Application
Vacuum pumps for CO₂ capture
In CO₂ capture, carbon dioxide from flue gas, syngas or ambient air is bound to solvents or solid sorbents and released again, or separated with membranes. The vacuum lowers the pressure so that the CO₂ escapes from the loaded solvent or sorbent, provides the driving force of membrane separation and conveys the gas to compression. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it – 349 models from 3 manufacturers.
Compare 349 modelsHow it works
- 349Models
- 15Series
- 3Manufacturers
- approx. 1.25 million m³Air per tonne of CO₂ in direct air capture (Edwards)
Touch the points: each part of the system explains itself.
In short
Carbon capture processes: the key facts
- RegenerationBecker describes that the pressure reduction makes it easier to release the CO₂ during the regeneration of the solvent; according to Leybold, the CO₂ bound from the flue gas with solvents is driven out under vacuum.
- Pressure swing adsorptionFor adsorption processes (TVSA, TPSA, VSA, PVSA, fixed and moving bed) Becker names evacuation, desorption, a stable pressure difference and pressure adjustment as tasks of the vacuum pump; for pressure swing adsorption Busch names COBRA, DOLPHIN, R5 and SAMOS.
- Direct air captureEdwards names around 400 ppm CO₂ in the air and about 1.25 million m³ of air per tonne of CO₂; according to Leybold, solid sorbents bind the CO₂ and are regenerated under vacuum.
- Volume flowFor capture from flue gas Atlas Copco names large volume flows and GHS VSD+, AWS and AWD for them; Busch describes capture and storage with vacuum and overpressure (COBRA, MINK, DOLPHIN, R5, SAMOS, TYR).
Operating principle
How it works: Carbon capture processes
The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.
- BindingFlue gas, syngas or air flows through the solvent, over the sorbent or along the membrane; the CO₂ is bound (Leybold, Becker). In membrane separation, according to Becker, there is vacuum on the permeate side and pressure on the retentate side.
- RegeneratingThe pressure is lowered and the CO₂ escapes – in amine scrubbing from the solvent (Leybold, Becker), in adsorption from the bed (Becker: evacuation and desorption), in DAC from the solid sorbent (Leybold).
- CompressingThe CO₂ is discharged, purified and compressed: Atlas Copco describes the removal of impurities, Becker names the gas transfer before liquefaction or use, Busch names storage with overpressure.
Vacuum and sizing
Carbon capture processes: how much vacuum is needed
What the manufacturers say about pressure, pumping speed and sizing.
Which vacuum
For adsorption Becker describes a stable pressure difference and pressure adjustment, for membrane separation vacuum on the permeate side and pressure on the retentate side as the driving force.
Which pumping speed
For capture from flue gas Atlas Copco speaks of large volume flows (GHS VSD+, AWS, AWD). For direct air capture Edwards names about 1.25 million m³ of air per tonne of CO₂ at around 400 ppm.
What determines the design
The process: absorption with vacuum regeneration (Becker, Leybold), pressure swing adsorption with a fixed or moving bed (Becker, Busch, Leybold, Pfeiffer Vacuum), membrane separation (Becker, Busch, Atlas Copco) – and the source: flue gas, syngas or air (Leybold, Edwards, Elmo Rietschle).
What the manufacturers point out
For post-combustion capture Edwards also names gypsum dewatering in flue gas desulphurisation with EDS and steam ejectors. Becker sees pre-compression only as possible support and names CO₂ transport and drying; Atlas Copco describes the purification that removes impurities from the CO₂.
Technology
Carbon capture processes: the vacuum pumps the manufacturers name
Listed are the series the manufacturer itself names for this application. “Show only …” sets the filter of the product overview.
Liquid ring vacuum pumps
148 models · 20–26,000 m³/h
Screw vacuum pumps
60 models · 70–5,136 m³/h
Oil-lubricated rotary vane vacuum pumps
58 models · 3–1,800 m³/h
Claw vacuum pumps
32 models · 18–1,150 m³/h
Side channel blowers
31 models · 40–2,200 m³/h
Rotary lobe blowers
16 models · 535–4,000 m³/h
Roots vacuum pumps
4 models · 253–2,050 m³/h
Becker names the application without naming a series for it. Elmo Rietschle names the application without naming a series for it. Leybold names the application without naming a series for it. Pfeiffer Vacuum names the application without naming a series for it.
Product overview
Carbon capture processes: all 349 models compared
Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.
Atlas Copco AWD series 14 models
Atlas Copco AWS series 22 models
Atlas Copco DRB series 4 models
Atlas Copco GHS VSD+ series 21 models
Busch COBRA Industry series 36 models
Busch DOLPHIN series 70 models
Busch MINK series 32 models
Busch R5 series 58 models
Busch SAMOS series 31 models
Busch TYR series 16 models
Edwards EDS series 3 models
Edwards EHR/SHR series 9 models
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
No model matches these filters.
Atlas Copco AWD series 14 models
Atlas Copco AWS series 22 models
Atlas Copco DRB series 4 models
Atlas Copco GHS VSD+ series 21 models
Busch COBRA Industry series 36 models
Busch DOLPHIN series 70 models
Busch MINK series 32 models
Busch R5 series 58 models
Busch SAMOS series 31 models
Busch TYR series 16 models
Edwards EDS series 3 models
Edwards EHR/SHR series 9 models
Edwards LR1A series 12 models
Edwards LR1C series 9 models
Edwards LR1D series 12 models
Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.
Industries
Carbon capture processes: where the manufacturers name it
The manufacturers list these uses on their own pages.
Carbon capture (CCUS)
The manufacturers list CO₂ capture as a market of its own: Atlas Copco (flue gas, air, purification – GHS VSD+, AWS, AWD, DRB), Becker (absorption, adsorption, membrane, gas handling), Busch (amine scrubbing, pressure swing adsorption, moving bed, membrane, DAC – COBRA, DOLPHIN, R5, SAMOS, TYR, MINK), Edwards (flue gas with EDS, DAC and BECCS with the LR series), Leybold (post- and pre-combustion, DAC) and Pfeiffer Vacuum, which lists amine scrubbing, pressure swing adsorption, moving bed, membrane and DAC in its product finder.
Energy
Elmo Rietschle names CO₂ capture under sustainable energy: air flow, pressure control and vacuum regeneration for DAC, post- and pre-combustion and oxyfuel.
Frequently asked questions
Carbon capture processes: frequently asked questions
How does CO₂ capture with vacuum work?
CO₂ from flue gas, syngas or air is bound to a solvent or to a solid sorbent, or separated via a membrane. During regeneration the vacuum pump lowers the pressure and the CO₂ is released again – according to Leybold it is driven out under vacuum, according to Becker the pressure reduction makes the release easier. The gas is then purified and compressed (Atlas Copco, Becker).
Which vacuum pump for amine scrubbing?
For amine scrubbing Busch names COBRA NX/NC, DOLPHIN VL/LB/LR, R5 RA/RB, SAMOS SB and TYR WT. For amine regeneration Edwards names EDS and steam ejectors, Pfeiffer Vacuum lists amine scrubbing in its product finder. Leybold and Becker describe the process without a series.
What is pressure swing adsorption (VSA, PVSA) in CO₂ capture?
A solid sorbent binds CO₂ and releases it again when it is evacuated. Becker names the variants TVSA, TPSA, VSA and PVSA with fixed and moving beds, and as tasks of the pump evacuation, desorption, a stable pressure difference and pressure adjustment. Busch names COBRA, DOLPHIN, R5 and SAMOS for this, and additionally TYR for the moving bed method; according to Leybold, pressure swing adsorption separates the CO₂ from the hydrogen before combustion.
Which vacuum pump for direct air capture?
For DAC Busch names COBRA NX/NC, MINK MM/MI, DOLPHIN VL/LB/LR and R5 RA/RB, Edwards names the liquid ring series LR, Atlas Copco names dry screw vacuum pumps with DRB Roots pumps. According to Leybold, the solid sorbents are regenerated under vacuum; Edwards names around 400 ppm CO₂ and about 1.25 million m³ of air per tonne of CO₂.
What role does vacuum play in the membrane separation of CO₂?
According to Becker, the pressure difference is the driving force: vacuum on the permeate side, pressure on the retentate side. For membrane separation Busch names COBRA NX/NC, MINK MM/MI, DOLPHIN VL/LB/LR, R5 RA/RB and SAMOS SB; Atlas Copco and Pfeiffer Vacuum also name membrane separation.
How much vacuum does CO₂ capture need?
For adsorption Becker describes a stable pressure difference and pressure adjustment, Elmo Rietschle describes pressure control and vacuum regeneration. The pressure depends on the process and the sorbent.
Oil-free or oil-lubricated for CO₂ capture?
The manufacturers name dry, oil-lubricated and liquid ring pumps side by side: Busch names COBRA (dry screw), MINK (dry claw), R5 (oil-lubricated), DOLPHIN (liquid ring) and SAMOS (side channel blower); Atlas Copco names GHS VSD+ (oil-lubricated screw), AWS and AWD (liquid ring) and dry screw vacuum pumps with DRB; Edwards names EDS (dry screw) and LR (liquid ring). The choice depends on the gas and the process.
What happens to the CO₂ after capture?
It is purified and compressed: Atlas Copco describes CO₂ compression and purification, which removes impurities, Becker describes the gas handling before liquefaction or use and also names CO₂ transport and drying. Busch speaks of capture and storage with vacuum and overpressure.
Which vacuum pump for CO₂ capture from flue gas?
For post-combustion capture Atlas Copco names GHS VSD+, AWS and AWD and points out large volume flows. Edwards names EDS and steam ejectors, also for gypsum dewatering in flue gas desulphurisation. For amine scrubbing Busch names COBRA, DOLPHIN, R5, SAMOS and TYR; according to Leybold, the CO₂ is bound with solvents and driven out under vacuum.
What is the difference between pre-combustion and post-combustion?
Post-combustion captures CO₂ from the flue gas after combustion (Atlas Copco, Edwards, Leybold). Pre-combustion separates it from the syngas before combustion: according to Leybold, after gasification and the shift reaction the CO₂ is separated from the hydrogen by pressure swing adsorption; Edwards names pre-combustion capture without assigning a product. Becker and Elmo Rietschle also name oxyfuel and direct air capture as fields of application.
A single pump or a central vacuum system?
A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group – more under Central Vacuum.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which pump suits your process?
Tell us the application, the medium and the volume – we advise you on selection, spare parts and service.







