Application
Vacuum pumps for insulation vacuum and cryogenics
Vessels for liquefied gases have a double wall whose interspace is evacuated: without gas, there is no heat conduction and no convection there, and the cold stays in the vessel. Leybold describes the evacuation of the double wall of vessels for LH2, LNG, LIN and LOX and names 0.001 mbar with MLI insulation and 0.05 mbar with perlite. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it ā 279 models from 4 manufacturers.
Compare 279 modelsHow it works
- 279Models
- 18Series
- 4Manufacturers
- 0.001 mbarInsulation vacuum with MLI insulation (Leybold)
Touch the points: each part of the system explains itself.
In short
Insulation vacuum and cryogenics: the key facts
- MLI 0.001 mbarFor cryogenic vessel production with MLI insulation, Leybold names 0.001 mbar in the insulation space.
- Perlite 0.05 mbarWith perlite insulation, Leybold names 0.05 mbar ā so the insulating material determines the ultimate pressure the pumping station must reach.
- LH2, LNG, LIN, LOXLeybold describes the double wall of vessels for liquid hydrogen, LNG, LIN and LOX and names TRIVAC, SOGEVAC, SCREWLINE and DRYVAC with RUVAC for it.
- Cryopump regenerationLeybold names ECODRY plus for the regeneration of cryopumps, during which water vapour is released; Edwards names nXRi on systems in ultra-high and extreme high vacuum for this.
Operating principle
How it works: Insulation vacuum and cryogenics
The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.
- ConnectingThe pumping station is connected to the insulation space of the vessel via the evacuation valve.
- EvacuatingRoots pump and backing pump lower the pressure in the insulation space to the target pressure, which Leybold gives as 0.001 mbar (MLI) and 0.05 mbar (perlite).
- Sealing offThe valve is closed and the vessel retains its insulation vacuum; Pfeiffer Vacuum also names vacuum insulation in low-temperature experiments.
Vacuum and sizing
Insulation vacuum and cryogenics: how much vacuum is needed
What the manufacturers say about pressure, pumping speed and sizing.
Which vacuum
For cryogenic vessel production, Leybold names 0.001 mbar with MLI insulation and 0.05 mbar with perlite.
Which pumping speed
Pumping stations consisting of a Roots pump and a backing pump (Leybold RUVAC with DRYVAC, Pfeiffer Vacuum HiLobe) and individual backing pumps are named. The size of the pumping station depends on the volume of the insulation space and the target pressure.
What determines the design
The insulating material sets the ultimate pressure (Leybold: MLI 0.001 mbar, perlite 0.05 mbar). According to Leybold, water vapour is released when cryopumps are regenerated, and the pump must tolerate it; Edwards names nXRi on systems in ultra-high and extreme high vacuum for this.
What the manufacturers point out
Leybold names double-walled, vacuum-insulated vessels for liquid hydrogen in the hydrogen industry; Pfeiffer Vacuum vacuum insulation in low-temperature experiments; Busch COBRA for cryogenics and Edwards E2S for vacuum insulation.
Technology
Insulation vacuum and cryogenics: the vacuum pumps the manufacturers name
Listed are the series the manufacturer itself names for this application. āShow only ā¦ā sets the filter of the product overview.
Oil-lubricated rotary vane vacuum pumps
116 models Ā· 1.25ā1,800 mĀ³/h
Roots vacuum pumps
80 models Ā· 14ā13,540 mĀ³/h
Screw vacuum pumps
47 models Ā· 70ā4,652 mĀ³/h
Claw vacuum pumps
32 models Ā· 18ā1,150 mĀ³/h
Scroll vacuum pumps
4 models Ā· 6.1ā43 mĀ³/h
Product overview
Insulation vacuum and cryogenics: all 279 models compared
Use the filters on the left to narrow the selection ā by manufacturer, technology and the modelsā key figures, for 50 or 60 Hz.
Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 mĀ³/h 50 Hz85 mĀ³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 
COBRA NC 0100 BPumping speed 110 mĀ³/h 50 Hz130 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 mĀ³/h 50 Hz130 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants 
COBRA NS 0160 CPumping speed 135 mĀ³/h 50 Hz170 mĀ³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 
COBRA NC 0200 BPumping speed 220 mĀ³/h 50 Hz265 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 mĀ³/h 50 Hz265 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants 
COBRA NC 0300 BPumping speed 320 mĀ³/h 50 Hz385 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 APumping speed 350 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0300 B ECOTORQUEPumping speed 385 mĀ³/h 50 Hz385 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NC 0400 B ECOTORQUEPumping speed 420 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants 
COBRA NX 0450 A ECOTORQUEPumping speed 420 mĀ³/h 50 Hz420 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 
COBRA NC 0500 BPumping speed 490 mĀ³/h 50 Hz490 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants 
COBRA NC 0630 C VRPumping speed 580 mĀ³/h 50 Hz680 mĀ³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 
COBRA NS 0600 CPumping speed 600 mĀ³/h 50 Hz600 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 0630 CPumping speed 630 mĀ³/h 50 Hz630 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants 
COBRA NC 0630 C ECOTORQUEPumping speed 630 mĀ³/h 50 Hz630 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants 
COBRA DX 0650 A PLUSPumping speed 650 mĀ³/h 50 Hz650 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 APumping speed 650 mĀ³/h 50 Hz650 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants 
COBRA NX 0650 A ECOTORQUEPumping speed 650 mĀ³/h 50 Hz650 mĀ³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NF 0750 APumping speed 750 mĀ³/h 50 Hz750 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 
COBRA NC 1000 BPumping speed 840 mĀ³/h 50 Hz1,000 mĀ³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants 
COBRA DX 0950 A PLUSPumping speed 950 mĀ³/h 50 Hz950 mĀ³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards E2S series 3 models
Edwards nXRi series 5 models
Leybold DRYVAC series 9 models
Leybold ECODRY series 5 models
Leybold RUVAC WA/WAU series 8 models
Leybold RUVAC WH/WHU series 7 models
Leybold RUVAC WS/WSU series 8 models
Leybold SCREWLINE series 2 models
Leybold SOGEVAC series 23 models
Leybold TRIVAC series 20 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
No model matches these filters.
Busch COBRA Industry series 36 models
Busch MINK series 32 models
Busch PANDA/PUMA series 26 models
Busch R5 series 58 models
Edwards E2S series 3 models
Edwards nXRi series 5 models
Leybold DRYVAC series 9 models
Leybold ECODRY series 5 models
Leybold RUVAC WA/WAU series 8 models
Leybold RUVAC WH/WHU series 7 models
Leybold RUVAC WS/WSU series 8 models
Leybold SCREWLINE series 2 models
Leybold SOGEVAC series 23 models
Leybold TRIVAC series 20 models
Pfeiffer Vacuum ACP series 4 models
Pfeiffer Vacuum DuoVane series 12 models
Pfeiffer Vacuum HiLobe series 17 models
Pfeiffer Vacuum HiScroll series 4 models
Models a manufacturer no longer carries in its current range are listed in its āOutdated modelsā section.
Industries
Insulation vacuum and cryogenics: where the manufacturers name it
The manufacturers list these uses on their own pages.
Mechanical engineering and manufacturing
Leybold describes cryogenic vessel production: the double wall of vessels for LH2, LNG, LIN and LOX is evacuated to 0.001 mbar (MLI) or 0.05 mbar (perlite), with TRIVAC, SOGEVAC, SCREWLINE and DRYVAC with RUVAC.
Industrial gases
Busch and Pfeiffer Vacuum list the insulation vacuum under industrial gases; Busch names COBRA, MINK, PANDA/PUMA and R5, Pfeiffer Vacuum ACP, DuoVane, HiLobe and HiScroll.
Hydrogen and fuel cells
Leybold names double-walled, vacuum-insulated vessels for liquid hydrogen as part of the hydrogen industry.
Research, laboratory and analytics
Pfeiffer Vacuum describes vacuum insulation in low-temperature experiments with ACP, DuoVane and HiScroll; Busch names COBRA for cryogenics, Edwards nXRi for cryopump regeneration and E2S for vacuum insulation.
Frequently asked questions
Insulation vacuum and cryogenics: frequently asked questions
How does an insulation vacuum work?
A cryogenic vessel has a double wall whose interspace is evacuated; without gas, there is no heat conduction and no convection there, and the cold stays in the vessel. Leybold describes this for vessels for LH2, LNG, LIN and LOX and names 0.001 mbar with MLI insulation and 0.05 mbar with perlite.
How much vacuum does a cryogenic vessel need?
According to Leybold, that depends on the insulating material: 0.001 mbar with MLI insulation, 0.05 mbar with perlite.
Which vacuum pump for the insulation vacuum?
For cryogenic vessel production, Leybold names TRIVAC, SOGEVAC, SCREWLINE and DRYVAC with RUVAC. Pfeiffer Vacuum names ACP, DuoVane, HiLobe and HiScroll, Busch COBRA, MINK, PANDA/PUMA and R5, Edwards E2S.
Oil-free or oil-lubricated for the insulation vacuum?
The manufacturers name both. Leybold lists the oil-lubricated TRIVAC and SOGEVAC alongside the dry SCREWLINE and DRYVAC; Pfeiffer Vacuum the oil-lubricated DuoVane alongside HiScroll, ACP and HiLobe; Busch the oil-lubricated R5 alongside COBRA, MINK and PANDA/PUMA; Edwards the oil-lubricated E2S.
Why is the pressure different for MLI and perlite?
For multilayer insulation (MLI), Leybold names 0.001 mbar, and for a perlite fill 0.05 mbar. The two insulations work at different pressures; the pumping station is designed according to the insulating material of the vessel.
Which vacuum pump for LNG and hydrogen tanks?
Leybold describes the evacuation of the double wall of vessels for LH2, LNG, LIN and LOX with TRIVAC, SOGEVAC, SCREWLINE and DRYVAC with RUVAC, and in the hydrogen industry names double-walled, vacuum-insulated vessels for liquid hydrogen.
What happens when a cryopump is regenerated?
The cryopump is warmed up, and the bound gases ā including water vapour ā are drawn off by a backing pump. Leybold names ECODRY plus for this and points out the water vapour; Edwards names nXRi for the regeneration of cryopumps on systems in ultra-high and extreme high vacuum.
Which vacuum pump for cryostats and low-temperature experiments?
Pfeiffer Vacuum describes vacuum insulation in low-temperature experiments and names ACP, DuoVane and HiScroll; Busch names COBRA for cryogenics.
Does the insulation vacuum need a pumping station with a Roots pump?
For cryogenic vessel production, Leybold names DRYVAC with RUVAC Roots pumps alongside the backing pumps TRIVAC, SOGEVAC and SCREWLINE; Pfeiffer Vacuum names the HiLobe Roots pump alongside ACP, DuoVane and HiScroll. Besides the backing pumps COBRA, MINK and R5, Busch also names the PANDA/PUMA Roots pumps, and Edwards the E2S backing pump. Whether a Roots pump is needed depends on the target pressure and the volume of the insulation space.
A single pump or a central vacuum system?
A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group ā more under Central Vacuum.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the volume ā we advise you on selection, spare parts and service.
