COBRA DS 0080 GPumping speed 70 m³/hUltimate pressure 0.03 mbar
COBRA BC 0101 G 1361800401 Version as listed in the Busch shop, motor and equipment on request
The Busch COBRA BC 0101 G is a dry screw vacuum pump with a nominal pumping speed of 90 m³/h and an ultimate pressure of 0.01 mbar. Ehrler & Beck advises on selection and service.
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- Pumping speed 90 m³/h 50 Hz 90 m³/h 60 Hz
- Ultimate pressure 0.01 mbar
- Rated motor power 1.5 kW 50 Hz 1.5 kW 60 Hz
| Variant | Part number |
|---|---|
| Version as listed in the Busch shop, motor and equipment on request (selected) | 1361800401 |
Busch COBRA BC 0101 G – dry screw vacuum pump
The Busch COBRA BC 0101 G is a dry screw vacuum pump. The nominal pumping speed is 90 m³/h, the ultimate pressure 0.01 mbar. Nominal motor rating 1.5 kW.Features
- Powerful: bell-shaped screw design with patented self-balancing screws; for load lock and transfer chambers, metrology, lithography, PVD and rapid thermal annealing (RTA)
- Efficient: controlled drive, low operating costs, little maintenance, high availability, direct water cooling
- Compact: space-saving design with directly mounted canned motor, integrated control panel
Typical applications
Busch lists: Semiconductors (stripping/ashing, polysilicon etching, ion implantation and others).Versions of the Busch COBRA BC 0101 G
The 1 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 90 |
|---|---|
| Pumping speed 60Hz | 90 |
| Ultimate pressure | 0.01 |
| Rated motor power 50Hz | 1.5 |
| Rated motor power 60Hz | 1.5 |
| Weight | 115 |
| Length | 52 |
| Width | 30 |
| Height | 34 |
| Inlet connection flange | DN 50 KF |
| Outlet connection flange | DN 40 KF |
| Noise level | 58 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Convert units: vacuum and pressure units · Nm³/h to m³/h
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 90 m³/h |
| Ultimate pressure | 0.01 mbar |
| Rated motor power | 1.5 kW |
| Nominal speed | 3000 min⁻¹ |
| Power consumption at ultimate pressure | 0.7 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | 58 dB(A) |
| Water consumption | 1.0 l/min |
| Dimensions (L × W × H) | 520 × 300 × 340 mm |
| Weight (approx.) | 115 kg |
| Gas inlet | DN 50 KF |
| Gas outlet | DN 40 KF |
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