Application

Vacuum pumps for mass spectrometry and analytics

A mass spectrometer separates ions by their mass – this only works if they do not collide with gas molecules on their way. According to Leybold, the instruments work under vacuum, often with several chambers in different pressure ranges: from the inlet at a few 10 mbar to the TOF or Orbitrap analyser at 10⁻⁸ to below 10⁻¹⁰ mbar; according to Pfeiffer Vacuum, the turbo pump sits in the instrument and the backing pump stands outside. Below you can see how the application works, what vacuum the manufacturers name and which of their series are intended for it – 166 models from 4 manufacturers.

Compare 166 modelsHow it works

  • 166Models
  • 11Series
  • 4Manufacturers
  • 10⁻⁸ to below 10⁻¹⁰ mbarTOF / Orbitrap analyser (Leybold)
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Touch the points: each part of the system explains itself.

In short

Mass spectrometry and analytics: the key facts

  • Pressure stagesLeybold names several chambers in different pressure ranges: the inlet at a few 10 mbar, TOF and Orbitrap analysers at 10⁻⁸ to below 10⁻¹⁰ mbar; for the analyser in residual gas analysis, Pfeiffer Vacuum names a maximum of 10⁻⁴ hPa.
  • IonisationFor ionisation, Edwards names 1 to 5 mbar and, as the task of the vacuum, removing interfering residual gas.
  • Pumping systemAccording to Pfeiffer Vacuum, the turbo pump sits in the instrument (SplitFlow, HiPace) and the backing pump outside: HiScroll, SmartVane or DuoVane; Edwards names RV, E2M, Scroll, nXRi and nXLi.
  • QuietFor the HiScroll, Pfeiffer Vacuum names below 47 dB – the backing pump stands outside the instrument.
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  • Air and gas (vacuum)
  • Exhaust

Operating principle

How it works: Mass spectrometry and analytics

The drawing shows the basic principle in section. The systems and pumps of the individual manufacturers differ in detail.

  1. IonisingThe sample from GC, LC, ICP or MALDI is ionised in the ion source – according to Edwards at 1 to 5 mbar.
  2. TransportingThe ions pass through the pressure stages from the inlet at a few 10 mbar to the analyser (Leybold) – according to Pfeiffer Vacuum without collisions, that is, without colliding with gas molecules.
  3. AnalysingIn the analyser at 10⁻⁸ to below 10⁻¹⁰ mbar (Leybold, TOF / Orbitrap), the ions are separated by their mass; according to Edwards, the vacuum removes the interfering residual gas.

Vacuum and sizing

Mass spectrometry and analytics: how much vacuum is needed

What the manufacturers say about pressure, pumping speed and sizing.

What vacuum

Leybold: inlet at a few 10 mbar, TOF and Orbitrap analysers at 10⁻⁸ to below 10⁻¹⁰ mbar, several chambers in different pressure ranges. Edwards: ionisation at 1 to 5 mbar. Pfeiffer Vacuum: analyser in residual gas analysis at a maximum of 10⁻⁴ hPa. For surface analysis (XPS, AES, SIMS, FEM), Leybold names ultra-high vacuum against surface contamination.

Which pumps

The backing pump must match the turbo pump in the instrument (Pfeiffer Vacuum: turbo pump in the instrument, backing pump outside). Pfeiffer Vacuum names HiScroll, SmartVane and DuoVane (12 products), Edwards RV, E2M, Scroll, nXRi and nXLi, Leybold small dry pumps and oil-sealed pumps as well as SOGEVAC BI/DI for GC and LC, Busch COBRA and R5, Atlas Copco rotary vane vacuum pumps for analytics.

What the manufacturers point out

Edwards: remove interfering residual gas; in X-ray diffraction, avoid air scattering. Pfeiffer Vacuum: collision-free ion transport; the HiScroll at below 47 dB. Leybold: mass spectrometers often work with several pressure stages; according to its page, fields of use are the environment, food, newborn screening, diagnostics and medicines.

Related analytics

Residual gas analysis: according to Pfeiffer Vacuum, the gas composition in the vacuum is measured for contamination, leaks and outgassing, with an analyser at a maximum of 10⁻⁴ hPa; Edwards names nXRi and XDS for this. Surface analysis: Pfeiffer Vacuum names DuoVane, HiScroll and SmartVane (12 products), Leybold UHV against surface contamination. Sample preparation: Edwards XDS. X-ray diffraction: Edwards rotary vane vacuum pumps against air scattering.

Technology

Mass spectrometry and analytics: the vacuum pumps the manufacturers name

Listed are the series the manufacturer itself names for this application. “Show only …” sets the filter of the product overview.

Atlas Copco names the application without naming a series for it.

Product overview

Mass spectrometry and analytics: all 166 models compared

Use the filters on the left to narrow the selection – by manufacturer, technology and the models’ key figures, for 50 or 60 Hz.

Busch COBRA Industry series 36 models

COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants
COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants

Busch R5 series 58 models

R5 PB 0003 DPumping speed 3 m³/h 50 Hz3.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants
R5 PB 0004 CPumping speed 4 m³/h 50 Hz4.8 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.1 kW 50 Hz0.12 kW 60 HzVariants
R5 PB 0008 CPumping speed 8 m³/h 50 Hz9.6 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.35 kW 50 Hz0.45 kW 60 HzVariants
R5 KB 0010 EPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants 1
R5 KD 0012 APumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.37 kW 50 Hz0.37 kW 60 HzVariants
R5 RA 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1
R5 RC 0010 CPumping speed 10 m³/h 50 Hz12 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.45 kW 50 Hz0.45 kW 60 HzVariants 1
R5 KB 0016 EPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants 1
R5 KD 0020 APumping speed 16 m³/h 50 Hz20 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.55 kW 50 Hz0.55 kW 60 HzVariants
R5 RA 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1
R5 RC 0016 CPumping speed 16 m³/h 50 Hz19 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.55 kW 50 Hz0.7 kW 60 HzVariants 1
R5 KB 0020 DPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.75 kW 60 HzVariants 1
R5 RB 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 2
R5 RC 0021 CPumping speed 20 m³/h 50 Hz24 m³/h 60 HzUltimate pressure 20 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants
R5 KD 0025 APumping speed 22 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants
R5 KB 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 2 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 1
R5 RA 0025 FPumping speed 25 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1 kW 50 Hz1.2 kW 60 HzVariants 3
R5 KB 0040 DPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
R5 RA 0040 FPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.4 kW 50 Hz1.7 kW 60 HzVariants 3
R5 RE 0040 CPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz2.2 kW 60 HzVariants
R5 RA 0063 FPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2 kW 50 Hz2.4 kW 60 HzVariants 3
R5 RE 0063 CPumping speed 63 m³/h 50 Hz76 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3 kW 60 HzVariants
R5 RA 0100 FPumping speed 100 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.7 kW 50 Hz3.4 kW 60 HzVariants 3
R5 RA 0155 APumping speed 150 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants
R5 RA 0165 DPumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
R5 RA 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.8 kW 60 HzVariants
R5 RD 0200 APumping speed 160 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 2
R5 RA 0165 D ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0200 A ECOTORQUEPumping speed 190 m³/h 50 Hz190 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0205 DPumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
R5 RA 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants
R5 RD 0240 APumping speed 200 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4.2 kW 60 HzVariants 1
R5 RA 0205 D ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0240 A ECOTORQUEPumping speed 240 m³/h 50 Hz240 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0255 DPumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants 3
R5 RD 0300 APumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 1
R5 RA 0255 D ECOTORQUEPumping speed 300 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0305 DPumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 8.3 kW 50 Hz10 kW 60 HzVariants 3
R5 RA 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.2 kW 60 HzVariants
R5 RD 0360 APumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 2
R5 RA 0305 D ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0360 A ECOTORQUEPumping speed 360 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0400 CPumping speed 410 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 3
R5 RA 0520 APumping speed 430 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz12.5 kW 60 HzVariants 1
R5 RA 0400 C ECOTORQUEPumping speed 480 m³/h 50 Hz480 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0502 CPumping speed 510 m³/h 50 Hz590 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz15 kW 60 HzVariants 1
R5 RA 0520 A ECOTORQUEPumping speed 520 m³/h 50 Hz520 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0502 C ECOTORQUEPumping speed 580 m³/h 50 Hz580 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0600 A ECOTORQUEPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
R5 RA 0630 CPumping speed 630 m³/h 50 Hz760 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 2
R5 RA 0630 C ECOTORQUEPumping speed 745 m³/h 50 Hz745 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
R5 RA 0840 A ECOTORQUEPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
R5 RA 0840 B PLUSPumping speed 840 m³/h 50 Hz840 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
R5 RA 1000 BPumping speed 1,000 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 22 kW 50 Hz30 kW 60 HzVariants 1
R5 RA 1000 A PLUSPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants
R5 RA 1000 B ECOTORQUEPumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power Variants
R5 RA 1600 BPumping speed 1,600 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz37 kW 60 HzVariants 1
R5 RA 1600 A PLUSPumping speed 1,800 m³/h 50 Hz1,800 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants

Edwards E2M series 9 models

Edwards E2M0.7Pumping speed 0.75 m³/h 50 Hz0.95 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.09 kW 50 Hz0.09 kW 60 HzVariants 2
Edwards E2M1.5Pumping speed 1.6 m³/h 50 Hz2 m³/h 60 HzUltimate pressure 1.5 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 4
Edwards E2M2.5Pumping speed 2.5 m³/h 50 Hz3 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.16 kW 50 Hz0.16 kW 60 HzVariants 2
Edwards E2M18Pumping speed 17 m³/h 50 Hz20.4 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 0.9 kW 60 HzVariants 8
Edwards E2M28Pumping speed 27.5 m³/h 50 Hz33 m³/h 60 HzUltimate pressure 2 × 10-3 – 0.01 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 7
Edwards E2M40Pumping speed 37 m³/h 50 Hz44 m³/h 60 HzUltimate pressure 4.5 × 10-3 – 0.01 mbarRated motor power 1.1 – 1.5 kW 50 Hz1.5 kW 60 HzVariants 9
Edwards E2M80Pumping speed 74 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 3 × 10-3 – 0.01 mbarRated motor power 2.2 – 3 kW 50 Hz3 kW 60 HzVariants 9
Edwards E2M175Pumping speed 160 m³/h 50 Hz196 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 5.5 kW 50 Hz6.5 kW 60 HzVariants 5
Edwards E2M275Pumping speed 255 m³/h 50 Hz306 m³/h 60 HzUltimate pressure 3.3 × 10-3 mbarRated motor power 7.5 kW 50 Hz8.5 kW 60 HzVariants 5

Edwards nXLi series 7 models

Edwards nXL110iDPumping speed 98 m³/h 50 Hz98 m³/h 60 HzUltimate pressure Rated motor power Variants 1
Edwards nXL110iD EnhancedPumping speed 98 m³/h 50 Hz98 m³/h 60 HzUltimate pressure 0.07 mbarRated motor power Variants 2
Edwards nXL110iPumping speed 110 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power Variants 2
Edwards nXL110i EnhancedPumping speed 110 m³/h 50 Hz110 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power Variants 2
Edwards nXL200iD EnhancedPumping speed 158 m³/h 50 Hz158 m³/h 60 HzUltimate pressure 0.07 mbarRated motor power Variants 2
Edwards nXL200iPumping speed 200 m³/h 50 Hz200 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power Variants 2
Edwards nXL200i EnhancedPumping speed 200 m³/h 50 Hz200 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power Variants 2

Edwards nXRi series 5 models

Edwards nXR30iPumping speed 30 m³/h 50 Hz30 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR40iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR60iPumping speed 60 m³/h 50 Hz60 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR90iPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1
Edwards nXR120iPumping speed 120 m³/h 50 Hz120 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power Variants 1

Edwards RV series 8 models

Edwards RV3Pumping speed 3.3 m³/h 50 Hz3.9 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 6
Edwards RV3 FXPumping speed 3.3 m³/h 50 Hz3.9 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 4
Edwards RV5Pumping speed 5.1 m³/h 50 Hz6.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 6
Edwards RV5 FXPumping speed 5.1 m³/h 50 Hz6.2 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.25 – 0.37 kW 50 Hz0.3 – 0.44 kW 60 HzVariants 4
Edwards RV8Pumping speed 8.5 m³/h 50 Hz10 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 6
Edwards RV8 FXPumping speed 8.5 m³/h 50 Hz10 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 5
Edwards RV12Pumping speed 12 m³/h 50 Hz14.2 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 6
Edwards RV12 FXPumping speed 12 m³/h 50 Hz14.2 m³/h 60 HzUltimate pressure 0.02 mbarRated motor power 0.37 – 0.45 kW 50 Hz0.44 – 0.55 kW 60 HzVariants 5

Edwards XDS series 2 models

Edwards XDS35iPumping speed 35 m³/h 50 Hz35 m³/h 60 HzUltimate pressure 0.01 – 0.03 mbarRated motor power Variants 6
Edwards XDS46iPumping speed 40 m³/h 50 Hz40 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power Variants 2

Leybold SOGEVAC series 23 models

SOGEVAC SV 10 BPumping speed 9.5 m³/h 50 Hz11.5 m³/h 60 HzUltimate pressure 1.5 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 3
SOGEVAC SV 16 DPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 13
SOGEVAC SV 16 DIPumping speed 14.5 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 4
SOGEVAC SV 16 BPumping speed 15 m³/h 50 Hz17 m³/h 60 HzUltimate pressure 1 mbarRated motor power 0.55 kW 50 Hz0.75 kW 60 HzVariants 7
SOGEVAC SV 25 BPumping speed 22.5 m³/h 50 Hz25 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.9 kW 50 Hz1.1 kW 60 HzVariants 12
SOGEVAC SV 25 DPumping speed 22.5 m³/h 50 Hz25.5 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 0.75 kW 50 Hz0.9 kW 60 HzVariants 15
SOGEVAC SV 28 BIPumping speed 23 m³/h 50 Hz27 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 0.55 – 0.75 kW 50 Hz0.66 – 1.1 kW 60 HzVariants 2
SOGEVAC SV 40 BI FCPumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3
SOGEVAC SV 55 BI²Pumping speed 36 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 4
SOGEVAC SV 40 BPumping speed 38.5 m³/h 50 Hz47 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.1 kW 50 Hz1.5 kW 60 HzVariants 25
SOGEVAC SV 40 BIPumping speed 40 m³/h 50 Hz48 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 1.1 – 1.3 kW 50 Hz1.3 – 1.6 kW 60 HzVariants 3
SOGEVAC SV 65 BI FCPumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 2
SOGEVAC SV 70 BI²Pumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power Variants 2
SOGEVAC SV 65 BPumping speed 54 m³/h 50 Hz64 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 22
SOGEVAC SV 100 BPumping speed 87.5 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.2 kW 50 Hz3.5 kW 60 HzVariants 31
SOGEVAC SV 120 BI FCPumping speed 90 – 100 m³/h 50 Hz90 – 100 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 2
SOGEVAC SV 120 BPumping speed 110 m³/h 50 Hz122 m³/h 60 HzUltimate pressure 0.5 mbarRated motor power 2.4 kW 50 Hz3.2 kW 60 HzVariants 12
SOGEVAC SV 220 BPumping speed 180 m³/h 50 Hz220 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 4.5 kW 50 Hz4.8 kW 60 HzVariants 8
SOGEVAC SV 300 BPumping speed 240 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 5.5 kW 50 Hz6.3 kW 60 HzVariants 45
SOGEVAC SV 320 BPumping speed 284 m³/h 50 Hz330 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 6
SOGEVAC SV 570 BPumping speed 470 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 11 kW 50 Hz11 – 13.2 kW 60 HzVariants 6
SOGEVAC SV 630 BPumping speed 640 m³/h 50 Hz755 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power 15 kW 50 Hz18.5 kW 60 HzVariants 34
SOGEVAC SV 750 BPumping speed 755 m³/h 50 HzUltimate pressure 0.08 mbarRated motor power 18.5 kW 50 HzVariants 15

Pfeiffer Vacuum DuoVane series 12 models

DuoVane 1.6Pumping speed 1.25 m³/h 50 Hz1.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.075 kW 50 Hz0.09 kW 60 HzVariants 9
DuoVane 3Pumping speed 2.5 m³/h 50 Hz2.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.25 kW 50 Hz0.3 kW 60 HzVariants 10
DuoVane 6Pumping speed 5.5 m³/h 50 Hz6.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 2
DuoVane 12Pumping speed 9.5 m³/h 50 Hz11.8 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.45 kW 50 Hz0.55 kW 60 HzVariants 5
DuoVane 18Pumping speed 14 m³/h 50 Hz16.9 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 2
DuoVane 22Pumping speed 19.5 m³/h 50 Hz22.5 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 0.55 kW 50 Hz0.66 kW 60 HzVariants 5
DuoVane 30Pumping speed 24 m³/h 50 Hz29 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
DuoVane 36Pumping speed 32 m³/h 50 Hz36 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.1 kW 50 Hz1.3 kW 60 HzVariants 11
DuoVane 70Pumping speed 62 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 13
DuoVane 95Pumping speed 80 m³/h 50 Hz95 m³/h 60 HzUltimate pressure 6.7 × 10-3 mbarRated motor power 3.7 kW 50 Hz3.7 kW 60 HzVariants 1
DuoVane 135Pumping speed 115 m³/h 50 Hz135 m³/h 60 HzUltimate pressure 2 × 10-3 mbarRated motor power 4 kW 50 Hz4.5 kW 60 HzVariants 3
DuoVane 300Pumping speed 250 m³/h 50 Hz300 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 7.5 kW 50 Hz9 kW 60 HzVariants 3

Pfeiffer Vacuum HiScroll series 4 models

HiScroll 6Pumping speed 6.1 m³/h 50 HzUltimate pressure 0.015 mbarRated motor power Variants 7
HiScroll 12Pumping speed 12.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 7
HiScroll 18Pumping speed 18.1 m³/h 50 HzUltimate pressure 6 × 10-3 mbarRated motor power Variants 11
HiScroll 46Pumping speed 43 m³/h 50 HzUltimate pressure 7 × 10-3 mbarRated motor power Variants 11

Pfeiffer Vacuum SmartVane series 2 models

SmartVane 55Pumping speed 50 m³/h 50 Hz50 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 0.75 kW 50 HzVariants 2
SmartVane 70Pumping speed 70 m³/h 50 Hz70 m³/h 60 HzUltimate pressure 0.2 mbarRated motor power 1 kW 50 HzVariants 2

Model comparison

Models a manufacturer no longer carries in its current range are listed in its “Outdated models” section.

Industries

Mass spectrometry and analytics: where the manufacturers name it

The manufacturers list these uses on their own pages.

Research, laboratory and analytics

Busch, Edwards, Leybold and Pfeiffer Vacuum name mass spectrometry for research, laboratory and analytics: Busch with COBRA and R5, Edwards for GC-MS, LC-MS, ICP-MS and MALDI with RV, E2M, Scroll, nXRi and nXLi, Leybold with several pressure stages down to the range of 10⁻⁸ to below 10⁻¹⁰ mbar, Pfeiffer Vacuum with HiScroll, SmartVane and DuoVane.

Industry page: Research, laboratory and analytics →

Medical and healthcare

Pfeiffer Vacuum also names mass spectrometry for medicine, with DuoVane, HiScroll and SmartVane; on its page, Leybold names diagnostics and newborn screening as fields of use.

Industry page: Medical and healthcare →

Pharmaceuticals and biotechnology

Pfeiffer Vacuum lists mass spectrometry for pharmaceuticals and biotechnology; Leybold names medicines as a field of use for mass spectrometers.

Industry page: Pharmaceuticals and biotechnology →

Semiconductors, electronics and displays

Pfeiffer Vacuum also lists mass spectrometry for semiconductors, electronics and displays without describing its use there in more detail; as related analytics, it describes residual gas analysis, which checks the gas composition in the vacuum for contamination, leaks and outgassing.

Industry page: Semiconductors, electronics and displays →

Energy

Pfeiffer Vacuum also lists mass spectrometry among its solutions for the energy industry without describing its use there in more detail.

Industry page: Energy →

Frequently asked questions

Mass spectrometry and analytics: frequently asked questions

Why does a mass spectrometer need vacuum?

According to Pfeiffer Vacuum, the ions must pass through the instrument without collisions, and according to Edwards, the vacuum removes the interfering residual gas. According to Leybold, mass spectrometers therefore work under vacuum, often with several chambers in different pressure ranges.

How much vacuum does a mass spectrometer need?

Leybold names several pressure stages: the inlet at a few 10 mbar, TOF and Orbitrap analysers at 10⁻⁸ to below 10⁻¹⁰ mbar. Edwards names 1 to 5 mbar for ionisation, Pfeiffer Vacuum a maximum of 10⁻⁴ hPa for the analyser in residual gas analysis.

Which vacuum pump for a mass spectrometer?

According to Pfeiffer Vacuum, the high vacuum is generated by a turbo pump in the instrument (SplitFlow, HiPace), and the backing pump stands outside: Pfeiffer Vacuum names HiScroll, SmartVane and DuoVane, Edwards RV, E2M, Scroll, nXRi and nXLi, Leybold TURBOVAC i with small dry pumps or oil-sealed pumps, Busch COBRA and R5, Atlas Copco rotary vane vacuum pumps for analytics.

Which backing pump for the turbo pump in a mass spectrometer?

For the SplitFlow and HiPace turbo pumps, Pfeiffer Vacuum names the external backing pumps HiScroll, SmartVane and DuoVane (12 products for mass spectrometry); Edwards names RV, E2M, Scroll, nXRi and nXLi; Leybold small dry pumps or oil-sealed pumps behind the TURBOVAC i.

Oil-free or oil-lubricated for mass spectrometry?

Both are named. Leybold names small dry pumps and oil-sealed pumps side by side; Edwards the oil-lubricated rotary vane vacuum pumps RV and E2M alongside Scroll, nXRi and nXLi; Pfeiffer Vacuum the scroll vacuum pump HiScroll alongside the rotary vane vacuum pumps DuoVane and SmartVane; Busch R5 alongside COBRA; Atlas Copco rotary vane vacuum pumps. For surface analysis in ultra-high vacuum, Leybold names protection against surface contamination as a requirement.

Which vacuum pump for GC-MS and LC-MS?

For GC-MS, LC-MS, ICP-MS and MALDI, Edwards names RV, E2M, Scroll, nXRi and nXLi; for GC-MS, LC-MS, TOF-MS, ICP-MS and MALDI-MS, Pfeiffer Vacuum names HiScroll, SmartVane and DuoVane. For gas and liquid chromatography itself, Leybold lists the SOGEVAC BI/DI without describing them.

How loud is the vacuum pump on a mass spectrometer?

For the HiScroll, Pfeiffer Vacuum names below 47 dB; according to Pfeiffer Vacuum, the backing pump stands outside next to the instrument, that is, in the laboratory.

What is residual gas analysis and what vacuum does it need?

In residual gas analysis, according to Pfeiffer Vacuum, the gas composition in the vacuum is measured – for contamination, leaks and outgassing – with an analyser at a maximum of 10⁻⁴ hPa (Pfeiffer Vacuum names PrismaPro, HiQuad Neo, HiCube Neo RGA and OmniStar, which are not in our range). Edwards names nXRi and XDS for residual gas analysis.

Which vacuum pump for surface analysis (XPS, SIMS)?

For XPS, AES, SIMS and FEM, Leybold names ultra-high vacuum against surface contamination without naming a series; Pfeiffer Vacuum names DuoVane, HiScroll and SmartVane for surface analysis (12 products).

Which vacuum pump for X-ray diffraction and sample preparation?

For X-ray diffraction, Edwards names rotary vane vacuum pumps, which avoid air scattering, and for sample preparation the scroll vacuum pump XDS.

A single pump or a central vacuum system?

A central system in a room of its own keeps noise and heat away from production and matches its output to the demand. Central vacuum systems are planned and built by Eugen Theis Vakuum, a company of the Ehrler & Beck group – more under Central Vacuum.

Does Ehrler & Beck also supply spare parts and service?

Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.

Which pump suits your process?

Tell us the application, the medium and the volume – we advise you on selection, spare parts and service.

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