Technology
Screw vacuum pumps
Two counter-rotating screw rotors convey the gas through the pump without contact – dry-running or with oil injection. 156 current models from 6 manufacturers – comparable by pumping speed, ultimate pressure and rated motor power.
Compare 156 modelsHow the technology works
- 156models
- 19series
- 6manufacturers
- 1 × 10⁻³ mbarlowest ultimate pressure
Touch the points: the parts explain themselves.
Manufacturers and series
6 manufacturers, 19 series
Each series leads to its page with all models. “Show only …” sets the filter of the product overview.
Atlas Copco
31 models · 160–5,136 m³/h
Becker
2 models · 290–1,380 m³/h
Busch
58 models · 70–7,385 m³/h
Edwards
35 models · 160–5,760 m³/h
Elmo Rietschle
12 models · 300–5,740 m³/h
Leybold
18 models · 63–1,600 m³/h
Product overview
Compare all 156 models
The filters on the left narrow down the selection by the key figures of the models – for 50 or 60 Hz.
Atlas Copco DHS VSD+ series 1 model
DHS 3000 VSD+Pumping speed 3,044 m³/h 50 Hz3,044 m³/h 60 HzUltimate pressure 350 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 4Atlas Copco DWS C series 7 models
DWS 250 CPumping speed 250 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 HzVariants
DWS 400 CPumping speed 400 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power 11 kW 50 HzVariants
DWS 650 CPumping speed 650 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power 18.5 kW 50 HzVariants
DWS 800 CPumping speed 800 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power 18.5 kW 50 HzVariants
DWS 1000 CPumping speed 1,100 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power 30 kW 50 HzVariants
DWS 1300 CPumping speed 1,300 m³/h 50 HzUltimate pressure 0.05 mbarRated motor power 30 kW 50 HzVariants
DWS 1600 CPumping speed 1,600 m³/h 50 HzUltimate pressure 0.5 mbarRated motor power 37 kW 50 HzVariants Atlas Copco DWS series 3 models
DWS 200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 14
DWS 300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power Variants 14
DWS 500Pumping speed 460 m³/h 50 Hz460 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power Variants 7Atlas Copco DWS VSD+ series 6 models
DWS 160 VSD+Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1
DWS 250 VSD+Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 1
DWS 450 VSD+Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3
DWS 750 VSD+Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3
DWS 160/1750 VSD+Pumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 1
DWS 250/2600 VSD+Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 1Atlas Copco GHS VSD+ series 14 models
GHS 402 VSD+Pumping speed 467 m³/h 50 Hz467 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 4
GHS 602 VSD+Pumping speed 640 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 7.5 – 11 kW 50 Hz7.5 – 11 kW 60 HzVariants 4
GHS 752 VSD+Pumping speed 805 m³/h 50 Hz805 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 11 – 15 kW 50 Hz11 – 15 kW 60 HzVariants 4
GHS 902 VSD+Pumping speed 917 m³/h 50 Hz917 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 15 – 18.5 kW 50 Hz15 – 18.5 kW 60 HzVariants 4
GHS 1002 VSD+Pumping speed 1,039 m³/h 50 Hz1,039 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
GHS 1202 VSD+Pumping speed 1,172 m³/h 50 Hz1,172 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9
GHS 1402 VSD+Pumping speed 1,383 m³/h 50 Hz1,383 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 9
GHS 1602 VSD+Pumping speed 1,581 m³/h 50 Hz1,581 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 9
GHS 2002 VSD+Pumping speed 1,771 m³/h 50 Hz1,771 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 9
GHS 2700 VSD+Pumping speed 2,674 m³/h 50 Hz2,674 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 45 kW 50 Hz45 kW 60 HzVariants 8
GHS 3400 VSD+Pumping speed 3,268 m³/h 50 Hz3,268 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 8
GHS 3800 VSD+Pumping speed 3,724 m³/h 50 Hz3,724 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 9
GHS 4600 VSD+Pumping speed 4,494 m³/h 50 Hz4,494 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 75 kW 50 Hz75 kW 60 HzVariants 9
GHS 5400 VSD+Pumping speed 5,136 m³/h 50 Hz5,136 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 90 kW 50 Hz90 kW 60 HzVariants 9Becker VADS series 2 models
VADS 250Pumping speed 290 m³/h 50 Hz290 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power Variants
VADS 1500+Pumping speed 1,380 m³/h 50 Hz1,380 m³/h 60 HzUltimate pressure 200 mbarRated motor power Variants Busch COBRA Industry series 36 models
COBRA NS 0070 CPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants
COBRA NC 0100 BPumping speed 110 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 3.5 kW 50 Hz4.8 kW 60 HzVariants 4
COBRA NC 0100 B ECOTORQUEPumping speed 130 m³/h 50 Hz130 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 4.8 kW 50 Hz4.8 kW 60 HzVariants
COBRA NS 0160 CPumping speed 135 m³/h 50 Hz170 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants
COBRA NC 0200 BPumping speed 220 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 6 kW 50 Hz7.6 kW 60 HzVariants 4
COBRA NC 0200 B ECOTORQUEPumping speed 265 m³/h 50 Hz265 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.6 kW 50 Hz7.6 kW 60 HzVariants
COBRA NC 0300 BPumping speed 320 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants 4
COBRA NC 0400 BPumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 APumping speed 350 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 7.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0300 B ECOTORQUEPumping speed 385 m³/h 50 Hz385 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NC 0400 B ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 9.5 kW 50 Hz9.5 kW 60 HzVariants
COBRA NX 0450 A ECOTORQUEPumping speed 420 m³/h 50 Hz420 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants
COBRA NC 0500 BPumping speed 490 m³/h 50 Hz490 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 9 kW 50 Hz9 kW 60 HzVariants
COBRA NC 0630 C VRPumping speed 580 m³/h 50 Hz680 m³/h 60 HzUltimate pressure 25 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants
COBRA NC 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NS 0600 CPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 0630 CPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz17 kW 60 HzVariants
COBRA NC 0630 C ECOTORQUEPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 17 kW 50 Hz17 kW 60 HzVariants
COBRA DX 0650 A PLUSPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 APumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 12.5 kW 50 Hz15 kW 60 HzVariants
COBRA NX 0650 A ECOTORQUEPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NF 0750 APumping speed 750 m³/h 50 Hz750 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants
COBRA NC 1000 BPumping speed 840 m³/h 50 Hz1,000 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 22 kW 50 Hz25 kW 60 HzVariants
COBRA DX 0950 A PLUSPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NF 0950 APumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NX 0950 A ECOTORQUEPumping speed 950 m³/h 50 Hz950 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants
COBRA NC 1500 B VRPumping speed 1,160 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 20 mbarRated motor power 30 kW 50 Hz36 kW 60 HzVariants
COBRA DX 2000 A PLUSPumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants
COBRA NC 2500 CPumping speed 2,000 m³/h 50 Hz2,500 m³/h 60 HzUltimate pressure 1 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants
COBRA NC 2000 C VRPumping speed 2,100 m³/h 50 Hz2,600 m³/h 60 HzUltimate pressure 20 mbarRated motor power 55 kW 50 Hz63 kW 60 HzVariants
COBRA DH 2760 APumping speed 2,112 m³/h 50 Hz2,112 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 2780 APumping speed 2,250 m³/h 50 Hz2,250 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants
COBRA DH 4560 APumping speed 3,077 m³/h 50 Hz3,077 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 4580 APumping speed 3,512 m³/h 50 Hz3,512 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants
COBRA DH 6260 APumping speed 3,781 m³/h 50 Hz3,781 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 22.5 kW 50 Hz22.5 kW 60 HzVariants
COBRA DH 6280 APumping speed 4,652 m³/h 50 Hz4,652 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 26 kW 50 Hz26 kW 60 HzVariants Busch COBRA Semicon series 22 models
COBRA DS 0080 GPumping speed 70 m³/h 50 Hz85 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 4 kW 50 Hz4.4 kW 60 HzVariants 2
COBRA BA 0100 CPumping speed 85 m³/h 50 Hz105 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.8 kW 60 HzVariants 3
COBRA BC 0101 GPumping speed 90 m³/h 50 Hz90 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 1
COBRA DS 0160 GPumping speed 140 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.03 mbarRated motor power 5.5 kW 50 Hz6.6 kW 60 HzVariants 3
COBRA DS 0700 GPumping speed 500 m³/h 50 Hz610 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 0601 GPumping speed 550 m³/h 50 Hz640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 3 kW 50 Hz3.3 kW 60 HzVariants 1
COBRA DS 0600 EPumping speed 600 m³/h 50 Hz600 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2
COBRA DS 1000 GPumping speed 775 m³/h 50 Hz960 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.8 kW 60 HzVariants 2
COBRA BC 1001 GPumping speed 870 m³/h 50 Hz870 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 4.4 kW 50 Hz4.4 kW 60 HzVariants 1
COBRA BC 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 1
COBRA DS 1200 APumping speed 1,200 m³/h 50 Hz1,200 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8 kW 50 Hz8.4 kW 60 HzVariants 2
COBRA DS 2000 GPumping speed 1,365 m³/h 50 Hz1,640 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 11 kW 50 Hz13.2 kW 60 HzVariants 2
COBRA DS 1800 APumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 8.4 kW 50 Hz8.4 kW 60 HzVariants 1
COBRA DS 1800 A XPumping speed 1,700 m³/h 50 Hz1,700 m³/h 60 HzUltimate pressure 3 × 10-3 mbarRated motor power 10.6 kW 50 Hz10.6 kW 60 HzVariants 1
COBRA DS 3010 GPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3161 CPumping speed 3,200 m³/h 50 Hz3,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 3181 CPumping speed 3,500 m³/h 50 Hz3,500 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 33.5 kW 50 Hz33.5 kW 60 HzVariants
COBRA DS 5161 BPumping speed 4,300 m³/h 50 Hz4,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants
COBRA DS 8161 FPumping speed 6,000 m³/h 50 Hz6,000 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 1
COBRA DS 9161 BPumping speed 6,220 m³/h 50 Hz6,220 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 35 kW 50 Hz35 kW 60 HzVariants
COBRA DS 8162 FPumping speed 7,200 m³/h 50 Hz7,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 50 kW 50 Hz50 kW 60 HzVariants
COBRA DS 8163 BPumping speed 7,385 m³/h 50 Hz7,385 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 65 kW 50 Hz65 kW 60 HzVariants Edwards EDS series 3 models
Edwards EDS200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 5.5 – 7.5 kW 50 Hz5.5 – 7.5 kW 60 HzVariants 10
Edwards EDS300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10
Edwards EDS480Pumping speed 460 m³/h 50 Hz460 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5Edwards EOSi series 10 models
Edwards EOS350iPumping speed 400 m³/h 50 Hz400 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 5.5 kW 50 Hz5.5 kW 60 HzVariants 4
Edwards EOS585iPumping speed 560 m³/h 50 Hz560 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants
Edwards EOS730iPumping speed 730 m³/h 50 Hz730 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants
Edwards EOS900iPumping speed 900 m³/h 50 Hz900 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 1
Edwards EOS1400iPumping speed 1,400 m³/h 50 Hz1,400 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 1
Edwards EOS1700iPumping speed 1,620 m³/h 50 Hz1,620 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 3
Edwards EOS2000iPumping speed 1,818 m³/h 50 Hz1,818 m³/h 60 HzUltimate pressure 0.35 mbarRated motor power 37 kW 50 Hz37 kW 60 HzVariants 1
Edwards EOS3800iPumping speed 3,828 m³/h 50 Hz3,828 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 55 kW 50 Hz55 kW 60 HzVariants 4
Edwards EOS4600iPumping speed 4,478 m³/h 50 Hz4,478 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 75 kW 50 Hz75 kW 60 HzVariants 4
Edwards EOS5400iPumping speed 5,004 m³/h 50 Hz5,004 m³/h 60 HzUltimate pressure 0.3 mbarRated motor power 90 kW 50 Hz90 kW 60 HzVariants 4Edwards EXS series 11 models
Edwards EXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2
Edwards EXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2
Edwards EXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 3
Edwards EXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 3
Edwards EXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 2
Edwards EXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 2
Edwards EXS450/2600Pumping speed 2,130 m³/h 50 Hz2,130 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 2
Edwards EXS750/2600Pumping speed 2,280 m³/h 50 Hz2,280 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1
Edwards EXS450/4200Pumping speed 3,180 m³/h 50 Hz3,180 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 2
Edwards EXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1
Edwards EXS750/8000Pumping speed 5,760 m³/h 50 Hz5,760 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 1Edwards GXS series 10 models
Edwards GXS160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 12
Edwards GXS250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 10
Edwards GXS450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 8
Edwards GXS750Pumping speed 740 m³/h 50 Hz740 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 22 kW 50 Hz22 kW 60 HzVariants 12
Edwards GXS160/1750Pumping speed 1,160 m³/h 50 Hz1,160 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 12 kW 50 Hz12 kW 60 HzVariants 11
Edwards GXS250/2600Pumping speed 1,900 m³/h 50 Hz1,900 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 10
Edwards GXS450/2600Pumping speed 2,200 m³/h 50 Hz2,200 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9
Edwards GXS750/2600Pumping speed 2,300 m³/h 50 Hz2,300 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 8
Edwards GXS450/4200Pumping speed 3,026 m³/h 50 Hz3,026 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 18.5 kW 50 Hz18.5 kW 60 HzVariants 9
Edwards GXS750/4200Pumping speed 3,450 m³/h 50 Hz3,450 m³/h 60 HzUltimate pressure 1 × 10-3 mbarRated motor power 29.5 kW 50 Hz29.5 kW 60 HzVariants 10Edwards IDX series 1 model
Edwards IDX1300Pumping speed 1,100 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 30 kW 60 HzVariants 3Elmo Rietschle S-SVT series 11 models
S-SVT 600Pumping speed 605 m³/h 50 HzUltimate pressure Rated motor power 7.5 kW 50 HzVariants
S-SVT 800Pumping speed 735 m³/h 50 HzUltimate pressure Rated motor power 11 kW 50 HzVariants
S-SVT 1000Pumping speed 905 m³/h 50 HzUltimate pressure 0.1 mbarRated motor power 15 kW 50 HzVariants
S-SVT 1500Pumping speed 1,386 m³/h 50 HzUltimate pressure Rated motor power 22 kW 50 HzVariants
S-SVT 1800Pumping speed 1,672 m³/h 50 HzUltimate pressure Rated motor power 30 kW 50 HzVariants
S-SVT 2000Pumping speed 1,936 m³/h 50 HzUltimate pressure Rated motor power 37 kW 50 HzVariants
S-SVT 3000Pumping speed 3,135 m³/h 50 HzUltimate pressure Rated motor power 45 kW 50 HzVariants
S-SVT 4000Pumping speed 3,830 m³/h 50 HzUltimate pressure Rated motor power 55 kW 50 HzVariants
S-SVT 4500Pumping speed 4,310 m³/h 50 HzUltimate pressure Rated motor power 75 kW 50 HzVariants
S-SVT 5400Pumping speed 5,335 m³/h 50 HzUltimate pressure Rated motor power 75 kW 50 HzVariants
S-SVT 6000Pumping speed 5,740 m³/h 50 HzUltimate pressure Rated motor power 90 kW 50 HzVariants Elmo Rietschle S-VSI series 1 model
S-VSI 301Pumping speed 300 m³/h 50 Hz360 m³/h 60 HzUltimate pressure 0.08 mbarRated motor power Variants Leybold DRYVAC series 9 models
DRYVAC DV 200Pumping speed 210 m³/h 50 Hz210 m³/h 60 HzUltimate pressure 0.05 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 300Pumping speed 280 m³/h 50 Hz280 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 4
DRYVAC DV 500Pumping speed 380 – 460 m³/h 50 Hz380 – 460 m³/h 60 HzUltimate pressure 0.01 – 0.05 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 5
DRYVAC DV 650Pumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 33
DRYVAC DV 650 FPPumping speed 650 m³/h 50 Hz650 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 8
DRYVAC DV 800Pumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 11
DRYVAC DV 800 FP-rPumping speed 800 m³/h 50 Hz800 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 19.6 kW 50 Hz19.6 kW 60 HzVariants 4
DRYVAC DV 1200Pumping speed 1,250 m³/h 50 Hz1,250 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 30 kW 50 Hz30 kW 60 HzVariants 3
DRYVAC DV 1600Pumping speed 1,600 m³/h 50 Hz1,600 m³/h 60 HzUltimate pressure 5 × 10-3 mbarRated motor power 39.2 kW 50 Hz39.2 kW 60 HzVariants 1Leybold DURADRY series 3 models
DURADRY DD 160Pumping speed 160 m³/h 50 Hz160 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2
DURADRY DD 250Pumping speed 250 m³/h 50 Hz250 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 7.5 kW 50 Hz7.5 kW 60 HzVariants 2
DURADRY DD 450Pumping speed 450 m³/h 50 Hz450 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 11 kW 50 Hz11 kW 60 HzVariants 1Leybold NOVADRY series 4 models
NOVADRY ND 65Pumping speed 63 m³/h 50 Hz63 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 1.5 kW 50 Hz1.5 kW 60 HzVariants 3
NOVADRY ND 100Pumping speed 96 m³/h 50 Hz96 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 2.2 kW 50 Hz2.2 kW 60 HzVariants 3
NOVADRY ND 160Pumping speed 138 m³/h 50 Hz138 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 3 kW 50 Hz3 kW 60 HzVariants 3
NOVADRY ND 200Pumping speed 175 m³/h 50 Hz175 m³/h 60 HzUltimate pressure 0.1 mbarRated motor power 4 kW 50 Hz4 kW 60 HzVariants 3Leybold SCREWLINE series 2 models
SCREWLINE SP 630Pumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 6
SCREWLINE SP 630 FPumping speed 630 m³/h 50 Hz630 m³/h 60 HzUltimate pressure 0.01 mbarRated motor power 15 kW 50 Hz15 kW 60 HzVariants 11No model matches these filters.
Atlas Copco DHS VSD+ series 1 model
Atlas Copco DWS C series 7 models
Atlas Copco DWS series 3 models
Atlas Copco DWS VSD+ series 6 models
Atlas Copco GHS VSD+ series 14 models
Becker VADS series 2 models
Busch COBRA Industry series 36 models
Busch COBRA Semicon series 22 models
Edwards EDS series 3 models
Edwards EOSi series 10 models
Edwards EXS series 11 models
Edwards GXS series 10 models
Edwards IDX series 1 model
Elmo Rietschle S-SVT series 11 models
Elmo Rietschle S-VSI series 1 model
Leybold DRYVAC series 9 models
Leybold DURADRY series 3 models
Leybold NOVADRY series 4 models
Leybold SCREWLINE series 2 models
Models that a manufacturer no longer carries in its current range are not part of this overview; they are listed in its “Outdated models” section – for example under outdated Leybold models.
Operating principle
How a screw vacuum pump works
In the pump housing, two parallel, screw-shaped rotors turn in opposite directions – without contact and with very narrow gaps; a gearbox synchronises them. Between the threads and the housing, chambers form that transport the gas axially from the inlet connection to the discharge connection.
The drawing shows the basic principle. The designs of the individual manufacturers differ in detail.
- SuctionThe chamber connected to the inlet connection (A) grows as the screws turn and fills with gas.
- TransportThe chambers (C) travel axially to the discharge side between the rotors (B) and the housing (D).
- Compression and dischargeOn the discharge side the chamber shrinks until the discharge channel opens and the gas is discharged through the discharge connection (F).
Key figures
The technology in figures
The ranges result from the current models in our range.
Pumping speed (50 Hz)
63 to 7,385 m³/hin our range
Ultimate pressure
1 × 10⁻³ to 350 mbarin our range
Rated motor power (50 Hz)
1.5 to 90 kWin our range
Ultimate pressure compared (mbar, logarithmic)
For comparison: the oil-lubricated rotary vane vacuum pumps in our range reach 1 × 10⁻³ to 20 mbar.
What characterises the technology
Dry or with oil
In dry-running screw vacuum pumps the compression chamber is oil-free. Oil-injected series such as the GHS VSD+, by contrast, work with oil in the compression chamber.
Contact-free
The rotors touch neither each other nor the housing; the narrow gaps provide the seal.
Cooling
Depending on the manufacturer and size, cooling is provided by water chambers in the housing, by additional cooling gas or in a similar way.
Speed control
In series with an integrated frequency converter, the pumping speed adapts to the actual demand.
Advantages
What speaks for this technology
- Oil-free compression chamber in dry-running series
- Low ultimate pressures in a single stage
- Good water vapour tolerance
- Insensitive to liquid slugs
- Short evacuation times
- Long service life, low maintenance
- Versions suitable for flushing and CIP
- Low noise level
Applications
Where they work
- Chemical industrydrying, distillation, rectification, evaporation, degassing, cooling
- General industryextraction systems, drying, coating, cleaning, industrial furnaces
- Surface technology and electronicsvacuum metallurgy
- Packagingfood processing and packaging, central vacuum systems
- Pneumatic conveyingcentral vacuum systems
- Research and laboratory
Frequently asked questions
Questions about screw vacuum pumps
How does a screw vacuum pump work?
Two screw-shaped rotors turn in opposite directions and without contact in the housing. Between their threads and the housing, chambers form that transport the gas from the inlet connection to the discharge side and compress it there. The drawing in the section Operating principle shows every step.
Are screw vacuum pumps oil-free?
Dry-running screw vacuum pumps have an oil-free compression chamber. Oil-injected series such as the GHS VSD+ from Atlas Copco, by contrast, work with oil in the compression chamber. The product page of a model states which design it has.
What ultimate pressure do screw vacuum pumps reach?
The models in our range state ultimate pressures from 1 × 10⁻³ to 350 mbar – depending on the series and design. In the product overview, the “Ultimate pressure” filter narrows down the selection.
From which manufacturers does Ehrler & Beck carry this technology?
Currently from Atlas Copco, Becker, Busch, Edwards, Elmo Rietschle and Leybold. The series are listed in the section Manufacturers and series.
How do I find the right model?
In the product overview, the filters narrow down the selection by the key figures of the models. For sizing, it is best to tell us the gas to be conveyed, the working pressure and the flow rate you need – we will be glad to advise you.
What do the figures for 50 Hz and 60 Hz mean?
Flow rate and rated motor power depend on the mains frequency. The overview therefore shows both values wherever the manufacturer states them, and the size filters can be switched between 50 Hz and 60 Hz.
Does Ehrler & Beck also supply spare parts and service?
Yes. Ehrler & Beck offers original spare parts and accessories as well as maintenance and repair.
Which model fits your process?
Tell us the gas to be conveyed, the working pressure and the flow rate you need – we will advise you on selection, spare parts and service.







