Application
Vacuum pumps for electron beam and vacuum welding
In electron beam welding, the component lies in a vacuum chamber: the electron beam needs the vacuum, and without air the seam remains free of pores and oxide. Atlas Copco describes vacuum welding with little oxygen and nitrogen so that the seam does not oxidise; Busch names pore-free welds. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it ā 175 models from 4 manufacturers.
Compare 175 modelsHow it works
- 175Models
- 9Series
- 4Manufacturers
- 4Industries
Touch the points: each part of the system explains itself.
In short
Electron beam and vacuum welding: the key facts
- No oxidationAtlas Copco: little Oā and Nā in the chamber so that the seam does not oxidise ā in low to high vacuum.
- Pore-free seamsFor electron beam welding, Busch names pore-free welds and the COBRA, PANDA/PUMA and R5 series (in the product finder).
- Series namedPfeiffer Vacuum names DuoVane, HiLobe and HiScroll as well as the COMBI family; Leybold lists DRYVAC and SCREWLINE for welding technology, Edwards EXS for electron beam and plasma welding.
- Laser weldingBecker names the extraction of burn-off in laser welding without naming a series.
Operating principle
How it works: Electron beam and vacuum welding
The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.
- LoadingThe component is placed in the chamber and clamped, and the chamber closes.
- EvacuatingThe pumping station evacuates the chamber until the chamber pressure is reached ā according to Atlas Copco with little Oā and Nā so that the seam does not oxidise.
- WeldingThe electron beam welds the seam in vacuum ā according to Busch without pores. The chamber is then vented and unloaded.
Vacuum and sizing
Electron beam and vacuum welding: how much vacuum is needed
What the manufacturers say about pressure, pumping speed and sizing.
What vacuum
For vacuum welding, Atlas Copco names low to high vacuum without stating a pressure figure.
Pumping station
The chamber is evacuated again after each loading; for this, Pfeiffer Vacuum names the COMBI family alongside DuoVane, HiLobe and HiScroll. Which combination fits depends on chamber size and cycle time.
Burn-off and metal vapour
Becker names the extraction of burn-off in laser welding; separators or filters upstream of the pump retain metal vapour and burn-off.
Which pumps
Busch names COBRA, PANDA/PUMA and R5 (in the product finder), Pfeiffer Vacuum DuoVane, HiLobe and HiScroll, Leybold DRYVAC and SCREWLINE, Edwards EXS. Atlas Copco and Becker name the application without a series.
Technology
Electron beam and vacuum welding: the vacuum pumps the manufacturers name
Listed are the series the manufacturer itself names for this application. āShow only ā¦ā sets the filter of the product overview.
Oil-lubricated rotary vane vacuum pumps
70 models Ā· 1.25ā1,800 m³/h
Screw vacuum pumps
58 models Ā· 70ā5,760 m³/h
Roots vacuum pumps
43 models Ā· 250ā13,540 m³/h
Scroll vacuum pumps
4 models Ā· 6.1ā43 m³/h
Atlas Copco names the application without naming a series for it. Becker names the application without naming a series for it.
Product overview
Electron beam and vacuum welding: all 175 models compared
Use the filters on the left to narrow the selection ā by manufacturer, technology and the modelsā key figures, for 50 or 60 Hz.
Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards EXS series 11 models
Leybold DRYVAC series 9 models
Leybold SCREWLINE series 2 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
No model matches these filters.
Busch COBRA Industry series 36 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards EXS series 11 models
Leybold DRYVAC series 9 models
Leybold SCREWLINE series 2 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Models a manufacturer no longer carries in its current range are listed in its āOutdated modelsā section.
Industries
Electron beam and vacuum welding: where the manufacturers name it
The manufacturers list these uses on their own pages.
Metallurgy and heat treatment
Busch, Edwards and Pfeiffer Vacuum list electron beam welding under metallurgy and heat treatment; Edwards also names plasma welding with EXS there.
Automotive and transport
Busch names electron beam welding for automotive and transport ā pore-free welds with COBRA, PANDA/PUMA and R5; Pfeiffer Vacuum also lists it in this industry.
Aerospace
Atlas Copco names vacuum welding for aerospace: little Oā and Nā so that the seam does not oxidise, in low to high vacuum.
Mechanical engineering and manufacturing
For mechanical engineering, Becker names the extraction of burn-off in laser welding without naming a series.
Frequently asked questions
Electron beam and vacuum welding: frequently asked questions
How does electron beam welding in vacuum work?
The component lies in a chamber that is evacuated before welding; the electron beam then welds the seam. Busch names pore-free welds as the result, and Atlas Copco describes vacuum welding with little Oā and Nā so that the seam does not oxidise.
Why does electron beam welding need a vacuum?
The electron beam can only propagate undisturbed in vacuum, and without air no oxygen reaches the seam. Atlas Copco names little Oā and Nā against oxidation, Busch pore-free welds.
How much vacuum does a welding chamber need?
For vacuum welding, Atlas Copco names low to high vacuum without stating a pressure figure. The pump size depends on chamber size and cycle time.
Which vacuum pump for electron beam welding?
Busch names COBRA, PANDA/PUMA and R5, Pfeiffer Vacuum DuoVane, HiLobe and HiScroll as well as the COMBI family, Leybold DRYVAC and SCREWLINE, Edwards EXS. Atlas Copco describes vacuum welding without a series.
Oil-free or oil-lubricated for vacuum welding?
With DRYVAC and SCREWLINE, Leybold lists dry vacuum pumps for welding technology. Busch names the oil-lubricated R5 alongside COBRA and PANDA/PUMA, Pfeiffer Vacuum the oil-lubricated DuoVane alongside HiLobe and HiScroll ā so both designs are named.
What is vacuum welding?
Welding in an evacuated chamber. Atlas Copco describes it for aerospace: little Oā and Nā so that the seam does not oxidise, in low to high vacuum.
Which vacuum pump for plasma welding?
Edwards lists EXS for electron beam and plasma welding without describing the processes in more detail.
How is burn-off extracted during laser welding?
Becker names the extraction of burn-off in laser welding as an application without naming a series or figures. Separators or filters upstream of the pump retain the burn-off.
Why a pumping station with a Roots pump?
A Roots pump increases the pumping speed in the medium vacuum range but needs a backing pump ā this brings the chamber to working pressure faster after each loading. For electron beam welding, Pfeiffer Vacuum names the COMBI family alongside DuoVane, HiLobe and HiScroll.
Which series does Busch name for welding?
For electron beam welding, Busch names COBRA, PANDA/PUMA and R5 with pore-free welds, also in the product finder. On its metallurgy page, Busch lists welding with COBRA and PANDA/PUMA without describing it.
A single pump or a central vacuum system?
A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group ā more under Central Vacuum.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the volume ā we advise you on selection, spare parts and service.







