COBRA DS 0160 G Version as listed in the Busch shop, motor and equipment on request

The Busch COBRA DS 0160 G is a dry screw vacuum pump with a nominal pumping speed of 140 m³/h (50 Hz) or 160 m³/h (60 Hz) and an ultimate pressure of 0.03 mbar. Ehrler & Beck advises on selection and service.

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Pumping speed 140 m³/h 50 Hz 160 m³/h 60 Hz
Ultimate pressure 0.03 mbar
Rated motor power 5.5 kW 50 Hz 6.6 kW 60 Hz

Available variants
Variant	Part number
Version as listed in the Busch shop, motor and equipment on request (selected)	1361800253
Version as listed in the Busch shop, motor and equipment on request	1361800254
Version as listed in the Busch shop, motor and equipment on request	1361800814

Busch COBRA DS 0160 G – dry screw vacuum pump

The Busch COBRA DS 0160 G is a dry screw vacuum pump. The nominal pumping speed is 140 m³/h (50 Hz) or 160 m³/h (60 Hz), the ultimate pressure 0.03 mbar. Nominal motor rating 5.5 kW (50 Hz) or 6.6 kW (60 Hz).

Features

Powerful: screw design, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling, high hydrogen throughput
Compact: space-saving design with directly mounted canned motor

Typical applications

Busch lists: Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, polysilicon etching, PECVD and others).

Versions of the Busch COBRA DS 0160 G

The 3 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.

Advice and service

Ehrler & Beck advises on selection, accessories and service.

Pumping speed 50Hz	140
Pumping speed 60Hz	160
Ultimate pressure	0.03
Rated motor power 50Hz	5.5
Rated motor power 60Hz	6.6
Weight	338
Length	97.5
Width	42.5
Height	69.7
Inlet connection flange	DN 50
Outlet connection flange	DN 40
Noise level	68 dB(A)
Cooling method	Water cooling
Oil type	Oil-free

Additional technical data

Technical data	Value
Nominal pumping speed	140 m³/h (50 Hz) / 160 m³/h (60 Hz)
Ultimate pressure	0.03 mbar
Rated motor power	5.5 kW (50 Hz) / 6.6 kW (60 Hz)
Nominal speed	3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz)
Power consumption at ultimate pressure	4.3 kW (50 Hz) / 5.2 kW (60 Hz)
Sound pressure level (ISO 2151, KpA = 3 dB)	< 68 dB(A)
Water consumption	4.0 l/min
Nitrogen consumption	0 – 75 l/min
Dimensions (L × W × H)	975 × 425 × 697 mm
Weight (approx.)	338 kg
Gas inlet	DN 50
Gas outlet	DN 40