COBRA BC 1001 GPumping speed 870 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 3161 C 1361800932 Version as listed in the Busch shop, motor and equipment on request
The Busch COBRA DS 3161 C is a dry screw vacuum pump with a nominal pumping speed of 3200 m³/h and an ultimate pressure of 0.001 mbar. Ehrler & Beck advises on selection and service.
Request a quote for this product Read more
- Pumping speed 3,200 m³/h 50 Hz 3,200 m³/h 60 Hz
- Ultimate pressure 1 × 10-3 mbar
- Rated motor power 30 kW 50 Hz 30 kW 60 Hz
| Variant | Part number |
|---|---|
| Version as listed in the Busch shop, motor and equipment on request (selected) | 1361800932 |
Busch COBRA DS 3161 C – dry screw vacuum pump
The Busch COBRA DS 3161 C is a dry screw vacuum pump. The nominal pumping speed is 3200 m³/h, the ultimate pressure 0.001 mbar. Nominal motor rating 30 kW.Features
- Powerful: screw design with integrated vacuum booster, for chemical vapour deposition (CVD), rapid thermal processing (RTP) and atomic layer deposition (ALD)
- Efficient: low operating costs, little maintenance, long maintenance intervals, high availability, indirect water cooling, high hydrogen throughput
- Compact: space-saving design with directly mounted canned motor; backing pump and vacuum booster on a common base frame
Typical applications
Busch lists: Displays (load lock chambers); Semiconductors (low-pressure chemical vapour deposition (LPCVD)/diffusion, applications with high gas throughput, polysilicon etching and others); Solar (cell production).Accessories
- Optional powder process version available (only for DS 3010 G and DS 3161 C)
- Optional tantalum coating
Versions of the Busch COBRA DS 3161 C
The 1 versions differ in motor, voltage and equipment; order numbers and descriptions from the Busch Group shop.Advice and service
Ehrler & Beck advises on selection, accessories and service.| Pumping speed 50Hz | 3,200 |
|---|---|
| Pumping speed 60Hz | 3,200 |
| Ultimate pressure | 1 × 10-3 |
| Rated motor power 50Hz | 30 |
| Rated motor power 60Hz | 30 |
| Weight | 1,375 |
| Length | 131.6 |
| Width | 63.3 |
| Height | 124.9 |
| Inlet connection flange | DN 160 |
| Outlet connection flange | DN 63 |
| Noise level | 75 dB(A) |
| Cooling method | Water cooling |
| Oil type | Oil-free |
Convert units: vacuum and pressure units · Nm³/h to m³/h
Additional technical data
| Technical data | Value |
|---|---|
| Nominal pumping speed | 3200 m³/h |
| Ultimate pressure | 0.001 mbar |
| Rated motor power, backing pump | 15 kW |
| Rated motor power, vacuum booster | 15 kW |
| Rated speed, backing pump | 3000 min⁻¹ (50 Hz) / 3600 min⁻¹ (60 Hz) |
| Rated speed, vacuum booster | 4500 min⁻¹ (50 Hz) / 5400 min⁻¹ (60 Hz) |
| Power consumption at ultimate pressure | 11.8 kW |
| Power consumption at idle | 9.9 kW |
| Sound pressure level (ISO 2151, KpA = 3 dB) | < 75 dB(A) |
| Water consumption | 10 l/min |
| Nitrogen consumption | 0 – 200 l/min |
| Dimensions (L × W × H) | 1316 × 633 × 1249 mm |
| Weight (approx.) | 1375 kg |
| Gas inlet | DN 160 |
| Gas outlet | DN 63 |
COBRA BC 1001 GPumping speed 870 m³/hUltimate pressure 3 × 10-3 mbar
COBRA BC 1200 APumping speed 1,200 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 1200 APumping speed 1,200 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 2000 GPumping speed 1,365 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 1800 APumping speed 1,700 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 1800 A XPumping speed 1,700 m³/hUltimate pressure 3 × 10-3 mbar
COBRA DS 3010 GPumping speed 3,200 m³/hUltimate pressure 1 × 10-3 mbar
COBRA DS 3181 CPumping speed 3,500 m³/hUltimate pressure 1 × 10-3 mbar
COBRA DS 5161 BPumping speed 4,300 m³/hUltimate pressure 1 × 10-3 mbar
COBRA DS 8161 FPumping speed 6,000 m³/hUltimate pressure 1 × 10-3 mbar
COBRA DS 9161 BPumping speed 6,220 m³/hUltimate pressure 1 × 10-3 mbar
COBRA DS 8162 FPumping speed 7,200 m³/hUltimate pressure 1 × 10-3 mbar
