A 124 HPumping speed 95 m³/hUltimate pressure 0.05 mbar
A 3004 H/X
The Pfeiffer A 3004 H/X is a dry multi-stage Roots pump with a nominal pumping speed of 3000 m³/h (60 Hz) and an ultimate pressure of 0.004 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 3,000 m³/h 60 Hz
- Ultimate pressure 4 × 10-3 mbar
Pfeiffer A 3004 H/X – dry multi-stage Roots pump
The Pfeiffer A 3004 H/X is a dry multi-stage Roots pump. The nominal pumping speed is 3000 m³/h (60 Hz), the ultimate pressure 0.004 mbar.Features
- Robust: for very harsh processes, high particle tolerance, good corrosion resistance
- Reliable: long service life
- Powerful: according to Pfeiffer the best compression ratio in its class and very low power consumption
Typical applications
Pfeiffer lists: Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, stripping/ashing, polysilicon etching and others); Solar (cell production).Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 60Hz | 3,000 |
|---|---|
| Ultimate pressure | 4 × 10-3 |
| Weight | 800 |
| Length | 96.1 |
| Width | 54.4 |
| Height | 109.4 |
| Inlet connection flange | DN 160 |
| Outlet connection flange | DN 40 |
| Noise level | 72 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 3000 m³/h (60 Hz) |
| Ultimate pressure | 4 · 10⁻³ mbar (60 Hz) |
| Power consumption at ultimate pressure | 2.7 kW (60 Hz) |
| Sound pressure level | < 72 dB(A) |
| Cooling water flow | 2.5 – 5 l/min |
| Dimensions (L × W × H) | 961 × 544 × 1094 mm |
| Weight (approx.) | 800 kg |
| Gas inlet | DN 160 |
| Gas outlet | DN 40 |
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