Technology
Scroll vacuum pumps
Two intermeshing scrolls compress dry, without oil in the pump chamber – for clean vacuum down into the medium vacuum range. 19 current models from 3 manufacturers – comparable by pumping speed and ultimate pressure.
Compare 19 modelsHow the technology works
- 19models
- 6series
- 3manufacturers
- 6 × 10⁻³ mbarlowest ultimate pressure
Touch the points: the parts explain themselves.
Manufacturers and series
3 manufacturers, 6 series
Each series leads to its page with all models. “Show only …” sets the filter of the product overview.
Edwards
10 models · 3–100 m³/h
Leybold
5 models · 3–20 m³/h
Pfeiffer Vacuum
4 models · 6.1–43 m³/h
Product overview
Compare all 19 models
The filters on the left narrow down the selection by the key figures of the models – for 50 or 60 Hz.
Edwards EDO series 2 models
Edwards EDO65Pumping speed 65 m³/h 50 Hz80 m³/h 60 HzUltimate pressure 1.5 mbarRated motor power 1.5 kW 50 HzVariants 4Edwards EDO100Pumping speed 100 m³/h 50 HzUltimate pressure 1.5 mbarRated motor power 2.2 kW 50 HzVariants 5Edwards mXDS series 2 models
Edwards mXDS3Pumping speed 3 m³/h 50 Hz3.5 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants 3Edwards mXDS3sPumping speed 3 m³/h 50 Hz3.5 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants 3Edwards nXDS series 4 models
Edwards nXDS6iPumping speed 6.2 m³/h 50 Hz6.2 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power Variants 3Edwards nXDS10iPumping speed 11.4 m³/h 50 Hz11.4 m³/h 60 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 3Edwards nXDS15iPumping speed 15.1 m³/h 50 Hz15.1 m³/h 60 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 3Edwards nXDS20iPumping speed 22 m³/h 50 Hz22 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 3Edwards XDS series 2 models
Edwards XDS35iPumping speed 35 m³/h 50 Hz35 m³/h 60 HzUltimate pressure 0.01 – 0.03 mbarRated motor power Variants 6Edwards XDS46iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants 2Leybold SCROLLVAC series 5 models
SCROLLVAC 3 plusPumping speed 3 m³/h 50 Hz3.5 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.18 – 0.21 kW 50 Hz0.18 – 0.21 kW 60 HzVariants 8SCROLLVAC 7 plusPumping speed 5.1 – 6.1 m³/h 50 Hz6.1 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.26 kW 50 Hz0.26 kW 60 HzVariants 6
SCROLLVAC 10 plusPumping speed 9.1 – 10.6 m³/h 50 Hz10.6 m³/h 60 HzUltimate pressure 9 × 10-3 mbarRated motor power 0.28 kW 50 Hz0.28 kW 60 HzVariants 6SCROLLVAC 15 plusPumping speed 12.6 – 14.5 m³/h 50 Hz14.5 m³/h 60 HzUltimate pressure 9 × 10-3 mbarRated motor power 0.3 kW 50 Hz0.3 kW 60 HzVariants 6SCROLLVAC 18 plusPumping speed 16.7 – 20 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 0.26 kW 50 Hz0.26 kW 60 HzVariants 6Pfeiffer Vacuum HiScroll series 4 models
HiScroll 6Pumping speed 6.1 m³/h 50 HzUltimate pressure 0.015 mbarRated motor power Variants 7HiScroll 12Pumping speed 12.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 7HiScroll 18Pumping speed 18.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 11HiScroll 46Pumping speed 43 m³/h 50 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 11No model matches these filters.
Edwards EDO series 2 models
Edwards mXDS series 2 models
Edwards nXDS series 4 models
Edwards XDS series 2 models
Leybold SCROLLVAC series 5 models
Pfeiffer Vacuum HiScroll series 4 models
Models that a manufacturer no longer carries in its current range are not part of this overview; they are listed in its “Outdated models” section – for example under outdated Leybold models.
Operating principle
How a scroll vacuum pump works
One scroll is fixed; the second moves on a small circular path without rotating itself. Crescent-shaped chambers form between the scroll walls: they take up gas at the outside, travel towards the centre and become smaller and smaller as they do so. At the centre the compressed gas leaves the scrolls.
The drawing shows the basic principle. The designs of the individual manufacturers differ in detail.
- SuctionAt the edge a chamber (D) opens between the scrolls and takes up gas from the inlet (A).
- CompressionThe movement of the scroll (C) closes off the chamber and pushes it towards the centre; its volume decreases as it goes.
- DischargeAt the centre the compressed gas is expelled through the outlet (E).
Key figures
The technology in figures
The ranges result from the current models in our range.
Pumping speed (50 Hz)
3 to 100 m³/hin our range
Ultimate pressure
6 × 10⁻³ to 1.5 mbarin our range
Ultimate pressure compared (mbar, logarithmic)
For comparison: the oil-lubricated rotary vane vacuum pumps in our range reach 1 × 10⁻³ to 20 mbar.
What characterises the technology
Dry compression
Scroll vacuum pumps work without oil in the pump chamber.
Tip seals
Seals at the tips of the scroll walls (tip seals) seal the chambers. They are replaced during maintenance.
Gas ballast
Many models have a gas ballast with which the pump can also handle water vapour.
Hermetically sealed
In hermetically sealed designs the bearings do not come into contact with the process gas, and no bearing lubricant gets into the vacuum.
Advantages
What speaks for this technology
- Oil-free: dry scroll principle
- Ultimate pressures down into the medium vacuum range
- Quiet, low-vibration running
- Compact design
- Low maintenance effort
- Gas ballast, depending on the version
- Hermetically sealed designs, depending on the series
Applications
Where they work
- Research and laboratoryuniversities, research institutions, laboratory vacuum
- Backing pumpfor turbomolecular pumps
- Leak detectionleak detectors, leak testing
- Clean processesfreeze drying, vacuum drying, electron beam welding
- Manufacturingpick and place, printed circuit board production, holding and lifting, vacuum degassing
- Plant engineeringsmall system builders and OEMs
Frequently asked questions
Questions about scroll vacuum pumps
How does a scroll vacuum pump work?
A fixed scroll and an orbiting scroll mesh with each other. The orbiting scroll moves on a small circular path; this creates chambers that take up the gas at the outside, transport it to the centre and compress it. The drawing in the section Operating principle shows every step.
Are scroll vacuum pumps oil-free?
Yes: they compress dry, without oil in the pump chamber. In hermetically sealed designs no bearing lubricant comes into contact with the vacuum either.
What ultimate pressure do scroll vacuum pumps reach?
The models in our range state ultimate pressures from 6 × 10⁻³ to 1.5 mbar – depending on the series and size. In the product overview, the “Ultimate pressure” filter narrows down the selection.
From which manufacturers does Ehrler & Beck carry this technology?
Currently from Edwards, Leybold and Pfeiffer Vacuum. The series are listed in the section Manufacturers and series.
How do I find the right model?
In the product overview, the filters narrow down the selection by the key figures of the models. For sizing, it is best to tell us the gas to be conveyed, the working pressure and the flow rate you need – we will be glad to advise you.
What do the figures for 50 Hz and 60 Hz mean?
Flow rate and rated motor power depend on the mains frequency. The overview therefore shows both values wherever the manufacturer states them, and the size filters can be switched between 50 Hz and 60 Hz.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which model fits your process?
Tell us the gas to be conveyed, the working pressure and the flow rate you need – we will advise you on selection, spare parts and service.
