Application
Vacuum pumps for leak detection and leak testing
In leak detection, a test object or a test chamber is evacuated; a leak detector then detects the tracer gas that enters or escapes through leaks. Leybold describes leak testing with helium as the tracer gas for the quality control of systems and products, and according to Atlas Copco, a defined vacuum makes the smallest leaks detectable. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it – 319 models from 5 manufacturers.
Compare 319 modelsHow it works
- 319Models
- 25Series
- 5Manufacturers
- below 0.1 mbarTest chamber in refrigerant circuit testing (Leybold)
Touch the points: each part of the system explains itself.
In short
Leak detection and leak testing: the key facts
- Helium tracer gasLeybold describes helium leak testing as the quality control of systems and products; Pfeiffer Vacuum names the spraying of helium from outside, with the leak detector on the evacuated system locating the leaks.
- Test chamberFor leak testing of cooling circuits, Leybold describes an evacuated test chamber at typically below 0.1 mbar, in which a leak detector looks for escaping refrigerant.
- Leak ratesFor helium spraying, Pfeiffer Vacuum names leaks in the range of about 10⁻⁷ to 10⁻⁹ mbar·l/s, and for container closure integrity testing (CCIT) ≤10⁻⁹ mbar·l/s for leaks up to 0.1 µm and about 10⁻⁶ mbar·l/s from 0.2 µm.
- Pumping speedFor helium leak testing, Leybold names TRIVAC with 4–90 m³/h, SCROLLVAC with 3–18 m³/h, ECODRY with 25–65 m³/h and VARODRY with 65–200 m³/h, plus RUVAC with SOGEVAC or DRYVAC.
Operating principle
How it works: Leak detection and leak testing
The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.
- EvacuationThe test chamber or test object is evacuated to the test pressure; for the test chamber in cooling circuit testing, Leybold names typically below 0.1 mbar.
- TestingHelium is used as the tracer gas or sprayed on from outside, and the leak detector detects it; in refrigerant circuit testing, according to Leybold, it looks for escaping refrigerant.
- EvaluationThe leak detector locates the leak or measures the leak rate; Pfeiffer Vacuum points out that spraying locates leaks but does not measure a leak rate.
Vacuum and sizing
Leak detection and leak testing: how much vacuum is needed
What the manufacturers say about pressure, pumping speed and sizing.
Which vacuum
For leak testing, Atlas Copco names low to high vacuum. Leybold describes the test chamber in cooling circuit testing as typically below 0.1 mbar. Pfeiffer Vacuum names the helium spray method for semiconductors, plant engineering and ultra-high vacuum.
Which pumping speed
For helium leak testing, Leybold names TRIVAC with 4–90 m³/h, SCROLLVAC with 3–18 m³/h, ECODRY with 25–65 m³/h and VARODRY with 65–200 m³/h, plus RUVAC with SOGEVAC or DRYVAC and TURBOVAC.
Which leak rates
For helium spraying, Pfeiffer Vacuum names leaks in the range of about 10⁻⁷ to 10⁻⁹ mbar·l/s. In container closure integrity testing (CCIT), the figures are ≤10⁻⁹ mbar·l/s for leaks up to 0.1 µm and about 10⁻⁶ mbar·l/s from 0.2 µm – non-destructive and down to −80 °C.
What the manufacturers point out
Pfeiffer Vacuum: spraying locates leaks but does not measure a leak rate. Leybold: air-conditioning compressors are tested before installation, and in the hydrogen infrastructure, pipes, valves, vessels, electrolysers and fuel cells must be leak-tight. Busch names leak detection as the end-of-line test of batteries, tanks and HVAC.
Technology
Leak detection and leak testing: the vacuum pumps the manufacturers name
Listed are the series the manufacturer itself names for this application. “Show only …” sets the filter of the product overview.
Oil-lubricated rotary vane vacuum pumps
138 models · 0.75–1,800 m³/h
Roots vacuum pumps
91 models · 14–13,540 m³/h
Screw vacuum pumps
45 models · 70–4,652 m³/h
Claw vacuum pumps
32 models · 18–1,150 m³/h
Scroll vacuum pumps
11 models · 3–43 m³/h
Rotary piston vacuum pumps
2 models · 234–442 m³/h
Product overview
Leak detection and leak testing: all 319 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Atlas Copco DRB series 4 models
DRB 250Pumping speed 253 m³/h 50 Hz304 m³/h 60 HzUltimate pressure Rated motor power 1.1 kW 50 Hz1.1 kW 60 HzVariants 2
DRB 500Pumping speed 505 m³/h 50 Hz606 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2DRB 1000Pumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4 kW 60 HzVariants 2DRB 2000Pumping speed 2,050 m³/h 50 Hz2,460 m³/h 60 HzUltimate pressure Rated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2Atlas Copco GLS series 2 models
Atlas Copco GVD series 13 models
GVD 0.7Pumping speed 0.75 m³/h 50 Hz0.95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.09 kW 50 Hz0.09 kW 60 HzVariants 2GVD 1.5Pumping speed 1.6 m³/h 50 Hz2 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 2GVD 3Pumping speed 3.3 m³/h 50 Hz3.9 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 4GVD 5Pumping speed 5.1 m³/h 50 Hz6.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 4GVD 8Pumping speed 8.5 m³/h 50 Hz10 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5GVD 12Pumping speed 12 m³/h 50 Hz14.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5GVD 18Pumping speed 17 m³/h 50 Hz20.4 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 3GVD 28Pumping speed 27.5 m³/h 50 Hz33 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 3GVD 45Pumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 kW 50 Hz1.3 kW 60 HzVariants 1GVD 65Pumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 1GVD 85Pumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.6 kW 60 HzVariants 1GVD 175Pumping speed 160 m³/h 50 Hz196 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 2GVD 275Pumping speed 255 m³/h 50 Hz306 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 2Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants 
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants 
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants 
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants 
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants 
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants 
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants 
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants 
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants 
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants 
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants Busch MINK series 32 models
MINK MB 0018 APumping speed 18 m³/h 50 Hz18 m³/h 60 HzUltimate pressure 600 mbarRated motor power 0.5 kW 50 Hz0.5 kW 60 HzVariants 2
MINK MV 0040 E ECOTORQUEPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MI 2124 BVPumping speed 50 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 20 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 
MINK MV 0060 E ECOTORQUEPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MM 0084 APumping speed 62 m³/h 50 Hz75 m³/h 60 HzUltimate pressure 60 mbarRated motor power 1.5 kW 50 Hz1.7 kW 60 HzVariants MINK MM 1104 BVPumping speed 62 m³/h 50 Hz75 m³/h 60 HzUltimate pressure 60 mbarRated motor power 1.5 kW 50 Hz1.7 kW 60 HzVariants 10
MINK MM 1104 CVMPumping speed 62 m³/h 50 HzUltimate pressure 400 mbarRated motor power 1.3 kW 50 HzVariants 
MINK MM 0104 APumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 60 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 
MINK MM 1144 BVPumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 60 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 9
MINK MV 0080 E ECOTORQUEPumping speed 80 m³/h 50 Hz80 m³/h 60 HzUltimate pressure 40 mbarRated motor power Variants 
MINK MM 0142 APumping speed 110 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 40 mbarRated motor power 3 kW 50 Hz3.4 kW 60 HzVariants 
MINK MM 1102 BVPumping speed 110 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 60 mbarRated motor power 3 kW 50 Hz3.4 kW 60 HzVariants 6
MINK MM 1102 CVMPumping speed 110 m³/h 50 HzUltimate pressure 400 mbarRated motor power 2.2 kW 50 HzVariants 
MINK MI 2122 BVPumping speed 120 m³/h 50 Hz145 m³/h 60 HzUltimate pressure 20 mbarRated motor power 5.1 kW 50 Hz6.8 kW 60 HzVariants 
MINK MM 0182 APumping speed 140 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 40 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 
MINK MM 1142 BVPumping speed 140 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 60 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 13
MINK MM 1324 AVPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 60 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2
MINK MM 1202 AVPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 100 mbarRated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 11
MINK MM 1252 AVPumping speed 245 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 100 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 8MINK MW 0332 BPumping speed 280 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.8 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
MINK MV 0312 BPumping speed 290 m³/h 50 Hz345 m³/h 60 HzUltimate pressure 150 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 4
MINK MM 1322 AVPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 150 mbarRated motor power 6 kW 50 Hz8 kW 60 HzVariants 10
MINK MV 0310 BPumping speed 345 m³/h 50 Hz345 m³/h 60 HzUltimate pressure 150 mbarRated motor power 6 kW 50 Hz6 kW 60 HzVariants MINK MV 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 100 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 
MINK MM 1402 AVPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 3
MINK MV 0502 BPumping speed 400 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 2
MINK MV 0500 BPumping speed 470 m³/h 50 Hz470 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
MINK MM 1502 AVPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 5
MINK MV 0602 BPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 3
MINK MV 0600 BPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 200 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
MINK MV 1202 BPumping speed 950 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 200 mbarRated motor power 18.5 kW 50 Hz22 kW 60 HzVariants 3MINK MV 1200 B ECOTORQUEPumping speed 1,150 m³/h 50 Hz1,150 m³/h 60 HzUltimate pressure 200 mbarRated motor power 25 kW 50 Hz25 kW 60 HzVariants Busch PANDA/PUMA series 26 models
PANDA WV 0250 CPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure Rated motor power 1 kW 50 Hz1.2 kW 60 HzVariants PANDA WZ 0250 BPumping speed 263 m³/h 50 Hz315 m³/h 60 HzUltimate pressure Rated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants PANDA WV 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants 4PUMA WY 0500 CPumping speed 500 m³/h 50 Hz600 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0500 D2Pumping speed 520 m³/h 50 Hz620 m³/h 60 HzUltimate pressure Rated motor power 2.2 kW 50 Hz3 kW 60 HzVariants PANDA WZ 0500 BPumping speed 525 m³/h 50 Hz630 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 0700 DPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PUMA WY 0700 CPumping speed 700 m³/h 50 Hz840 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1000 D2Pumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants PANDA WV 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 5PANDA WZ 1200 APumping speed 1,050 m³/h 50 Hz1,260 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WY 1250 CPumping speed 1,250 m³/h 50 Hz1,500 m³/h 60 HzUltimate pressure Rated motor power 4 kW 50 Hz4.4 kW 60 HzVariants PUMA WP 1250 D2Pumping speed 1,295 m³/h 50 Hz1,555 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants PANDA WV 1800 APumping speed 1,600 m³/h 50 Hz1,920 m³/h 60 HzUltimate pressure Rated motor power 4.3 kW 50 Hz5.2 kW 60 HzVariants 5PUMA WY 2000 CPumping speed 2,010 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PUMA WP 2000 D2Pumping speed 2,020 m³/h 50 Hz2,435 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants PANDA WV 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz7 kW 60 HzVariants 5PANDA WZ 2400 APumping speed 2,120 m³/h 50 Hz2,540 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants PANDA WV 2200 APumping speed 2,155 m³/h 50 Hz2,585 m³/h 60 HzUltimate pressure Rated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants PUMA WY 3600 APumping speed 3,600 m³/h 50 Hz3,600 m³/h 60 HzUltimate pressure Rated motor power 15 kW 50 Hz15 kW 60 HzVariants PANDA WV 4500 BPumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants 4PUMA WP 4500 B2Pumping speed 4,500 m³/h 50 Hz5,400 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz12.6 kW 60 HzVariants PUMA WP 5400 APumping speed 6,480 m³/h 50 Hz6,480 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WP 8100 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants PUMA WY 8000 APumping speed 8,100 m³/h 50 Hz8,100 m³/h 60 HzUltimate pressure Rated motor power 11 kW 50 Hz11 kW 60 HzVariants PUMA WG 9600Pumping speed 12,000 m³/h 50 Hz12,000 m³/h 60 HzUltimate pressure 130 mbarRated motor power Variants Busch R5 series 58 models
R5 PB 0003 DPumping speed 3 m³/h 50 Hz3.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants R5 PB 0004 CPumping speed 4 m³/h 50 Hz4.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants R5 PB 0008 CPumping speed 8 m³/h 50 Hz9.6 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.35 kW 50 Hz0.45 kW 60 HzVariants 
R5 KB 0010 EPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants 1R5 KD 0012 APumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants R5 RA 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1R5 RC 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1R5 KB 0016 EPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants 1R5 KD 0020 APumping speed 16 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants R5 RA 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1R5 RC 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1R5 KB 0020 DPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 1
R5 RB 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 2R5 RC 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants R5 KD 0025 APumping speed 22 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants R5 KB 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 1
R5 RA 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1 kW 50 Hz1.2 kW 60 HzVariants 3R5 KB 0040 DPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1R5 RA 0040 FPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.4 kW 50 Hz1.7 kW 60 HzVariants 3R5 RE 0040 CPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz2.2 kW 60 HzVariants R5 RA 0063 FPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 3R5 RE 0063 CPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3 kW 60 HzVariants R5 RA 0100 FPumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.7 kW 50 Hz3.4 kW 60 HzVariants 3R5 RA 0155 APumping speed 150 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants R5 RA 0165 DPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3R5 RA 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.8 kW 60 HzVariants 
R5 RD 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2R5 RA 0165 D ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0200 A ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0205 DPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3R5 RA 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants R5 RD 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 1R5 RA 0205 D ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0240 A ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0255 DPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants 3R5 RD 0300 APumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 1R5 RA 0255 D ECOTORQUEPumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0305 DPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 8.3 kW 50 Hz10 kW 60 HzVariants 3R5 RA 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants R5 RD 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 2R5 RA 0305 D ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0400 CPumping speed 410 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 3R5 RA 0520 APumping speed 430 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz12.5 kW 60 HzVariants 1R5 RA 0400 C ECOTORQUEPumping speed 480 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0502 CPumping speed 510 m³/h 50 Hz590 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 1R5 RA 0520 A ECOTORQUEPumping speed 520 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0502 C ECOTORQUEPumping speed 580 m³/h 50 Hz580 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0600 A ECOTORQUEPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 0630 CPumping speed 630 m³/h 50 Hz760 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 2R5 RA 0630 C ECOTORQUEPumping speed 745 m³/h 50 Hz745 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants R5 RA 0840 A ECOTORQUEPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 0840 B PLUSPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants R5 RA 1000 BPumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 22 kW 50 Hz30 kW 60 HzVariants 1R5 RA 1000 A PLUSPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants R5 RA 1000 B ECOTORQUEPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power Variants R5 RA 1600 BPumping speed 1,600 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz37 kW 60 HzVariants 1R5 RA 1600 A PLUSPumping speed 1,800 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants Edwards E2M series 9 models
Edwards E2M0.7Pumping speed 0.75 m³/h 50 Hz0.95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.09 kW 50 Hz0.09 kW 60 HzVariants 2
Edwards E2M1.5Pumping speed 1.6 m³/h 50 Hz2 m³/h 60 HzUltimate pressure 1.5 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 4Edwards E2M2.5Pumping speed 2.5 m³/h 50 Hz3 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 2
Edwards E2M18Pumping speed 17 m³/h 50 Hz20.4 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 0.9 kW 60 HzVariants 8
Edwards E2M28Pumping speed 27.5 m³/h 50 Hz33 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 7
Edwards E2M40Pumping speed 37 m³/h 50 Hz44 m³/h 60 HzUltimate pressure 4.5 × 10-3 – 0.01 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.5 kW 60 HzVariants 9
Edwards E2M80Pumping speed 74 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 3 × 10-3 – 0.01 mbarRated motor power 2.2 – 3 kW 50 Hz3 kW 60 HzVariants 9
Edwards E2M175Pumping speed 160 m³/h 50 Hz196 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 5
Edwards E2M275Pumping speed 255 m³/h 50 Hz306 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 5Edwards E2S series 3 models
Edwards E2S45Pumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 2Edwards E2S65Pumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 2Edwards E2S85Pumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 2Edwards nXRi series 5 models
Edwards nXR30iPumping speed 30 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR40iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR60iPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR90iPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards nXR120iPumping speed 120 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1Edwards Stokes series 4 models
Edwards Stokes 607Pumping speed 1,733 m³/h 50 Hz2,080 m³/h 60 HzUltimate pressure Rated motor power Variants 4Edwards Stokes 615Pumping speed 3,685 m³/h 50 Hz4,420 m³/h 60 HzUltimate pressure Rated motor power Variants 4Edwards Stokes 615 BPPumping speed 3,685 m³/h 50 Hz4,420 m³/h 60 HzUltimate pressure Rated motor power Variants 10Edwards Stokes 622Pumping speed 5,525 m³/h 50 Hz6,630 m³/h 60 HzUltimate pressure Rated motor power Variants 7Edwards XDS series 2 models
Edwards XDS35iPumping speed 35 m³/h 50 Hz35 m³/h 60 HzUltimate pressure 0.01 – 0.03 mbarRated motor power Variants 6Edwards XDS46iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants 2Leybold DRYVAC series 9 models
DRYVAC DV 200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 500Pumping speed 380 – 460 m³/h 50 Hz380 – 460 m³/h 60 HzUltimate pressure 0.01 – 0.05 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5
DRYVAC DV 650Pumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 33DRYVAC DV 650 FPPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 8
DRYVAC DV 800Pumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 11DRYVAC DV 800 FP-rPumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 4
DRYVAC DV 1200Pumping speed 1,250 m³/h 50 Hz1,250 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 3DRYVAC DV 1600Pumping speed 1,600 m³/h 50 Hz1,600 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 39.2 kW 50 Hz39.2 kW 60 HzVariants 1Leybold ECODRY series 5 models
ECODRY 25 plusPumping speed 25 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 0.85 kW 50 Hz0.85 kW 60 HzVariants 1
ECODRY 35 plusPumping speed 35 m³/h 50 Hz35 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 0.85 kW 50 Hz0.85 kW 60 HzVariants 1
ECODRY 40 plusPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 1.2 kW 50 Hz1.2 kW 60 HzVariants 2ECODRY 65 He plusPumping speed 55 m³/h 50 Hz55 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 1.2 kW 50 Hz1.2 kW 60 HzVariants 2
ECODRY 65 plusPumping speed 55 m³/h 50 Hz55 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 1.2 kW 50 Hz1.2 kW 60 HzVariants 4Leybold RUVAC WA/WAU series 8 models
RUVAC WA 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.1 kW 60 HzVariants 3
RUVAC WAU 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.1 kW 60 HzVariants 5
RUVAC WA 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 4
RUVAC WAU 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 6
RUVAC WA 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 3
RUVAC WAU 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 6
RUVAC WA 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 3
RUVAC WAU 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 7Leybold RUVAC WH/WHU series 7 models
RUVAC WH 700Pumping speed 620 m³/h 50 Hz740 m³/h 60 HzUltimate pressure Rated motor power 2.2 – 3.8 kW 50 Hz2.6 – 3.8 kW 60 HzVariants 9
RUVAC WH 2500Pumping speed 2,200 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure Rated motor power 6.2 – 11 kW 50 Hz7.4 – 11 kW 60 HzVariants 24
RUVAC WHU 2500Pumping speed 2,200 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure Rated motor power 6.2 kW 50 Hz7.4 kW 60 HzVariants 10
RUVAC WH 4400Pumping speed 3,300 m³/h 50 Hz3,900 m³/h 60 HzUltimate pressure Rated motor power 11 – 18.5 kW 50 Hz11 – 18.5 kW 60 HzVariants 14
RUVAC WHU 4400Pumping speed 3,300 m³/h 50 Hz3,900 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 7
RUVAC WH 7000Pumping speed 4,700 m³/h 50 Hz5,300 m³/h 60 HzUltimate pressure Rated motor power 11 – 18.5 kW 50 Hz11 – 18.5 kW 60 HzVariants 19
RUVAC WHU 7000Pumping speed 4,700 m³/h 50 Hz5,300 m³/h 60 HzUltimate pressure Rated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 3Leybold RUVAC WS/WSU series 8 models
RUVAC WS 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.4 kW 60 HzVariants 2
RUVAC WSU 251Pumping speed 210 m³/h 50 Hz251 m³/h 60 HzUltimate pressure 8 × 10-4 mbarRated motor power 1.1 kW 50 Hz1.4 kW 60 HzVariants 4
RUVAC WS 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 2
RUVAC WSU 501Pumping speed 410 m³/h 50 Hz530 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 2.2 kW 50 Hz2.4 kW 60 HzVariants 5
RUVAC WS 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 3
RUVAC WSU 1001Pumping speed 800 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 6
RUVAC WS 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 11
RUVAC WSU 2001Pumping speed 1,850 m³/h 50 Hz2,100 m³/h 60 HzUltimate pressure 0.04 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 15Leybold SCROLLVAC series 5 models
SCROLLVAC 3 plusPumping speed 3 m³/h 50 Hz3.5 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.18 – 0.21 kW 50 Hz0.18 – 0.21 kW 60 HzVariants 8SCROLLVAC 7 plusPumping speed 5.1 – 6.1 m³/h 50 Hz6.1 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.26 kW 50 Hz0.26 kW 60 HzVariants 6
SCROLLVAC 10 plusPumping speed 9.1 – 10.6 m³/h 50 Hz10.6 m³/h 60 HzUltimate pressure 9 × 10-3 mbarRated motor power 0.28 kW 50 Hz0.28 kW 60 HzVariants 6SCROLLVAC 15 plusPumping speed 12.6 – 14.5 m³/h 50 Hz14.5 m³/h 60 HzUltimate pressure 9 × 10-3 mbarRated motor power 0.3 kW 50 Hz0.3 kW 60 HzVariants 6SCROLLVAC 18 plusPumping speed 16.7 – 20 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 0.26 kW 50 Hz0.26 kW 60 HzVariants 6Leybold SOGEVAC series 23 models
SOGEVAC SV 10 BPumping speed 9.5 m³/h 50 Hz11.5 m³/h 60 HzUltimate pressure 1.5 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 3
SOGEVAC SV 16 DPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 13SOGEVAC SV 16 DIPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 4
SOGEVAC SV 16 BPumping speed 15 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 7
SOGEVAC SV 25 BPumping speed 22.5 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 12
SOGEVAC SV 25 DPumping speed 22.5 m³/h 50 Hz25.5 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 15
SOGEVAC SV 28 BIPumping speed 23 m³/h 50 Hz27 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 1.1 kW 60 HzVariants 2SOGEVAC SV 40 BI FCPumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3SOGEVAC SV 55 BI²Pumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 4
SOGEVAC SV 40 BPumping speed 38.5 m³/h 50 Hz47 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.1 kW 50 Hz1.5 kW 60 HzVariants 25
SOGEVAC SV 40 BIPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 1.1 – 1.3 kW 50 Hz1.3 – 1.6 kW 60 HzVariants 3SOGEVAC SV 65 BI FCPumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 2SOGEVAC SV 70 BI²Pumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 2
SOGEVAC SV 65 BPumping speed 54 m³/h 50 Hz64 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 22
SOGEVAC SV 100 BPumping speed 87.5 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3.5 kW 60 HzVariants 31SOGEVAC SV 120 BI FCPumping speed 90 – 100 m³/h 50 Hz90 – 100 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
SOGEVAC SV 120 BPumping speed 110 m³/h 50 Hz122 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.4 kW 50 Hz3.2 kW 60 HzVariants 12
SOGEVAC SV 220 BPumping speed 180 m³/h 50 Hz220 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 4.5 kW 50 Hz4.8 kW 60 HzVariants 8
SOGEVAC SV 300 BPumping speed 240 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants 45
SOGEVAC SV 320 BPumping speed 284 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 6
SOGEVAC SV 570 BPumping speed 470 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 11 kW 50 Hz11 – 13.2 kW 60 HzVariants 6
SOGEVAC SV 630 BPumping speed 640 m³/h 50 Hz755 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 34
SOGEVAC SV 750 BPumping speed 755 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 18.5 kW 50 HzVariants 15Leybold TRIVAC series 20 models
TRIVAC D 2,5 EPumping speed 2.7 m³/h 50 Hz3.3 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.28 – 0.29 kW 50 Hz0.3 – 0.31 kW 60 HzVariants 3
TRIVAC D 4 BPumping speed 4.2 m³/h 50 Hz5 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3TRIVAC D 4 TPumping speed 4.3 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.25 – 0.57 kW 50 Hz0.25 – 0.66 kW 60 HzVariants 2TRIVAC D 5 LPumping speed 5.1 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2TRIVAC D 8 TPumping speed 8.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.37 – 0.66 kW 60 HzVariants 2
TRIVAC D 8 BPumping speed 8.5 m³/h 50 Hz10.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.57 kW 50 Hz0.44 – 0.66 kW 60 HzVariants 3TRIVAC D 12 LPumping speed 12 m³/h 50 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 kW 50 HzVariants 2TRIVAC D 16 TPumping speed 16.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.55 – 0.75 kW 60 HzVariants 2
TRIVAC D 16 BPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 6
TRIVAC D 16 BCSPumping speed 16.5 m³/h 50 Hz19.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 25 BPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 0.75 – 0.9 kW 50 Hz0.75 – 0.9 kW 60 HzVariants 4
TRIVAC D 25 BCSPumping speed 25.7 m³/h 50 Hz30.8 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2TRIVAC D 30 TPumping speed 30.2 m³/h 50 HzUltimate pressure 5 × 10-3 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 2
TRIVAC D 40 BPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.6 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
TRIVAC D 40 BCSPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2TRIVAC D 40 LPumping speed 42 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.3 – 1.5 kW 60 HzVariants 4TRIVAC D 63 LPumping speed 60 m³/h 50 Hz72 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 1.5 – 2.2 kW 50 Hz1.8 – 2.2 kW 60 HzVariants 4
TRIVAC D 65 BPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 1
TRIVAC D 65 BCSPumping speed 65 m³/h 50 Hz78 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2TRIVAC D 90 LPumping speed 79 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 2.2 – 3 kW 50 Hz2.6 – 3 kW 60 HzVariants 3Pfeiffer Vacuum A 100/200 L series 3 models
A 100 LPumping speed 100 m³/h 50 HzUltimate pressure 0.012 mbarRated motor power Variants 8A 100 L ESPumping speed 100 m³/h 50 HzUltimate pressure 3 × 10-3 mbarRated motor power Variants 3A 200 LPumping speed 200 m³/h 50 HzUltimate pressure 0.013 mbarRated motor power Variants 5Pfeiffer Vacuum ACP series 4 models
ACP 15Pumping speed 14 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power Variants 9ACP 28Pumping speed 27 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 14ACP 40Pumping speed 37 m³/h 50 HzUltimate pressure 0.04 mbarRated motor power Variants 15ACP 90Pumping speed 88 m³/h 50 HzUltimate pressure 0.03 mbarRated motor power Variants 6Pfeiffer Vacuum DuoVane series 12 models
DuoVane 1.6Pumping speed 1.25 m³/h 50 Hz1.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.075 kW 50 Hz0.09 kW 60 HzVariants 9DuoVane 3Pumping speed 2.5 m³/h 50 Hz2.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.25 kW 50 Hz0.3 kW 60 HzVariants 10DuoVane 6Pumping speed 5.5 m³/h 50 Hz6.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 2DuoVane 12Pumping speed 9.5 m³/h 50 Hz11.8 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5DuoVane 18Pumping speed 14 m³/h 50 Hz16.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 2DuoVane 22Pumping speed 19.5 m³/h 50 Hz22.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 5DuoVane 30Pumping speed 24 m³/h 50 Hz29 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1DuoVane 36Pumping speed 32 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.1 kW 50 Hz1.3 kW 60 HzVariants 11DuoVane 70Pumping speed 62 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 13DuoVane 95Pumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 1DuoVane 135Pumping speed 115 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 4 kW 50 Hz4.5 kW 60 HzVariants 3DuoVane 300Pumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 3Pfeiffer Vacuum HiLobe series 17 models
HiLobe 1002Pumping speed 1,050 m³/h 50 HzUltimate pressure Rated motor power 2 kW 50 HzVariants 1HiLobe 1004Pumping speed 1,050 m³/h 50 HzUltimate pressure Rated motor power 2 kW 50 HzVariants 2HiLobe 1302Pumping speed 1,300 m³/h 50 HzUltimate pressure Rated motor power 2.5 kW 50 HzVariants 2HiLobe 1304Pumping speed 1,300 m³/h 50 HzUltimate pressure Rated motor power 2.5 kW 50 HzVariants 2HiLobe 2104Pumping speed 2,100 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 2HiLobe 2703Pumping speed 2,700 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 1HiLobe 2704Pumping speed 2,700 m³/h 50 HzUltimate pressure Rated motor power 3.5 kW 50 HzVariants 2HiLobe 4504Pumping speed 4,440 m³/h 50 HzUltimate pressure Rated motor power 5.5 kW 50 HzVariants 2HiLobe 4503Pumping speed 4,500 m³/h 50 HzUltimate pressure Rated motor power 5.5 kW 50 HzVariants 1HiLobe 6203Pumping speed 6,200 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants 1HiLobe 6204Pumping speed 6,220 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants 2HiLobe 8103Pumping speed 8,120 m³/h 50 HzUltimate pressure Rated motor power 9 kW 50 HzVariants 1HiLobe 8104Pumping speed 8,120 m³/h 50 HzUltimate pressure Rated motor power 9 kW 50 HzVariants 1HiLobe 11003Pumping speed 10,830 m³/h 50 HzUltimate pressure Rated motor power 12 kW 50 HzVariants 1HiLobe 11004Pumping speed 10,830 m³/h 50 HzUltimate pressure Rated motor power 12 kW 50 HzVariants 1HiLobe 14003Pumping speed 13,540 m³/h 50 HzUltimate pressure Rated motor power 15 kW 50 HzVariants 1HiLobe 14004Pumping speed 13,540 m³/h 50 HzUltimate pressure Rated motor power 15 kW 50 HzVariants 1Pfeiffer Vacuum HiScroll series 4 models
HiScroll 6Pumping speed 6.1 m³/h 50 HzUltimate pressure 0.015 mbarRated motor power Variants 7HiScroll 12Pumping speed 12.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 7HiScroll 18Pumping speed 18.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 11HiScroll 46Pumping speed 43 m³/h 50 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 11No model matches these filters.
Atlas Copco DRB series 4 models
Atlas Copco GLS series 2 models
Atlas Copco GVD series 13 models
Busch COBRA Industry series 36 models
Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards E2M series 9 models
Edwards E2S series 3 models
Edwards nXRi series 5 models
Edwards Stokes series 4 models
Edwards XDS series 2 models
Leybold DRYVAC series 9 models
Leybold ECODRY series 5 models
Leybold RUVAC WA/WAU series 8 models
Leybold RUVAC WH/WHU series 7 models
Leybold RUVAC WS/WSU series 8 models
Leybold SCROLLVAC series 5 models
Leybold SOGEVAC series 23 models
Leybold TRIVAC series 20 models
Pfeiffer Vacuum A 100/200 L series 3 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Industries
Leak detection and leak testing: where the manufacturers name it
The manufacturers list these uses on their own pages.
Battery manufacturing
Leybold describes the helium leak test of the finished cell and names TRIVAC and SCROLLVAC for it; Busch and Pfeiffer Vacuum also list leak detection in battery manufacturing.
Automotive and transport
Busch names leak detection and end-of-line leak testing of batteries, tanks and HVAC with COBRA; Pfeiffer Vacuum also lists the application for automotive and transport.
Hydrogen and fuel cells
According to Leybold, pipes, valves, vessels, electrolysers and fuel cells must be leak-tight; Busch and Pfeiffer Vacuum also name leak detection for the hydrogen industry.
Refrigeration and air conditioning
Busch and Pfeiffer Vacuum list leak detection for refrigeration and air conditioning; on this, Leybold describes the evacuated test chamber at typically below 0.1 mbar, in which a leak detector looks for escaping refrigerant, and the helium leak detection of air-conditioning compressors before installation.
Research, laboratory and analytics
Busch names leak detectors in the laboratory with COBRA and R5; Pfeiffer Vacuum lists leak detection for research and analytics and names ACP, DuoVane and HiScroll for it.
Semiconductors, electronics and displays
Pfeiffer Vacuum expressly names the helium spray method for semiconductors, plant engineering and ultra-high vacuum.
Pharmaceuticals and biotechnology
Pfeiffer Vacuum describes container closure integrity testing (CCIT) as non-destructive proof of the tightness of sterile packaging down to −80 °C.
Medical and healthcare
Pfeiffer Vacuum names the leak testing of medical equipment and the CCIT test for medical devices too.
Aerospace
Atlas Copco names leak testing in aerospace: a defined vacuum, from low to high vacuum, makes the smallest leaks detectable.
Chemicals
Pfeiffer Vacuum also lists leak detection for the chemical industry, without describing it there in more detail.
Energy
Pfeiffer Vacuum names leak detection for the energy sector; Leybold describes it for battery cells and the hydrogen infrastructure.
Frequently asked questions
Leak detection and leak testing: frequently asked questions
How does leak detection with vacuum work?
The test object or test chamber is evacuated, and a leak detector detects the tracer gas that flows through the leaks. Leybold describes leak testing with helium as the tracer gas for the quality control of systems and products. In the spray method, according to Pfeiffer Vacuum, helium is sprayed on from outside, and the leak detector on the evacuated system locates the leaks. Atlas Copco sums it up like this: a defined vacuum makes the smallest leaks detectable.
Which vacuum pump is suitable for helium leak detection?
As backing pumps for helium leak testing, Leybold names TRIVAC (4–90 m³/h), SCROLLVAC (3–18 m³/h), ECODRY (25–65 m³/h) and VARODRY (65–200 m³/h), plus RUVAC with SOGEVAC or DRYVAC. Pfeiffer Vacuum names ACP, DuoVane and HiScroll for leak detection. Busch names COBRA, PANDA/PUMA, R5 and MINK, Edwards E2M, E2S, XDS, nXRi and Stokes, Atlas Copco GVD, GLS and DRB.
How much vacuum does a leak test need?
That depends on the test: Atlas Copco names low to high vacuum. For the test chamber in cooling circuit testing, Leybold describes typically below 0.1 mbar. Pfeiffer Vacuum also names the helium spray method for systems in ultra-high vacuum.
Which leak rate can be detected with helium?
For helium spraying, Pfeiffer Vacuum names leaks in the range of about 10⁻⁷ to 10⁻⁹ mbar·l/s. For container closure integrity testing (CCIT), Pfeiffer Vacuum gives ≤10⁻⁹ mbar·l/s for leaks up to 0.1 µm and about 10⁻⁶ mbar·l/s from 0.2 µm.
Oil-free or oil-lubricated for leak detection?
The manufacturers name both. Leybold lists the oil-lubricated rotary vane vacuum pump TRIVAC as well as the dry SCROLLVAC and ECODRY; Pfeiffer Vacuum names the oil-lubricated DuoVane alongside HiScroll and ACP; Edwards the oil-lubricated E2M and E2S alongside XDS and nXRi; Busch the oil-lubricated R5 alongside COBRA and MINK. Which design suits depends on the test object and the system.
How are battery cells tested for leaks?
Leybold describes the helium leak test of the finished cell and names TRIVAC and SCROLLVAC for it. Busch names leak detection and end-of-line leak testing of batteries with COBRA, and Pfeiffer Vacuum also lists leak detection in battery manufacturing.
How is a refrigerant circuit tested for leaks?
For this, Leybold describes a test chamber that is evacuated to typically below 0.1 mbar; inside it, a leak detector looks for escaping refrigerant. According to Leybold, air-conditioning compressors are already tested for leaks with helium before they are installed. Busch and Pfeiffer Vacuum also list leak detection for refrigeration and air conditioning.
What is a CCIT test for pharmaceutical packaging?
CCIT stands for container closure integrity testing. Pfeiffer Vacuum describes it as non-destructive proof of the tightness of sterile packaging and medical devices, also at temperatures down to −80 °C, with leak rates of ≤10⁻⁹ mbar·l/s for leaks up to 0.1 µm and about 10⁻⁶ mbar·l/s from 0.2 µm.
What is the difference between locating leaks and measuring the leak rate?
In helium spraying, according to Pfeiffer Vacuum, helium is sprayed on from outside, and the leak detector on the evacuated system shows where the leak is – no leak rate is measured in the process. To determine a leak rate, Pfeiffer Vacuum names the CCIT test with values down to ≤10⁻⁹ mbar·l/s.
Which vacuum pump for end-of-line leak testing?
For leak detection and end-of-line testing, Busch names COBRA, PANDA/PUMA and R5, in its product finder also MINK, and describes the testing of batteries, tanks and HVAC. For leak detection and end-of-line testing, Pfeiffer Vacuum names A 100/200 L, ACP, DuoVane, HiLobe and HiScroll.
A single pump or a central vacuum system?
A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group – more under Central Vacuum.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the volume – we advise you on selection, spare parts and service.
