Industry
Vacuum pumps for lasers and photonics
In laser systems, vacuum keeps process gases circulating, evacuates chambers before they are filled with shielding gas and provides a particle-free, stable environment in photonics research. Only Becker names the laser industry as an industry – with gas-tight, cleanroom-assembled blowers that draw in and circulate noble gases such as helium and shielding gases; the other statements come from the application pages of Edwards, Pfeiffer Vacuum and Busch. Below you can see which series the manufacturers themselves name for these tasks – 181 models from 4 manufacturers.
Compare 181 modelsSee the applications
- 181Models
- 25Series
- 4Manufacturers
- 5Applications
In short
Lasers and photonics: vacuum pumps – the key facts
- One industry statementBecker lists the laser industry as a market: gas-tight, cleanroom-assembled blowers draw in and circulate noble gases such as helium and shielding gases. Named are the rotary vane series VT, VX, KVT, KVX, VTLF, VXLF, O, U and U4 and the side channel and radial blowers SV, VASF, VARIAIR RV and VATP; all other information on this page comes from application pages.
- Gas circulationBecker describes gas-tight blowers that circulate expensive gases without loss while heat exchangers provide cooling – with KF flanges; named are SV, VASF, VARIAIR RV and VATP. Becker lists gas circulation in CO₂ lasers as a use in the laser industry.
- Leak rateFor inert gas circulation in laser melting 3D printers Becker names a leak rate below 1×10⁻⁵ mbar·l/s; SV and VASF extract the shielding gas, filter it and return it.
- Backing pumpsFor high-power lasers Edwards names a stable vacuum with the XDS. For photonics research Pfeiffer Vacuum names a particle-free environment for the optics, and for ultra-high vacuum below 10⁻⁷ hPa a pump chain whose backing pump reaches about 10⁻³ hPa (DuoVane, HiScroll, ACP).
Applications
Lasers and photonics: what vacuum pumps are used for
For each application: what the vacuum does and which series the manufacturers name for it. The information comes from the manufacturers’ own pages.
Backing pumps for high-power lasers and photonics research
High-vacuum set-ups in laser and photonics laboratories need a backing pump that keeps the vacuum stable and clean. For high-power lasers Edwards names a stable vacuum with the XDS; for photonics research Pfeiffer Vacuum names a particle-free environment for the optics (A 100/200 L, ACP, HiScroll, TORRI) and for ultra-high vacuum below 10⁻⁷ hPa a pump chain with a backing pump reaching about 10⁻³ hPa (DuoVane, HiScroll, ACP). Busch lists photonics research in its product finder with COBRA Industry and COBRA Semicon.
- EdwardsXDS as backing pumps for turbo and high-vacuum pumps in general, also names E2M, RV, nXRi, GV and E2S
- Pfeiffer VacuumHiScroll, ACP, A 100/200 L, TORRI, DuoVane A 100/200 L and TORRI from the product finder
- BuschCOBRA Industry, COBRA Semicon from the Busch product finder, without a description
More on Backing pumps for high-power lasers and photonics research →
Laser melting in 3D printing
In laser melting 3D printers, according to Becker, the shielding gas is extracted, filtered and returned; for this inert gas circulation Becker names SV and VASF and a leak rate below 1×10⁻⁵ mbar·l/s. Becker lists the same series for conveying metal powder under inert gas; Becker names the evacuation of the build chamber before inert gas filling without a family.
CO₂ lasers: evacuating the process circuit
Becker lists the evacuation of the CO₂ laser process circuit as a use in the laser industry – without a description and without a series. On its evacuation application page Becker describes how air or gas is quickly removed from chambers and vessels, and names VT, VX, KVT, KVX, VTLF, VXLF, O, U, U4, VADS, BCV, SV, VASF, VARIAIR RV, VATP, T and DVT for this.
Gas circulation in CO₂ lasers
The laser gas runs in a circuit and is not to be lost: Becker describes gas-tight blowers that circulate expensive gases without loss while heat exchangers provide cooling – with KF flanges and the SV, VASF, VARIAIR RV and VATP series. Becker lists gas circulation in CO₂ lasers as a use in the laser industry; there it says that gas-tight, cleanroom-assembled blowers draw in and circulate noble gases such as helium and shielding gases.
- BeckerSV, VASF, VARIAIR RV, VATP
Burn-off extraction in laser welding
Laser welding produces fumes and burn-off, which are extracted. Becker lists burn-off extraction in laser welding as a use in the laser industry – only as a keyword, without a description and without a series.
- Beckerlisted only, without a series
Manufacturers and series
Lasers and photonics: 4 manufacturers, 25 series
Listed are the series the manufacturer itself names for this industry. “Show only …” sets the filter of the product overview.
Becker
94 models · 1.9–1,570 m³/h
Busch
58 models · 70–7,385 m³/h
Edwards
2 models · 35–40 m³/h
Pfeiffer Vacuum
27 models · 1.25–1,200 m³/h
Product overview
Lasers and photonics: all 181 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Becker BCV series 7 models
Becker DVT series 4 models
DVT 3.60Pumping speed 58 m³/h 50 Hz69 m³/h 60 HzUltimate pressure Rated motor power 2.2 – 3 kW 50 Hz2.6 – 3.6 kW 60 HzVariants 6DVT 3.80Pumping speed 70 m³/h 50 Hz82 m³/h 60 HzUltimate pressure Rated motor power Variants DVT 3.100Pumping speed 103 m³/h 50 Hz120 m³/h 60 HzUltimate pressure Rated motor power Variants 
DVT 3.140Pumping speed 137 m³/h 50 Hz160 m³/h 60 HzUltimate pressure Rated motor power Variants Becker KVT series 4 models
KVT 3.60Pumping speed 55 m³/h 50 Hz66 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6
KVT 3.80Pumping speed 67 m³/h 50 Hz78.5 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6
KVT 3.100Pumping speed 98 m³/h 50 Hz112 m³/h 60 HzUltimate pressure 100 mbarRated motor power 3 kW 50 Hz3.6 kW 60 HzVariants 8
KVT 3.140Pumping speed 129 m³/h 50 Hz154 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4 kW 50 Hz4.5 – 4.8 kW 60 HzVariants 7Becker KVX series 4 models
KVX 3.60Pumping speed 55 m³/h 50 Hz66 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6KVX 3.80Pumping speed 67 m³/h 50 Hz78.5 m³/h 60 HzUltimate pressure 100 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 6KVX 3.100Pumping speed 98 m³/h 50 Hz112 m³/h 60 HzUltimate pressure 100 mbarRated motor power 3 kW 50 Hz3.6 kW 60 HzVariants 8KVX 3.140Pumping speed 129 m³/h 50 Hz154 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4 kW 50 Hz4.5 – 4.8 kW 60 HzVariants 7Becker O series 6 models
Becker SV series 16 models
Becker T series 6 models
Becker U4 series 6 models
Becker U series 8 models
Becker VADS series 3 models
Becker VARIAIR RV series 1 model
Becker VASF series 6 models
Becker VATP series 1 model
Becker VTLF series 6 models
Becker VT series 7 models
Becker VXLF series 5 models
Becker VX series 4 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Edwards XDS series 2 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiScroll series 4 models
Pfeiffer Vacuum TORRI series 4 models
No model matches these filters.
Becker BCV series 7 models
Becker DVT series 4 models
Becker KVT series 4 models
Becker KVX series 4 models
Becker O series 6 models
Becker SV series 16 models
Becker T series 6 models
Becker U4 series 6 models
Becker U series 8 models
Becker VADS series 3 models
Becker VARIAIR RV series 1 model
Becker VASF series 6 models
Becker VATP series 1 model
Becker VTLF series 6 models
Becker VT series 7 models
Becker VXLF series 5 models
Becker VX series 4 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Edwards XDS series 2 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiScroll series 4 models
Pfeiffer Vacuum TORRI series 4 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Selection
Lasers and photonics: choosing a vacuum pump
What the manufacturers highlight for use in this industry.
Gas tightness
For laser gases what matters is that nothing escapes: for inert gas circulation in laser melting 3D printers Becker names a leak rate below 1×10⁻⁵ mbar·l/s and describes gas-tight blowers with KF flanges that circulate expensive gases without loss (SV, VASF, VARIAIR RV, VATP).
Cleanroom and particles
For the laser industry Becker names cleanroom-assembled blowers. For photonics research Pfeiffer Vacuum names a particle-free environment for the optics and lists A 100/200 L, ACP, HiScroll and TORRI for it in its product finder.
Pressure range of the pump chain
For ultra-high vacuum below 10⁻⁷ hPa Pfeiffer Vacuum names design, materials and a pump chain whose backing pump reaches about 10⁻³ hPa (DuoVane, HiScroll, ACP). As backing pumps for turbo and high-vacuum pumps Edwards lists XDS, RV, E2M, nXRi, GV and E2S and names a pressure below 0.03 mbar for the nXRi.
Evacuation before the shielding gas
Becker names the evacuation of the build chamber before inert gas filling in 3D printing and the evacuation of the CO₂ laser process circuit – both without a series. On its evacuation page Becker describes the quick removal of air or gas from chambers and vessels with VT, VX, KVT, KVX, VTLF, VXLF, O, U, U4, VADS, BCV, SV, VASF, VARIAIR RV, VATP, T and DVT.
Frequently asked questions
Lasers and photonics: frequently asked questions about vacuum pumps
Which vacuum pump for a CO₂ laser?
For the laser industry Becker lists the evacuation of the CO₂ laser process circuit and gas circulation in CO₂ lasers, there without a series. For gas circulation Becker names the gas-tight blowers SV, VASF, VARIAIR RV and VATP, for evacuating chambers VT, VX, KVT, KVX, VTLF, VXLF, O, U, U4, VADS, BCV, SV, VASF, VARIAIR RV, VATP, T and DVT.
Which blower for gas circulation in a laser?
Becker describes gas-tight blowers with KF flanges that circulate expensive gases without loss while heat exchangers provide cooling: SV, VASF, VARIAIR RV and VATP. For the laser industry Becker names gas-tight, cleanroom-assembled blowers that draw in and circulate noble gases such as helium and shielding gases.
Why must blowers for laser gases be gas-tight?
Because the gas is to stay in the circuit: Becker describes how gas-tight blowers circulate expensive gases without loss. For inert gas circulation in laser melting 3D printers Becker names a leak rate below 1×10⁻⁵ mbar·l/s (SV, VASF).
Which vacuum pump for laser melting in 3D printing?
For laser melting 3D printers Becker names SV and VASF: the shielding gas is extracted, filtered and returned, with a leak rate below 1×10⁻⁵ mbar·l/s. Becker lists the same series for conveying metal powder under inert gas. Becker names the evacuation of the build chamber before inert gas filling without a family.
How is the build chamber of a 3D printer evacuated before the shielding gas?
Becker lists the evacuation of the build chamber before inert gas filling as a step in additive manufacturing, without naming a family. On its evacuation page Becker describes the quick removal of air or gas from chambers and vessels with VT, VX, KVT, KVX, VTLF, VXLF, O, U, U4, VADS, BCV, SV, VASF, VARIAIR RV, VATP, T and DVT.
Which backing pump for high-power lasers?
For high-power lasers Edwards names a stable vacuum with the XDS scroll series. As backing pumps for turbo and high-vacuum pumps Edwards also lists RV, E2M, nXRi, GV and E2S and names a pressure below 0.03 mbar for the nXRi.
Which vacuum pump for photonics research?
For photonics research Pfeiffer Vacuum names a particle-free environment for the optics and lists A 100/200 L, ACP, HiScroll and TORRI in its product finder. Busch lists photonics research in its product finder with COBRA Industry and COBRA Semicon, without a description.
How much vacuum does an ultra-high vacuum set-up in optics need?
For ultra-high vacuum Pfeiffer Vacuum names a pressure below 10⁻⁷ hPa and counts photonics among its fields of use. According to Pfeiffer, it is reached through design, materials and the pump chain; the backing pump reaches about 10⁻³ hPa (DuoVane, HiScroll, ACP).
Are there vacuum pumps for burn-off extraction in laser welding?
Becker lists burn-off extraction in laser welding as a use in the laser industry, but gives neither a description nor a series for it.
Oil-free or oil-lubricated for laser applications?
For the laser industry Becker names the families of its rotary vane vacuum pumps – dry-running VT, VX, KVT, KVX, VTLF and VXLF, oil-lubricated O, U and U4 – as well as the SV, VASF, VARIAIR RV and VATP blowers. The page does not say which family stands for which use; the uses described, gas circulation and inert gas circulation, name only the blowers.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the number of machines – we advise you on selection, spare parts and service.
