und Beck

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A 1204 H

The Pfeiffer A 1204 H is a dry multi-stage Roots pump with a nominal pumping speed of 1050 m³/h (50 Hz) or 1150 m³/h (60 Hz) and an ultimate pressure of 0.003 mbar. Ehrler & Beck advises on selection and service.

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  • Pumping speed 1,050 m³/h 50 Hz 1,150 m³/h 60 Hz
  • Ultimate pressure 3 × 10-3 mbar

Pfeiffer A 1204 H – dry multi-stage Roots pump

The Pfeiffer A 1204 H is a dry multi-stage Roots pump. The nominal pumping speed is 1050 m³/h (50 Hz) or 1150 m³/h (60 Hz), the ultimate pressure 0.003 mbar.

Features

  • Powerful: dry and energy-saving, for semiconductor and coating applications
  • Flexible: settings can be adapted to the process requirements
  • Certified: SEMI S2 and UL 61010

Typical applications

Pfeiffer lists: Dairy products (cheese production – vacuum chambers for cheese, cheese production – cheese towers, butter production); Displays (physical vapour deposition (PVD)); Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, stripping/ashing, PVD and others); Thin-film coating (laboratory coating).

Advice and service

Ehrler & Beck advises on selection, accessories and service.
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