Industry
Vacuum pumps for carbon capture (CCUS)
In CCUS processes, bound CO₂ is released again from solvents or sorbents under vacuum – in amine scrubbing, in pressure swing adsorption, at membranes and in direct air capture; according to Leybold, a lot of water vapour is produced in the process. Atlas Copco names low pressure for the capture, compression and purification of the CO₂, Becker names vacuum for evacuation, desorption and regeneration. Below you can see which series the manufacturers themselves name for these tasks – 418 models from 5 manufacturers.
Compare 418 modelsSee the applications
- 418Models
- 24Series
- 5Manufacturers
- 7Applications
In short
Carbon capture (CCUS): vacuum pumps – the key facts
- Direct air captureEdwards names around 400 ppm CO₂ in ambient air and about 1.25 million m³ of air per tonne of CO₂ – and the LR series for this.
- Water vapourLeybold describes that a lot of water vapour is produced when the CO₂ is driven out under vacuum, and names CLAWVAC, DRYVAC, VARODRY and VACUBE with the Multi-VAControl controller.
- Pump typesAlongside GHS VSD+, AWS, AWD and DRB, Atlas Copco names dry screw and claw vacuum pumps; Becker names rotary vane, claw and screw vacuum pumps as well as side channel blowers, also in gas-tight versions.
- Less heatFor VPSA desorption Edwards describes the regeneration of the sorbent with less heat and, at membranes, the pressure difference as the driving force; Becker: vacuum on the permeate side, pressure on the retentate side.
Applications
Carbon capture (CCUS): what vacuum pumps are used for
For each application: what the vacuum does and which series the manufacturers name for it. The information comes from the manufacturers’ own pages.
Amine scrubbing and absorption
In absorption, CO₂ is bound from the flue gas with solvents – for example in amine scrubbing – and driven out again under vacuum (Leybold); according to Becker, the pressure reduction makes it easier to release the CO₂ during regeneration. For post-combustion capture Atlas Copco names large volume flows and GHS VSD+, AWS and AWD. Busch names COBRA NX/NC, DOLPHIN VL/LB/LR, R5 RA/RB, SAMOS SB and TYR WT; Edwards names amine regeneration and gypsum dewatering in flue gas desulphurisation with EDS and steam ejectors.
- Atlas CopcoGHS VSD+, AWS, AWD
- BeckerVADS, BCV, SV, VASF names pump types, no series
- BuschCOBRA Industry, DOLPHIN, R5, SAMOS, TYR
- EdwardsEDS also names steam ejectors
- LeyboldCLAWVAC, DRYVAC series from the industry statement; also names VARODRY and VACUBE
- Pfeiffer Vacuumnames only leak detectors and mass spectrometers
Pressure swing adsorption (VPSA, TVSA) and moving bed
In adsorption (TVSA, TPSA, VSA, PVSA), according to Becker, the vacuum handles evacuation and desorption and maintains a stable pressure difference – in a fixed bed as in a moving bed. Edwards describes VPSA desorption as the regeneration of the sorbent with less heat and names LR, HR, GXS, EXS, EDS and EDC. For pressure swing adsorption Busch names COBRA, DOLPHIN, R5 and SAMOS, and additionally TYR for the moving bed method. Leybold names VPSA among the CCUS processes with CLAWVAC, DRYVAC and VARODRY and, for pre-combustion capture, describes the separation of the CO₂ from the hydrogen by pressure swing adsorption after gasification and the shift reaction.
- BeckerVADS, BCV, SV, VASF names pump types, no series
- BuschCOBRA Industry, DOLPHIN, R5, SAMOS, TYR
- EdwardsLR1A, LR1C, LR1D, EHR/SHR, GXS, EXS, EDS, EDC series from the industry statement
- LeyboldCLAWVAC, DRYVAC series from the industry statement
- Pfeiffer Vacuumnames only leak detectors and mass spectrometers
More on Pressure swing adsorption (VPSA, TVSA) and moving bed →
Membrane separation
At the membrane, the vacuum on the permeate side and the pressure on the retentate side act as the driving force (Becker); Edwards also names the membrane pressure difference. For membrane separation Busch names COBRA NX/NC, MINK MM/MI, DOLPHIN VL/LB/LR, R5 RA/RB and SAMOS SB. Atlas Copco names membrane separation alongside direct capture with DRB, Leybold lists membrane processes among the CCUS processes.
- Atlas CopcoDRB
- BeckerVADS, BCV, SV, VASF names pump types, no series; pressure side = compressor
- BuschCOBRA Industry, DOLPHIN, R5, SAMOS also names MINK MM/MI
- EdwardsLR1A, LR1C, LR1D, EHR/SHR, GXS, EXS, EDS, EDC series from the industry statement
- LeyboldCLAWVAC, DRYVAC series from the industry statement
- Pfeiffer Vacuumnames only leak detectors and mass spectrometers
Direct air capture (DAC)
In DAC, solid sorbents bind CO₂ from the air and are regenerated under vacuum (Leybold); Atlas Copco describes that the loaded liquid is degassed under vacuum, and names dry screw vacuum pumps with DRB. Edwards names around 400 ppm CO₂ and about 1.25 million m³ of air per tonne of CO₂, and the LR series for this. Busch names COBRA NX/NC, MINK MM/MI, DOLPHIN VL/LB/LR and R5 RA/RB; Becker lists DAC as a field of application.
CO₂ compression, conditioning and liquefaction
After capture, impurities are removed from the CO₂ (Atlas Copco); Atlas Copco names low pressure for capture, compression and purification with GHS VSD+, AWS, AWD and DRB. Becker names gas handling before liquefaction or use, and pre-compression only as a possible support; Busch describes capture and storage with vacuum and overpressure.
Seawater degassing (offshore)
Atlas Copco names the degassing of seawater – CO₂ from seawater under harsh offshore conditions – with AWS and AWD plus a booster, as well as seawater deaeration for water injection in oil fields with deaerator systems.
BECCS, pre-combustion and oxyfuel
For BECCS Edwards names LR and HR; Edwards lists pre-combustion capture – CO₂ from syngas – without a product. Leybold describes that after gasification and the shift reaction the CO₂ is separated from the hydrogen by pressure swing adsorption, and that the vacuum acts there. Becker names pre-, post- and oxyfuel combustion as well as direct air capture as fields of application, without describing the role of the pump for each source.
Manufacturers and series
Carbon capture (CCUS): 5 manufacturers, 24 series
Listed are the series the manufacturer itself names for this industry. “Show only …” sets the filter of the product overview.
Atlas Copco
61 models · 106–26,000 m³/h
Becker
32 models · 24–1,380 m³/h
Busch
243 models · 3–16,160 m³/h
Edwards
68 models · 20–8,100 m³/h
Leybold
14 models · 65–1,600 m³/h
Pfeiffer Vacuum names the industry without naming a series for it.
Product overview
Carbon capture (CCUS): all 418 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Atlas Copco AWD series 14 models
Atlas Copco AWS series 22 models
Atlas Copco DRB series 4 models
Atlas Copco GHS VSD+ series 21 models
Becker BCV series 7 models
Becker SV series 16 models
Becker VADS series 3 models
Becker VASF series 6 models
Busch COBRA Industry series 36 models
Busch DOLPHIN series 70 models
Busch MINK series 32 models
Busch R5 series 58 models
Busch SAMOS series 31 models
Busch TYR series 16 models
Edwards EDC series 2 models
Edwards EDS series 3 models
Edwards EHR/SHR series 9 models
Edwards EXS series 11 models
Edwards GXS series 10 models
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
Leybold CLAWVAC series 5 models
Leybold DRYVAC series 9 models
No model matches these filters.
Atlas Copco AWD series 14 models
Atlas Copco AWS series 22 models
Atlas Copco DRB series 4 models
Atlas Copco GHS VSD+ series 21 models
Becker BCV series 7 models
Becker SV series 16 models
Becker VADS series 3 models
Becker VASF series 6 models
Busch COBRA Industry series 36 models
Busch DOLPHIN series 70 models
Busch MINK series 32 models
Busch R5 series 58 models
Busch SAMOS series 31 models
Busch TYR series 16 models
Edwards EDC series 2 models
Edwards EDS series 3 models
Edwards EHR/SHR series 9 models
Edwards EXS series 11 models
Edwards GXS series 10 models
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
Leybold CLAWVAC series 5 models
Leybold DRYVAC series 9 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Selection
Carbon capture (CCUS): choosing a vacuum pump
What the manufacturers highlight for use in this industry.
Water vapour
Leybold describes that a lot of water vapour is produced when the CO₂ is driven out under vacuum; for direct air capture Atlas Copco names the degassing of the loaded liquid under vacuum. The pump must handle this vapour – Leybold names CLAWVAC, DRYVAC and VARODRY for this.
Vacuum and overpressure
Busch describes capture and storage with vacuum and overpressure, Becker describes vacuum on the permeate side and pressure on the retentate side of the membrane; alongside LR vacuum pumps Edwards names LR compressors, Becker also names gas-tight side channel blowers. Often both sides have to be served.
Large volume flows
For post-combustion capture Atlas Copco names large volume flows (GHS VSD+, AWS, AWD); for direct air capture Edwards names about 1.25 million m³ of air per tonne of CO₂ at around 400 ppm. Here the pumping speed is the first selection criterion.
Pressure control
For adsorption Becker names a stable pressure difference and setting the pressure as tasks of the vacuum, Leybold names the Multi-VAControl controller with VACUBE for its series. Controllability belongs on the list of requirements.
Frequently asked questions
Carbon capture (CCUS): frequently asked questions about vacuum pumps
Which vacuum pump for CO₂ capture (carbon capture)?
Atlas Copco names GHS VSD+, AWS, AWD and DRB as well as dry screw and claw vacuum pumps; Busch names COBRA, DOLPHIN, R5, SAMOS, TYR and MINK; Edwards names LR, HR, GXS, EXS, EDS and EDC; Leybold names CLAWVAC, DRYVAC and VARODRY. Becker names rotary vane, claw and screw vacuum pumps as well as gas-tight side channel blowers, without series. Which series fits depends on the process – amine scrubbing, adsorption, membrane or direct air capture.
Why does amine scrubbing need vacuum?
The CO₂ is bound from the flue gas with solvents and driven out again under vacuum, as Leybold describes; according to Becker, the pressure reduction makes it easier to release the CO₂ during regeneration. For amine scrubbing Busch names COBRA NX/NC, DOLPHIN VL/LB/LR, R5 RA/RB, SAMOS SB and TYR WT, Edwards names amine regeneration with EDS and steam ejectors.
Which vacuum pump for pressure swing adsorption (VPSA) of CO₂?
Busch names COBRA, DOLPHIN, R5 and SAMOS, and additionally TYR for the moving bed method. Edwards describes VPSA desorption as the regeneration of the sorbent with less heat and names LR, HR, GXS, EXS, EDS and EDC. Leybold names VPSA with CLAWVAC, DRYVAC and VARODRY; for TVSA, TPSA, VSA and PVSA Becker describes evacuation, desorption and a stable pressure difference.
Which vacuum pump for direct air capture?
Edwards names the LR series and calculates with around 400 ppm CO₂ and about 1.25 million m³ of air per tonne of CO₂. Atlas Copco names dry screw vacuum pumps with DRB; according to Atlas Copco, the loaded liquid is degassed under vacuum. Busch names COBRA NX/NC, MINK MM/MI, DOLPHIN VL/LB/LR and R5 RA/RB, Leybold describes solid sorbents that are regenerated under vacuum.
How much air has to be moved for one tonne of CO₂?
For direct air capture Edwards names about 1.25 million m³ of air per tonne of CO₂, because ambient air contains only around 400 ppm CO₂. Atlas Copco also names large volume flows for capture from flue gas.
How does membrane separation of CO₂ with vacuum work?
The vacuum on the permeate side and the pressure on the retentate side form the driving force, as Becker describes; Edwards names the membrane pressure difference. For membrane separation Busch names COBRA NX/NC, MINK MM/MI, DOLPHIN VL/LB/LR, R5 RA/RB and SAMOS SB, Atlas Copco names membrane separation with DRB.
Which vacuum pump for CO₂ compression and liquefaction?
Atlas Copco names low pressure for the capture, compression and purification of CO₂ with GHS VSD+, AWS, AWD and DRB; according to Atlas Copco, impurities are removed after capture. Becker names gas handling before liquefaction, and pre-compression only as a possible support. Alongside LR vacuum pumps Edwards names LR compressors.
Which vacuum pump for seawater degassing?
For CO₂ from seawater under harsh offshore conditions Atlas Copco names AWS and AWD plus a booster, and deaerator systems for seawater deaeration for water injection in oil fields.
What has to be considered with water vapour in CO₂ capture?
Leybold describes that a lot of water vapour is produced when the CO₂ is released from solvents or sorbents, and names CLAWVAC, DRYVAC, VARODRY and VACUBE with the Multi-VAControl controller for this. For direct air capture Atlas Copco names the degassing of the loaded liquid under vacuum. The pump must pass the vapour through without it condensing inside the pump.
Which pump types do the manufacturers name for CCUS?
Atlas Copco names dry screw and claw vacuum pumps as well as GHS VSD+, AWS, AWD, DRB and HEX@. Becker names rotary vane, claw and screw vacuum pumps as well as side channel blowers, also in gas-tight versions. Edwards names LR and HR, LR compressors, GXS, EXS, EDS and EDC; Leybold names CLAWVAC, DRYVAC, VARODRY and VACUBE; Busch names COBRA, MINK, DOLPHIN, R5, SAMOS and TYR. For carbon capture Pfeiffer Vacuum names only leak detectors and mass spectrometers.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the number of machines – we advise you on selection, spare parts and service.







